TY - JOUR A1 - Andree, Stefan A1 - Heidmann, B. A1 - Ringleb, F. A1 - Eylers, K. A1 - Bonse, Jörn A1 - Boeck, T. A1 - Schmid, M. A1 - Krüger, Jörg T1 - Production of precursors for micro-concentrator solar cells by femtosecond laser-induced forward transfer N2 - Single-pulse femtosecond laser-induced forward transfer (LIFT, 30 fs, 790 nm) is used to deposit micron-sized dots of copper and/or indium onto a molybdenum layer on glass. Such systems can serve as precursors for the bottom-up manufacturing of micro-concentrator solar cells based on copper-indium-gallium-diselenide. The influence of the thickness of the copper, indium and combined copper-indium donor layers on the quality of the transferred dots was qualified by scanning electron microscopy, energy-dispersive X-ray analysis, and optical microscopy. The potential for manufacturing of a spatial arrangement adapted to the geometry of micro-lens arrays needed for micro-concentrator solar cells is demonstrated. T2 - EMRS Spring Meeting 2017, Symposium X “New frontiers in laser interaction: from hard coatings to smart materials" CY - Strasbourg, France DA - 22.05.2017 KW - Laser-induced forward transfer (LIFT) KW - Femtosecond laser KW - Micro-concentrator solar cell KW - Copper-indium-gallium-diselenide KW - CIGSe PY - 2017 DO - https://doi.org/10.1007/s00339-017-1282-x SN - 1432-0630 SN - 0947-8396 VL - 123 SP - Article 670, 1 EP - 8 AN - OPUS4-42273 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Krüger, Jörg T1 - Production of micro solar cells using femtosecond laser pulses N2 - A promising technology in photovoltaics is based on micro-concentrator solar cells, where the photovoltaic active area is realized as an array of sub-millimeter sized thin-film solar cells. For copper-indium-gallium-diselenide (CIGSe), the solar cells can be arranged in the foci of a regular arrangement of micro-lenses to enhance their efficiency by light concentration, to allow a better heat dissipation and to save expensive raw material (indium). Different approaches to produce micro-sized precursors of CIGSe absorbers on molybdenum are presented using 30-fs laser pulses at 790 nm wavelength. On the one hand, a multi pulse surface structuring of the molybdenum or the underlying glass substrate and a subsequent physical vapor deposition (PVD) process were used for a site-selective aggregation of indium droplets. On the other hand, a single pulse laser-induced forward transfer (LIFT) was utilized to selectively deposit combined copper/indium/gallium precursor pixels on the molybdenum back contact of the solar cell. It was demonstrated that a postprocessing (selenization, isolation, contacting) of the laser-generated micro-sized precursors results in an array of working CIGSe solar cells with an efficiency of 2.8% for 1 sun illumination. T2 - 15th Erwin Schrödinger Colloquium 2017 CY - Vienna, Austria DA - 01.12.2017 KW - Solar cell KW - Micro-concentrator KW - Copper-indium-gallium-diselenide (CIGSe) KW - Femtosecond laser KW - Laser-induced forward transfer (LIFT) PY - 2017 AN - OPUS4-43338 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Bonse, Jörn A1 - Krüger, Jörg T1 - Probing the heat affected zone by chemical modifications in femtosecond pulse laser ablation of titanium nitride films in air N2 - A new approach is presented to quantify the so-called "heat affected zone" (HAZ) during femtosecond laser pulse processing. Ablation of titanium nitride (TiN) thin films (~3 μm thickness) by multiple femtosecond laser pulses (τ=130 fs, λ=800 nm) in air environment was studied by means of two different surface analytical methods both being sensitive to chemical alterations at the surface. Scanning Auger electron microscopy was applied for a visualization of the spatial distribution of specific elements (Ti, O) within the laser-modified areas. The chemical state of the irradiated surface was revealed by complementary x-ray photoelectron spectroscopy. Both methods were used for a depth-profiling chemical analysis (tracking the elements Ti, N, O, and C) using an Ar-ion beam for surface sputtering. In a narrow laser fluence range slightly below the ablation threshold of TiN significant superficial oxidation can be observed leading to the formation of substoichiometric TiO2-x. At fluences above the ablation threshold, an increased titanium concentration is observed within the entire ablation craters. Following upon sputter removal the elemental distribution into the depth of the nonablated material, the results allow an estimation of the heat-affected zone for femtosecond laser ablation in air environment. According to our analyses, the HAZ extends up to a few hundreds of nanometers into the nonablated material. KW - Femtosecond laser ablation KW - Heat affected zone KW - Titanium nitride KW - Scanning Auger electron microscopy KW - X-ray KW - Photoelektron spectroscopy PY - 2010 UR - http://link.aip.org/link/?JAP/107/054902 DO - https://doi.org/10.1063/1.3311552 SN - 0021-8979 SN - 1089-7550 VL - 107 IS - 5 SP - 054902-1 - 054902-5 PB - American Institute of Physics CY - Melville, NY AN - OPUS4-20949 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - GEN A1 - Hertwig, Andreas A1 - Martin, Sven A1 - Krüger, Jörg A1 - Spielmann, C. A1 - Lenner, M. A1 - Kautek, Wolfgang ED - Dausinger, F. ED - Lichtner, F. ED - Lubatschowski, H. T1 - Primary hazards and reliability of protective materials N2 - Femtosecond laser pulses are close to industrial use. The advantages of ultrashort laser pulses for micromachining applications especially in the case of dielectric and biological samples down to pulse durations of 5 fs have been established. The current international standards of laser safety are primarily concerned with CW and pulsed lasers down to the nanosecond range. Therefore, human tissue and laser-protection equipment was investigated with respect to its resistance and protection performance for femtosecond laser illumination down to 30 fs. This included filter glasses for laser protection eyewear, polymer and textile materials used in curtains and guards. Bulk absorber filters can provide enough protection against laser radiation, give a sufficiently broad absorption spectrum. Materials are damaged more easily by femtosecond laser radiation. The need for sufficient spectral broadness as well as the different damage thresholds have to be included in international laser safety standards. This work should trigger the development of novel eye-protection devices that are lighter and ergonomically more acceptable than present commercial models. KW - Lasersicherheit KW - Kurzpulslaser KW - Femtosekunden KW - Lasertechnik KW - Materialbearbeitung PY - 2004 SN - 3-540-20114-9 DO - https://doi.org/10.1007/b96440 SN - 0303-4216 N1 - Serientitel: Topics in applied physics – Series title: Topics in applied physics IS - 96 SP - 287 EP - 307 PB - Springer CY - Berlin AN - OPUS4-4661 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Krüger, Jörg A1 - Kautek, Wolfgang A1 - Lenzner, M. A1 - Krausz, F. T1 - Precision laser ablation of dielectrics in the 10-fs regime N2 - Zusammenfassung Laser pulses in the 10-fs domain provide a quality of micromachining of fused silica and borosilicate glass that is unobtainable with longer pulses in the range of several 100 femtoseconds up to picoseconds. The shortening of the pulses reduces the statistical behavior of the material removal and the ablation process thus attains a more deterministic and reproducible character. The improved reproducibility of ablation is accompanied by significantly smoother morphology. This offers the potential for lateral and vertical machining precision of the order of 100 nm and 10 nm, respectively. KW - Laser ablation PY - 1999 DO - https://doi.org/10.1007/s003390050906 SN - 0947-8396 VL - 68 IS - 3 SP - 369 EP - 371 PB - Springer CY - Berlin AN - OPUS4-825 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Derrien, Thibault A1 - Koter, Robert A1 - Krüger, Jörg A1 - Höhm, S. A1 - Rosenfeld, A. A1 - Bonse, Jörn T1 - Plasmonic formation mechanism of periodic 100-nm-structures upon femtosecond laser irradiation of silicon in water N2 - The formation of laser-induced periodic surface structures (LIPSS) upon irradiation of silicon by multiple (N = 100) linearly polarized Ti:sapphire femtosecond laser pulses (duration τ = 30 fs, center wavelength λ0 ~ 790 nm) is studied experimentally in air and water environment. The LIPSS surface morphologies are characterized by scanning electron microscopy and their spatial periods are quantified by two-dimensional Fourier analyses. It is demonstrated that the irradiation environment significantly influences the periodicity of the LIPSS. In air, so-called low-spatial frequency LIPSS (LSFL) were found with periods somewhat smaller than the laser wavelength (ΛLSFL ~ 0.7 × λ0) and an orientation perpendicular to the laser polarization. In contrast, for laser processing in water a reduced ablation threshold and LIPSS with approximately five times smaller periods ΛLIPSS ~ 0.15 × λ0 were observed in the same direction as in air. The results are discussed within the frame of recent LIPSS theories and complemented by a thin film based surface plasmon polariton model, which successfully describes the tremendously reduced LIPSS periods in water. PY - 2014 DO - https://doi.org/10.1063/1.4887808 SN - 0021-8979 SN - 1089-7550 VL - 116 IS - 7 SP - 074902-1 EP - 074902-8 PB - American Institute of Physics CY - Melville, NY AN - OPUS4-31209 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Voss, Heike A1 - Knigge, Xenia A1 - Knapic, D. A1 - Weise, Matthias A1 - Sahre, Mario A1 - Hertwig, Andreas A1 - Sacco, A. A1 - Rossi, A. M. A1 - Radnik, Jörg A1 - Müller, Kai A1 - Wasmuth, Karsten A1 - Krüger, Jörg A1 - Hassel, A. W. A1 - Hodoroaba, Vasile-Dan A1 - Bonse, Jörn T1 - Picosecond laser processing of hierarchical micro–nanostructures on titanium alloy upon pre- and postanodization: morphological, structural, and chemical effects N2 - Recent publications indicate that the order of electrochemical anodization (before or after the laser processing step) plays an important role for the response of bone-forming osteoblasts—an effect that can be utilized for improving permanent dental or removable bone implants. For exploring these different surface functionalities, multimethod morphological, structural, and chemical characterizations are performed in combination with electrochemical pre- and postanodization for two different characteristic microspikes covered by nanometric laser-induced periodic surface structures on Ti–6Al–4V upon irradiation with near-infrared ps-laser pulses (1030 nm wavelength, ≈1 ps pulse duration, 67 and 80 kHz pulse repetition frequency) at two distinct sets of laser fluence and beam scanning parameters. This work involves morphological and topographical investigations by scanning electron microscopy and white light interference microscopy, structural material examinations via X-ray diffraction, and micro-Raman spectroscopy, as well as near-surface chemical analyses by X-ray photoelectron spectroscopy and hard X-ray photoelectron spectroscopy. The results allow to qualify the mean laser ablation depth, assess the spike geometry and surface roughness parameters, and provide new detailed insights into the near-surface oxidation that may affect the different cell growth behavior for pre- or postanodized medical implants. T2 - 2023 E-MRS Spring Meeting, Symposium L "Making light matter: lasers in material sciences and photonics" CY - Strasbourg, France DA - 29.05.2023 KW - Hierarchical micro-nanostructures KW - Laser-induced periodic surface structures (LIPSS) KW - Ultrashort laser pulses KW - Ti-6Al-4V alloy KW - X-ray photoelectron spectroscopy PY - 2024 UR - https://nbn-resolving.org/urn:nbn:de:kobv:b43-601962 DO - https://doi.org/10.1002/pssa.202300920 SN - 1862-6319 SP - 1 EP - 11 PB - Wiley-VCH GmbH CY - Weinheim AN - OPUS4-60196 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Kautek, Wolfgang A1 - Rudolph, Pascale A1 - Daminelli-Widany, Grazia A1 - Krüger, Jörg T1 - Physico-chemical aspects of femtosecond-pulse-laser-induced surface nanostructures N2 - Near-ablation threshold investigations focusing on the generation of periodic nanostructures and their correlation with physico-chemical properties of the solid phase such as e.g., the material-dependent surface energy, were conducted. Molecular dynamic modelling in the sub-picosecond time domain was used to consider ultrafast opto-electronic processes triggering surface reorganization reactions. Fluid containment of solid interfaces showed strong influence on the resulting micro- and nanostructures due to its drastic reduction of the surface energy. The phenomena are discussed in respect to the minimization of the surface free energy in dependence of material composition and interfacial structure. PY - 2005 DO - https://doi.org/10.1007/s00339-005-3211-7 SN - 0947-8396 VL - 81 SP - 65 EP - 70 PB - Springer CY - Berlin AN - OPUS4-7403 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - GEN A1 - Niino, Hiroyuki A1 - Krüger, Jörg A1 - Kautek, Wolfgang ED - Dubowski, J. ED - Dyer, P. T1 - Photochemical surface modification of polyurethane films with biomaterial by excimer laser processing T2 - 3rd Three-Day Conference on Laser Applications in Microelectronic and Optoelectronic Manufacturing, LAMOM ; LASE ; Photonics West CY - San José, CA, USA DA - 1998-01-26 KW - Laser irradiation surface effects KW - Surface and interface chemistry of polymers KW - Photochemical reactions of biomolecules KW - Biochemical reaction mechanisms and kinetics PY - 1998 SN - 0-8194-2713-6 SN - 1605-7422 N1 - Serientitel: SPIE proceedings series – Series title: SPIE proceedings series IS - 3274 SP - 128 EP - 132 PB - SPIE CY - Bellingham, Wash. AN - OPUS4-12040 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Krüger, Jörg A1 - Kautek, Wolfgang A1 - Lenzner, M. A1 - Krausz, F. T1 - Photoablation with sub-10 fs laser pulses N2 - Ablation experiments in several glasses with single and multishot irradiation by laser pulses in the 10-fs pulse duration domain are presented; physical and technological implications are discussed. We demonstrate that these short pulses offer the potential for lateral and vertical machining precision of the order of 100 nm. KW - Ablation KW - Laser pulses KW - Femtosecond pulses PY - 2000 DO - https://doi.org/10.1016/S0169-4332(99)00432-8 SN - 0169-4332 SN - 1873-5584 VL - 154-155 SP - 11 EP - 16 PB - North-Holland CY - Amsterdam AN - OPUS4-800 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -