TY - CONF A1 - Legall, Herbert A1 - Schwanke, Christoph A1 - Pentzien, Simone A1 - Dittmar, G. A1 - Bonse, Jörn A1 - Krüger, Jörg T1 - X-ray emission as a potential hazard during ultrashort pulse laser material processing N2 - Ultrashort laser pulse micromachining features a high precision. By increasing the repetition rate of the applied laser to several 100 kHz, laser processing becomes quick and cost-effective and make this method attractive for industrial applications. Upon exceeding a critical laser intensity, hard X-ray radiation is generated as a side effect. Even if the emitted X-ray dose per pulse is low, the accumulated X-ray dose becomes significant for high-repetition-rate laser systems so that radiation safety must be considered. The X-ray emission during ultrashort laser processing was investigated for an intensity range up to 2.6*10^14 W/cm2. The investigations were performed with a laser emitting pulses with 925 fs pulse duration, at 1030 nm wavelength and 400 kHz repetition rate. Steel, tungsten, and glass were studied in ambient air. Corresponding X-ray spectra and X-ray dose measurements were presented. Suitable radiation protection strategies were shown. T2 - European Materials Research Society (EMRS) Spring Meeting 2018, Symposium X “Photon-assisted synthesis and processing of materials in nano-microscale” CY - Strasbourg, France DA - 18.06.2018 KW - Laser-induced X-ray emission KW - Ultrashort laser material interaction KW - Femtosecond laser KW - Radiation protection PY - 2018 AN - OPUS4-45382 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -