TY - JOUR A1 - Wolff, Timo A1 - Malzer, W. A1 - Mantouvalou, I. A1 - Hahn, Oliver A1 - Kanngießer, B. T1 - A new fundamental parameter based calibration procedure for micro X-ray fluorescence spectrometers JF - Spectrochimica acta B N2 - Fundamental parameter based quantification of X-ray fluorescence (XRF) measurement data requires an accurate knowledge of the spectrometer parameters, including the spectral distribution of the excitation radiation. In case of micro-XRF where a polycapillary optic is utilized in the excitation channel this distribution is changed due to the transmission properties of the lens. A new calibration procedure, based on fluorescence data of thin standard samples, was developed to determine the excitation spectrum, i.e., the product of the X-ray tube spectrum and the transmission of the used X-ray optic of a micro-XRF setup. The calibration result was validated by the quantitative analyses of certified multi-element reference standards and shows uncertainties in the order of 2% for main components, 10% for minor elements and 25% for trace elements. The influence of secondary order effects like Coster–Kronig transitions and cascade effects is analyzed and the accuracy of fundamental parameters in common databases is discussed. KW - Polycapillary optic KW - Transmission KW - Micro-XRF calibration KW - Reference free quantification PY - 2011 DO - https://doi.org/10.1016/j.sab.2011.01.009 SN - 0584-8547 SN - 0038-6987 VL - 66 IS - 2 SP - 170 EP - 178 PB - Elsevier B.V. CY - Amsterdam AN - OPUS4-24213 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -