TY - GEN A1 - Krüger, Jörg A1 - Kautek, Wolfgang ED - Dubowski, J. T1 - Femtosecond-pulse laser processing of metallic and semiconducting thin films KW - Femtosekundenpulslaser KW - Pulslaser KW - Dünnschicht, metallisch KW - Dünnschicht, halbleitend KW - Ablation PY - 1995 SN - 0-8194-1750-5 SN - 1605-7422 N1 - Serientitel: SPIE proceedings series – Series title: SPIE proceedings series IS - 2403 SP - 436 EP - 447 PB - SPIE CY - Bellingham, Wash. AN - OPUS4-637 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Bonse, Jörn A1 - Rudolph, Pascale A1 - Krüger, Jörg A1 - Baudach, Steffen A1 - Kautek, Wolfgang T1 - Femtosecond pulse laser processing of TiN on silicon N2 - Ultrashort pulse laser microstructuring (pulse duration 130 fs, wavelength 800 nm, repetition rate 2 Hz) of titanium nitride (TiN) films on silicon substrates was performed in air using the direct focusing technique. The lateral and vertical precision of laser ablation was evaluated. The TiN ablation threshold changed with the number of pulses applied to the surface due to an incubation effect. An ablation depth per pulse below the penetration depth of light was observed. Columnar structures were formed in the silicon substrate after drilling through the TiN layer. KW - Femtosecond laser ablation KW - Titanium nitride KW - Silicon KW - Optical properties PY - 2000 DO - https://doi.org/10.1016/S0169-4332(99)00481-X SN - 0169-4332 SN - 1873-5584 VL - 154-155 SP - 659 EP - 663 PB - North-Holland CY - Amsterdam AN - OPUS4-802 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Baudach, Steffen A1 - Bonse, Jörn A1 - Krüger, Jörg A1 - Kautek, Wolfgang T1 - Ultrashort pulse laser ablation of polycarbonate and polymethylmethacrylate N2 - Ablation experiments with ultrashort laser pulses (pulse duration 150 fs, wavelength 800 nm) on polymers (PC, PMMA) relevant for biomedical technology have been performed in air. The lateral and vertical machining precision was evaluated by optical, atomic force and scanning electron microscopy. The ablation threshold reaches values in the range of 0.5–2.5 J/cm2 and depends significantly on the number of laser pulses applied to the same spot. The hole diameters are influenced by the laser fluence and the number of laser pulses. The relation between the ablation threshold and the number of laser pulses applied to the same spot is described in accordance with an incubation model. KW - Femtosecond laser ablation KW - Polymer KW - Polycarbonate KW - Polymethylmethacrylate PY - 2000 DO - https://doi.org/10.1016/S0169-4332(99)00474-2 SN - 0169-4332 SN - 1873-5584 VL - 154-155 SP - 555 EP - 560 PB - North-Holland CY - Amsterdam AN - OPUS4-803 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Krüger, Jörg A1 - Kautek, Wolfgang A1 - Lenzner, M. A1 - Krausz, F. T1 - Precision laser ablation of dielectrics in the 10-fs regime N2 - Zusammenfassung Laser pulses in the 10-fs domain provide a quality of micromachining of fused silica and borosilicate glass that is unobtainable with longer pulses in the range of several 100 femtoseconds up to picoseconds. The shortening of the pulses reduces the statistical behavior of the material removal and the ablation process thus attains a more deterministic and reproducible character. The improved reproducibility of ablation is accompanied by significantly smoother morphology. This offers the potential for lateral and vertical machining precision of the order of 100 nm and 10 nm, respectively. KW - Laser ablation PY - 1999 DO - https://doi.org/10.1007/s003390050906 SN - 0947-8396 VL - 68 IS - 3 SP - 369 EP - 371 PB - Springer CY - Berlin AN - OPUS4-825 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Krüger, Jörg A1 - Kautek, Wolfgang A1 - Krivenko, A.G. A1 - Benderskii, V.A. T1 - Gigantic Hydrogen-Ion Discharge Currents Initiated by a Subpicosecond Laser PY - 1998 SN - 0038-5387 SN - 1023-1935 VL - 34 IS - 10 SP - 1068 EP - 1075 PB - MAIK Nauka/Interperiodica Publ. CY - Moscow AN - OPUS4-826 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Krüger, Jörg A1 - Kautek, Wolfgang A1 - Lenzner, M. A1 - Krausz, F. T1 - Incubation of laser ablation in fused silica with 5-fs pulses N2 - Zusammenfassung The threshold fluences for laser-induced damage of fused silica with single 5-fs pulses from a Ti:sapphire laser system were determined by extrapolating the ablated volume to zero. These thresholds are about 4 times as high as the values previously obtained from multi-shot experiments. This result is interpreted in terms of an irreversible modification of the original material below the single-shot threshold (incubation). KW - Laser PY - 1999 DO - https://doi.org/10.1007/s003390051034 SN - 0947-8396 VL - 69 IS - 4 SP - 465 EP - 466 PB - Springer CY - Berlin AN - OPUS4-799 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Krüger, Jörg A1 - Kautek, Wolfgang A1 - Lenzner, M. A1 - Krausz, F. T1 - Photoablation with sub-10 fs laser pulses N2 - Ablation experiments in several glasses with single and multishot irradiation by laser pulses in the 10-fs pulse duration domain are presented; physical and technological implications are discussed. We demonstrate that these short pulses offer the potential for lateral and vertical machining precision of the order of 100 nm. KW - Ablation KW - Laser pulses KW - Femtosecond pulses PY - 2000 DO - https://doi.org/10.1016/S0169-4332(99)00432-8 SN - 0169-4332 SN - 1873-5584 VL - 154-155 SP - 11 EP - 16 PB - North-Holland CY - Amsterdam AN - OPUS4-800 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Rudolph, Pascale A1 - Bonse, Jörn A1 - Krüger, Jörg A1 - Kautek, Wolfgang T1 - Femtosecond- and nanosecond-pulse laser ablation of bariumalumoborosilicate glass N2 - Laser ablation with femtosecond pulses (130 fs, wavelength 800 nm, repetition rate 2 Hz) was compared with nanosecond-pulse ablation (10 ns, wavelength 266 nm, repetition rate 2.5 Hz) of bariumalumoborosilicate glass in air using the direct focusing technique. Different ablation thresholds and heat-affected zones were observed. The lateral and vertical machining precision was evaluated. Single nanosecond laser pulses in the far UV resulted in a bubble or a circular hole in the centre of the illuminated spot, depending on the applied fluence. The ablation behaviour in the case of near-IR femtosecond pulses contrasted to this. Bubble formation was not detected. It needed repeated pulses at the same spot to modify the surface until material removal could be observed (incubation). Cavity dimensions of less than the beam diameter were achieved in this case. T2 - 5th International Conference on Laser Ablation ; COLA '99 CY - Göttingen, Germany DA - 1998-07-19 KW - Laser ablation KW - Bariumalumoborosilicate glass PY - 1999 DO - https://doi.org/10.1007/s003390051524 SN - 0947-8396 VL - 69 IS - 7 SP - S763 EP - S766 PB - Springer CY - Berlin AN - OPUS4-801 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Voss, Heike A1 - Zahedi-Azad, Setareh A1 - Ernst, Owen C. A1 - Lucaßen, Jan A1 - Mann, Guido A1 - Bonse, Jörn A1 - Boeck, Torsten A1 - Martin, Jens A1 - Schmid, Martina A1 - Krüger, Jörg T1 - Chemical vapor deposition of indium precursors for solar microabsorbers using continuous laser radiation BT - A, Materials science & processing N2 - Localized deposition of indium on an amorphous glass surface covered with a thin molybdenum layer is demonstrated utilizing laser-assisted chemical vapor deposition. A continuous-wave laser causes a temperature rise on the molybdenum layer resulting in the selective aggregation of liquid and ultimately crystalline structures of indium. The formation sites of the indium are determined by the decomposition of gaseous trimethylindium. The deposited indium islands can serve as precursors and could be further processed into compound semiconductors like CuInSe2 for micro-concentrator solar cells. The experimental investigations were supported by theoretical simulations of the laser heating process to calculate the local temperature distribution on the surface of the molybdenum-covered glass substrate. KW - Laser-assisted Chemical Vapor Deposition KW - CW Laser KW - Indium Islands KW - Micro-concentrator Solar Cell PY - 2025 UR - https://nbn-resolving.org/urn:nbn:de:kobv:b43-641069 DO - https://doi.org/10.1007/s00339-025-08895-z SN - 0947-8396 VL - 131 SP - 1 EP - 10 PB - Springer CY - Berlin ; Heidelberg [u.a.] AN - OPUS4-64106 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - GEN A1 - Böttcher, Katrin A1 - Kraft, Sebastian A1 - Weise, Matthias A1 - Bonse, Jörn A1 - Krüger, Jörg T1 - Publisher correction: X-ray emission during ultrafast laser grooving N2 - This is a corrigendum to the original article "X-ray emission during ultrafast laser grooving" that was published in the journal "Applied Physics A", vol. 131 (2025), article 651 (doi 10.1007/s00339-025-08728-z). PY - 2025 UR - https://nbn-resolving.org/urn:nbn:de:kobv:b43-648868 DO - https://doi.org/10.1007/s00339-025-08882-4 SN - 0947-8396 VL - 131 IS - 11 SP - 1 PB - Springer CY - Berlin AN - OPUS4-64886 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Böttcher, Katrin A1 - Kraft, Sebastian A1 - Weise, Matthias A1 - Bonse, Jörn A1 - Krüger, Jörg T1 - X-ray emission during ultrafast laser grooving N2 - Ultrashort pulse lasers offer the possibility to process materials with minimal heat input and high precision. However, the X-ray emission at high laser peak intensities represents an undesirable side effect. A laser system (1030 nm wavelength, 40 W maximum average laser power, 925 fs pulse duration, 100 μJ maximum pulse energy, 400 kHz pulse repetition frequency) was used to analyze the X-ray skin dose rates for applied peak intensities between 9.2 × 10^12 W/cm^2 and 1.3 × 10^14 W/cm^2 for mild steel, stainless steel and tungsten during groove processing. The lowest laser peak intensity at which X-ray emission could be measured was 9.2 × 10^12 W/cm^2 for processing of stainless steel. The X-ray emission showed a characteristic evolution in dependence on the number of overscans at the same line positions. For low peak intensities, a measurable X-ray emission only begins after a few passes. The number of scans to reach the maximum dose rate increases with lower laser peak intensity. Analysis of the evolving surface topography by white light interference microscopy in connection with ray-tracing simulations led to the interpretation that the increase in X-ray emission is due to the local intensity redistribution by multiple reflection within the laser-generated grooves which is promoted by a particular choice of the linear laser polarization. KW - Ultrashort pulsed laser KW - Laser-induced X-rays KW - X-ray hazard KW - X-ray emission PY - 2025 UR - https://nbn-resolving.org/urn:nbn:de:kobv:b43-639483 DO - https://doi.org/10.1007/s00339-025-08728-z SN - 1432-0630 VL - 131 IS - 8 SP - 1 EP - 12 PB - Springer CY - Berlin AN - OPUS4-63948 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Symietz, Christian A1 - Lehmann, Erhard A1 - Gildenhaar, Renate A1 - Hackbarth, Andreas A1 - Berger, Georg A1 - Krüger, Jörg T1 - Mechanical stability of Ti6Al4V implant material after femtosecond laser irradiation N2 - The surface of a titanium alloy (Ti6Al4V) implant material was covered with a bioactive calcium alkali phosphate ceramic with the aim to accelerate the healing and to form a stronger bond to living bone tissue. To fix the ceramic powder we used a femtosecond laser, which causes a thin surface melting of the metal. It is a requirement to prove that the laser irradiation would not reduce the lifetime of implants. Here we present the results of mechanical stability tests, determined by the rotating bending fatigue strength of sample rods. After describing the sample surfaces and their modifications caused by the laser treatment we give evidence for an unchanged mechanical stability. This applies not only to the ceramic fixation but also to a comparatively strong laser ablation. KW - Aluminium alloys KW - Bending strength KW - Bioceramics KW - Bone KW - Calcium compounds KW - Fatigue KW - Fatigue testing KW - High-speed optical techniques KW - Laser ablation KW - Melting KW - Orthopaedics KW - Prosthetics KW - Rods (structures) KW - Surface treatment KW - Titanium alloys KW - Vanadium alloys PY - 2012 DO - https://doi.org/10.1063/1.4737576 SN - 0021-8979 SN - 1089-7550 VL - 112 IS - 2 SP - 1 EP - 5 PB - American Institute of Physics CY - Melville, NY AN - OPUS4-26200 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Hülagü, Deniz A1 - Hirahara, Kenta A1 - Fischer, Daniel A1 - Florian, Camilo A1 - Schusterbauer, Robert A1 - Ermilova, Elena A1 - Krüger, Jörg A1 - Unterreiner, Andreas-Neil A1 - Bonse, Jörn A1 - Hertwig, Andreas T1 - Using imaging ellipsometry to understand femtosecond laser materials processing of group IV materials N2 - Laser materials processing is an important tool for creating and shaping new materials. Laser machining, especially with ultrashort pulses offers the modification of surfaces, thin coatings, and bulk materials with an unprecedented precision and control. The most desired feature of pulsed laser processing in the femtosecond range is that the heat-affected zone in the irradiated material will be extremely small. To better understand the mechanisms involved during laser irradiation, it is important to analyse the outcome of light-matter interaction with spectroscopic methods. Ellipsometry, especially spectroscopic imaging ellipsometry (SIE), has become an important tool for this in recent times, as it gives access to local layer thicknesses, materials dielectric functions, and features like changes in surface roughness. This work includes an overview over our recent studies examining near-infrared fs-laser surface processing of different group IV materials. The superficial phase change of silicon from crystalline to amorphous has been investigated in the past as the result of laser processing strongly depends on the crystal orientation. Moreover, SIE is capable of determining the properties of buried a-Si interfaces with micrometer lateral and sub-nanoneter vertical precision. Additionally, the growth of native and laser-induced oxides can be revealed. T2 - ICSE10 - 10th International Conference on Spectroscopic Ellipsometry CY - Boulder, CO, USA DA - 08.06.2025 KW - Laser surface ablation KW - Amorphous Carbon KW - Silicon KW - Correlative Imaging Ellipsometry PY - 2025 AN - OPUS4-63633 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Schmidt, Birgit Angelika A1 - Ziemann, M. A A1 - Pentzien, Simone A1 - Gabsch, T. A1 - Koch, W. A1 - Krüger, Jörg T1 - Technical analysis of a Central Asian wall painting detached from a Buddhist cave temple on the northern Silk Road N2 - A great number of Central Asian wall paintings, archeological materials, architectural fragments, and textiles, as well as painting fragments on silk and paper, make up the so called Turfan Collection at the Asian Art Museum in Berlin. The largest part of the collection comes from the Kucha region, a very important cultural center in the third to ninth centuries. Between 1902 and 1914, four German expeditions traveled along the northern Silk Road. During these expeditions, wall paintings were detached from their original settings in Buddhist cave complexes. This paper reports a technical study of a wall painting, existing in eight fragments, from the Buddhist cave no. 40 (Ritterhöhle). Its original painted surface is soot blackened and largely illegible. Grünwedel, leader of the first and third expeditions, described the almost complete destruction of the rediscovered temple complex and evidence of fire damage. The aim of this case study is to identify the materials used for the wall paintings. Furthermore, soot deposits as well as materials from conservation interventions were of interest. Non-invasive analyses were preferred but a limited number of samples were taken to provide more precise information on the painting technique. By employing optical and scanning electron microscopy, energy dispersive X-ray spectroscopy, micro X-ray fluorescence spectroscopy, X-ray diffraction analysis, and Raman spectroscopy, a layer sequence of earthen render, a ground layer made of gypsum, and a paint layer containing a variety of inorganic pigments were identified. KW - Wall paintings KW - Central Asia KW - Silk Road KW - Pigments KW - Microscopy PY - 2016 UR - https://nbn-resolving.org/urn:nbn:de:kobv:b43-357297 DO - https://doi.org/10.1179/2047058414Y.0000000152 VL - 61 IS - 2 SP - 113 EP - 122 PB - Routledge Taylor & Francis Group CY - London AN - OPUS4-35729 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CHAP A1 - Bonse, Jörn A1 - Höhm, S. A1 - Hartelt, Manfred A1 - Spaltmann, Dirk A1 - Pentzien, Simone A1 - Koter, Robert A1 - Marschner, S. A1 - Rosenfeld, A. A1 - Krüger, Jörg ED - König, K. ED - Ostendorf, A. T1 - Femtosecond laser-induced surface nanostructures for tribological applications N2 - Laser-induced periodic surface structures (LIPSS) were generated on two types of steel (100Cr6, X30CrMoN15-1) and two types of titanium (Ti, Ti6A14V) surfaces upon irradiation with multiple linear polarized femtosecond laser pulses in air environment (pulse duration 30 fs, central wavelength 790 nm, pulse repetition rate 1 kHz, Gaussian beam shape). Teh conditions (laser fluence, spatial spot overlap) were optimized in a sample-scanning geometry for the processing of large surface areas covered homogeneously by two different types of LIPSS - either near wavelength or sub-100 nm structures. The tribological performance of the nanostructured surfaces was characterized under reciprocating sliding at 1 Hz against a ball of hardened steel using different lubricants and normal forces. After 1000 cycles the corresponding wear tracks were characterized by optical and scanning electron microscopy. For specific conditions, the wear was strongly reduced and laser-generated nanostructures endured the tribological treatment. Simultaneously, a significant reduction of the friction coefficient was observed in the laser-irradiated LIPSS-covered areas, indicating the benefit of laser surface structuring for tribological applications. The spatially Gaussian shaped beam used for the laser processing was transformed via beam shaping into a top hat distribution at the surface of the samples for optimization. The tribological performance of the laser-induced nanostructures is discussed on the basis of different physical and chemical mechanisms. PY - 2015 UR - https://nbn-resolving.org/urn:nbn:de:kobv:b43-332647 SN - 978-3-11-033718-1 SN - 978-3-11-035432-4 DO - https://doi.org/10.1515/9783110354324-011 SP - Chapter 7, 141 EP - 156 PB - De Gruyter AN - OPUS4-33264 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CHAP A1 - Schmidt, Birgit A1 - Koch, W. A1 - Pentzien, Simone A1 - Krüger, Jörg ED - Gabsch, T. T1 - Der Einsatz von Lasertechnik an Modellsystemen zentralasiatischer Wandmalereifragmente N2 - Eine Diplomarbeit im Studiengang Restaurierung an der Fachhochschule Potsdam bot den Rahmen. laserinduzierte Reinigung von ruß- und kunststoffbeschichteten Malschichten zu erproben. Dabei bildeten Untersuchungen zur Materialerfassung an originalen Wandmalereifragmenten der »Ritterhöhle« (Kirish. 6. bis 7.Jh. n. Chr.), heute im Besitz des Museums für Asiatische Kunst. Berlin, die Voraussetzung zum Bau adäquater Modellsysteme sowie der Auswahl geeigneter Laserparameter. In Zusammenarbeit mit der Arbeitsgruppe »Impulslaser-Technologien. Lasersicherheit« (Fachgruppe 6.4) an der Bundesanstalt für Materialforschung und -prüfung (BAM) konnten Möglichkeiten und Grenzen der Laserreinigung ermittelt werden, hu Zuge dessen sollten die Erkenntnisse dieser modellhaften Versuche eine Diskussion zur Anwendbarkeit der Lasertechnologie an originalen Objekten bereichern. KW - Laserreinigung KW - Wandmalerei KW - Verrußung KW - Kunststoffschicht KW - Probekörper PY - 2012 SN - 978-3-7338-0385-8 IS - Kap. 10 SP - 152 EP - 157 PB - Koehler & Amelang GmbH AN - OPUS4-26178 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Hirahara, Kenta A1 - Bonse, Jörn A1 - Krüger, Jörg A1 - Weise, Matthias A1 - Ermilova, Elena A1 - Schusterbauer, Robert A1 - Unterreiner, Andreas-Neil A1 - Hertwig, Andreas T1 - A multi-method study of femtosecond laser modification and ablation of amorphous hydrogenated carbon coatings N2 - e present a study on femtosecond laser treatment of amorphous hydrogen-containing carbon coatings (a-C:H). The coatings were deposited on silicon wafers by a plasma-assisted chemical vapour deposition (PA-CVD), resulting in two different types of material with distinct properties (referred to as “absorbing” and “semi-transparent” coatings in the following). The samples were laser-treated with single fs-laser pulses (800 nm center wavelength, 35 fs pulse duration) in the ablative regime. Through a multi-method approach using topometry, Raman spectroscopy, and spectroscopic imaging ellipsometry, we can identify zones and thresholds of diferent fuence dependent efects and have access to the local dielectric function. The two coating materials react signifcantly diferent upon laser treatment. We determined the (non-ablative) modifcation threshold fuence for the absorbing coating as 3.6 × 10−2 Jcm−2 and its ablation threshold as 0.22 Jcm−2. The semi-transparent coating does not show such a low-fuence modifcation but exhibits a characteristic interference-based intra-flm ablation mechanism with two distinguishable ablation thresholds at 0.25 and 0.28 Jcm−2, respectively. The combination of tailored layer materials and correlative imaging spectroscopic methods delivers new insights into the behaviour of materials when treated with ultrashort-pulse laser radiation KW - Amorphous Hydrogenated Carbon Coatings KW - Correlative Imaging Measurement Techniques KW - Hybrid Metrology KW - Imaging Spectroscopy KW - Spectroscopic Ellipsometry KW - Ultra-short Pulse Laser Materials Processing PY - 2024 UR - https://nbn-resolving.org/urn:nbn:de:kobv:b43-617829 DO - https://doi.org/10.1007/s00339-024-07980-z VL - 130 IS - 12 SP - 1 EP - 17 PB - Springer Science and Business Media LLC AN - OPUS4-61782 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Florian, Camilo A1 - Kirner, Sabrina V. A1 - Krüger, Jörg A1 - Bonse, Jörn T1 - Surface functionalization by laser-induced periodic surface structures N2 - In recent years, the improved understanding of the formation of laser-induced periodic surface structures (LIPSS) has led to an emerging variety of applications that modify the optical, mechanical and chemical properties of many materials. Such structures strongly depend on the laser beam polarization and are formed usually after irradiation with ultrashort linearly polarized laser pulses. The most accepted explanation for the origin of the structures is based on the interference of the incident laser radiation with electromagnetic surface waves that propagate or scatter at the surface of the irradiated materials. This leads to an intensity modulation that is finally responsible for the selective ablation in the form of parallel structures with periods ranging from hundreds of nanometers up to some micrometers. The versatility when forming such structures is based on the high reproducibility with different wavelength, pulse duration and repetition rate laser sources, customized micro- and nanometric spatial resolutions, and the compatibility with industrially relevant processing speeds when combined with fast scanning devices. In this contribution, we review the latest applications in the rapidly emerging field of surface functionalization through LIPSS, including biomimetic functionalities on fluid transport, control of the wetting properties, specific optical responses in technical materials, improvement of tribological performance on metallic surfaces and bacterial and cell growth for medical devices, among many others. T2 - 38th International Congress on Applications of Lasers & Electro-Optics CY - Orlando, FL, USA DA - 07.10.2019 KW - Laser-induced periodic surface structures (LIPSS) KW - Laser processing KW - Surface functionalization KW - Applications PY - 2019 SN - 978-1-940168-1-42 SP - Paper Nano 404 AN - OPUS4-50070 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Krüger, Jörg T1 - X-ray emission during ultrashort pulse laser processing N2 - The industrial use of ultrashort laser pulses has made considerable progress in recent years. The reasons for this lie in the availability of high average powers at pulse repetition rates in the several 100 kHz range. The advantages of using ultrashort laser pulses in terms of processing precision can thus be fully exploited. However, high laser intensities on the workpiece can also lead to the generation of unwanted X-rays. Even if the emitted X-ray dose per pulse is low, the accumulated X-ray dose can become significant for high-repetition-rate laser systems so that X-ray exposure safety limits must be considered. The X-ray emission during ultrashort pulse laser processing was investigated for a pulse duration of 925 fs at 1030 nm wavelength and 400 kHz repetition rate. Industrially relevant materials such as steel, aluminum and glass were treated. Tungsten served as reference. X-ray spectra were recorded, and X-ray dose measurements were performed for laser treatment in air. For laser intensities > 2 × 10^13 W/cm2, X-ray doses exceeding the regulatory exposure limits for members of the public were found. Suitable X-ray protection strategies are proposed. T2 - SPIE Photonics West CY - San Francisco, USA DA - 02.02.2019 KW - Laser-induced X-ray emission KW - Ultrashort laser material interaction KW - Radiation protection PY - 2019 AN - OPUS4-47361 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Legall, Herbert A1 - Schwanke, Christoph A1 - Bonse, Jörn A1 - Krüger, Jörg T1 - X-ray emission during ultrashort pulse laser processing N2 - The industrial use of ultrashort laser pulses has made considerable progress in recent years. The reasons for this lie in the availability of high average powers at pulse repetition rates in the several 100 kHz range. The advantages of using ultrashort laser pulses in terms of processing precision can thus be fully exploited. However, high laser intensities on the workpiece can also lead to the generation of unwanted X-rays. Even if the emitted X-ray dose per pulse is low, the accumulated X-ray dose can become significant for high-repetition-rate laser systems so that X-ray exposure safety limits must be considered. The X-ray emission during ultrashort pulse laser processing was investigated for a pulse duration of 925 fs at 1030 nm wavelength and 400 kHz repetition rate. Industrially relevant materials such as steel,aluminum and glass were treated. Tungsten served as reference. X-ray spectra were recorded, and X-ray dose measurements were performed for laser treatment in air. For laser intensities > 2 × 10^13 W/cm2, X-ray doses exceeding the regulatory exposure limits for members of the public were found. Suitable X-ray protection strategies are proposed. T2 - SPIE Photonics West CY - San Francisco, USA DA - 02.02.2019 KW - Laser-induced X-ray emission KW - Ultrashort laser material interaction KW - Radiation protection PY - 2019 SN - 978-1-5106-2459-7 DO - https://doi.org/10.1117/12.2516165 SN - 0277-786X SN - 1996-756X VL - 10908 SP - 1090802-1 EP - 1090802-7 PB - SPIE - The international society for optics and photonics CY - Bellingham, WA, USA AN - OPUS4-47510 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -