TY - JOUR A1 - Höhm, S. A1 - Herzlieb, M. A1 - Rosenfeld, A. A1 - Krüger, Jörg A1 - Bonse, Jörn T1 - Femtosecond laser-induced periodic surface structures on silicon upon polarization controlled two-color double-pulse irradiation N2 - Two-color double-fs-pulse experiments were performed on silicon wafers to study the temporally distributed energy deposition in the formation of laser-induced periodic surface structures (LIPSS). A Mach-Zehnder interferometer generated parallel or cross-polarized double-pulse sequences at 400 and 800 nm wavelength, with inter-pulse delays up to a few picoseconds between the sub-ablation 50-fs-pulses. Multiple two-color double-pulse sequences were collinearly focused by a spherical mirror to the sample. The resulting LIPSS characteristics (periods, areas) were analyzed by scanning electron microscopy. A wavelength-dependent plasmonic mechanism is proposed to explain the delay-dependence of the LIPSS. These two-color experiments extend previous single-color studies and prove the importance of the ultrafast energy deposition for LIPSS formation. PY - 2015 DO - https://doi.org/10.1364/OE.23.000061 SN - 1094-4087 VL - 23 IS - 1 SP - 61 EP - 71 PB - Optical Society of America CY - Washington, DC AN - OPUS4-32405 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Höhm, S. A1 - Rosenfeld, A. A1 - Krüger, Jörg A1 - Bonse, Jörn T1 - Femtosecond laser-induced periodic surface structures on silica N2 - The formation of laser-induced periodic surface structures (LIPSS) on two different silica polymorphs (single-crystalline synthetic quartz and commercial fused silica glass) upon irradiation in air with multiple linearly polarized single- and double-fs-laser pulse sequences (τ = 150 fs pulse duration, λ = 800nm center wavelength, temporal pulse separation Δt < 40 ps) is studied experimentally and theoretically. Two distinct types of fs-LIPSS [so-called low-spatial-frequency LIPSS (LSFL) and high-spatial-frequency LIPSS (HSFL)] with different spatial periods and orientations were identified. Their appearance was characterized with respect to the experimental parameters peak laser fluence and number of laser pulses per spot. Additionally, the 'dynamics' of the LIPSS formation was addressed in complementary double-fs-pulse experiments with varying delays, revealing a characteristic change of the LSFL periods. The experimental results are interpreted on the basis of a Sipe-Drude model considering the carrier dependence of the optical properties of fs-laser excited silica. This new approach provides an explanation of the LSFL orientation parallel to the laser beam polarisation in silica—as opposed to the behaviour of most other materials. KW - High-speed optical techniques KW - Laser beam effects KW - Refractive index KW - Silicon compounds KW - Surface structure PY - 2012 DO - https://doi.org/10.1063/1.4730902 SN - 0021-8979 SN - 1089-7550 VL - 112 IS - 1 SP - 014901-1 - 014901-9 PB - American Institute of Physics CY - Melville, NY AN - OPUS4-26201 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Bonse, Jörn A1 - Krüger, Jörg A1 - Höhm, S. A1 - Rosenfeld, A. T1 - Femtosecond laser-induced periodic surface structures N2 - The formation of laser-induced periodic surface structures (LIPSS) in different materials (metals, semiconductors, and dielectrics) upon irradiation with linearly polarized fs-laser pulses (τ~30–150 fs, λ~800 nm) in air environment is studied experimentally and theoretically. In metals, predominantly low-spatial-frequency-LIPSS with periods close to the laser wavelength λ are observed perpendicular to the polarization. Under specific irradiation conditions, high-spatial-frequency-LIPSS with sub-100-nm spatial periods (~λ/10) can be generated. For semiconductors, the impact of transient changes of the optical properties to the LIPSS periods is analyzed theoretically and experimentally. In dielectrics, the importance of transient excitation stages in the LIPSS formation is demonstrated experimentally using (multiple) double-fs-laser-pulse irradiation sequences. A characteristic decrease of the LIPSS periods is observed for double-pulse delays of less than 2 ps. KW - Laser-induced periodic surface structures (LIPSS) KW - Femtosecond laser ablation KW - Ultrafast optical techniques KW - Silicon KW - Titanium KW - Silica PY - 2012 DO - https://doi.org/10.2351/1.4712658 SN - 1042-346X SN - 1938-1387 VL - 24 IS - 4 SP - 042006-1 EP - 042006-7 PB - Laser Institute of America CY - Orlando, Fla., USA AN - OPUS4-26198 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Heitz, J. A1 - Plamadeala, C. A1 - Muck, M. A1 - Armbruster, O. A1 - Baumgartner, W. A1 - Weth, A. A1 - Steinwender, C. A1 - Plessberger, H. A1 - Kellermair, J. A1 - Kirner, Sabrina V. A1 - Krüger, Jörg A1 - Bonse, Jörn A1 - Guntner, A. S. A1 - Hassel, A. W. T1 - Femtosecond laser-induced microstructures on Ti substrates for reduced cell adhesion N2 - Miniaturized pacemakers with a surface consisting of a Ti alloy may have to be removed after several years from their implantation site in the heart and shall, therefore, not be completely overgrown by cells or tissue. A method to avoid this may be to create at the surface by laser-ablation self-organized sharp conical spikes, which provide too little surface for cells (i.e., fibroblasts) to grow on. For this purpose, Ti-alloy substrates were irradiated in the air by 790 nm Ti:sapphire femtosecond laser pulses at fluences above the ablation threshold. The laser irradiation resulted in pronounced microstructure formation with hierarchical surface morphologies. Murine fibroblasts were seeded onto the laser-patterned surface and the coverage by cells was evaluated after 3–21 days of cultivation by means of scanning electron microscopy. Compared to flat surfaces, the cell density on the microstructures was significantly lower, the coverage was incomplete, and the cells had a clearly different morphology. The best results regarding suppression of cell growth were obtained on spike structures which were additionally electrochemically oxidized under acidic conditions. Cell cultivation with additional shear stress could reduce further the number of adherent cells. KW - Laser Processing KW - Femtosecond laser KW - Titanium alloy KW - Cell adhesion KW - Anodic oxidation KW - Pacemaker PY - 2017 UR - https://nbn-resolving.org/urn:nbn:de:kobv:b43-427681 UR - https://link.springer.com/article/10.1007/s00339-017-1352-0 DO - https://doi.org/10.1007/s00339-017-1352-0 SN - 0947-8396 SN - 1432-0630 VL - 123 IS - 12 SP - 734, 1 EP - 9 PB - Springer-Verlag CY - Berlin AN - OPUS4-42768 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Krüger, Jörg T1 - Femtosecond laser-induced damage of gold films T2 - E-MRS 2006 Spring Meeting, Symposium H CY - Nice, France DA - 2006-05-29 PY - 2006 AN - OPUS4-12252 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Krüger, Jörg A1 - Dufft, Daniela A1 - Koter, Robert A1 - Hertwig, Andreas T1 - Femtosecond laser-induced damage of gold films N2 - Single- and multi-shot ablation thresholds of gold films in the thickness range of 31–1400 nm were determined employing a Ti:sapphire laser delivering pulses of 28 fs duration, 793 nm center wavelength at 1 kHz repetition rate. The gold layers were deposited on BK7 glass by an electron beam evaporation process and characterized by atomic force microscopy and ellipsometry. A linear dependence of the ablation threshold fluence Fth on the layer thickness d was found for d ≤ 180 nm. If a film thickness of about 180 nm was reached, the damage threshold remained constant at its bulk value. For different numbers of pulses per spot (N-on-1), bulk damage thresholds of ~0.7 J cm-2 (1-on-1), 0.5 J cm-2 (10-on-1), 0.4 J cm-2 (100-on-1), 0.25 J cm-2 (1000-on-1), and 0.2 J cm-2 (10000-on-1) were obtained experimentally indicating an incubation behavior. A characteristic layer thickness of Lc ˜ 180 nm can be defined which is a measure for the heat penetration depth within the electron gas before electron–phonon relaxation occurs. Lc is by more than an order of magnitude larger than the optical absorption length of α-1 ˜ 12 nm at 793 nm wavelength. KW - Single- and multi-shot ablation KW - Ti:sapphire laser KW - Gold films PY - 2007 SN - 0169-4332 SN - 1873-5584 VL - 253 IS - 19 SP - 7815 EP - 7819 PB - North-Holland CY - Amsterdam AN - OPUS4-15686 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Krüger, Jörg T1 - Femtosecond laser-assisted photovoltaic bottom-up strategies N2 - A promising technology in photovoltaics is based on micro-concentrator solar cells, where the photovoltaic active area is realized as an array of sub-millimeter sized thin-film solar cells. Different approaches to produce micro-sized precursors of CIGSe absorbers on molybdenum are presented using 30-fs laser pulses at 790 nm wavelength. On the one hand, a multi pulse surface structuring of the molybdenum or the underlying glass substrate and a subsequent physical vapor deposition (PVD) process were used for a site-selective aggregation of indium droplets. On the other hand, a single pulse laser-induced forward transfer (LIFT) was utilized to selectively deposit combined copper/indium/gallium precursor pixels on the molybdenum back contact of the solar cell. It was demonstrated that a postprocessing of the laser-generated micro-sized precursors results in an array of working CIGSe solar cells with an efficiency of 2.9% for 1 sun Illumination. T2 - Leibniz-Institut für Oberflächenmodifizierung (IOM), Institutskolloquium CY - Leipzig, Germany DA - 29.11.2018 KW - Femtosecond laser patterning KW - Laser-induced forward transfer KW - CIGSe KW - Micro solar cell KW - Light concentration PY - 2018 AN - OPUS4-46831 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Ringleb, F. A1 - Andree, Stefan A1 - Heidmann, B. A1 - Bonse, Jörn A1 - Eylers, K. A1 - Ernst, O. A1 - Boeck, T. A1 - Schmid, M. A1 - Krüger, Jörg T1 - Femtosecond laser-assisted fabrication of chalcopyrite micro-concentrator photovoltaics N2 - Micro-concentrator solar cells offer an attractive way to further enhance the efficiency of planar-cell technologies while saving absorber material. Here, two laser-based bottom-up processes for the fabrication of regular arrays of CuInSe2 and Cu(In,Ga)Se2 microabsorber islands are presented, namely one approach based on nucleation and one based on laser-induced forward transfer. Additionally, a procedure for processing these microabsorbers to functioning micro solar cells connected in parallel is demonstrated. The resulting cells show up to 2.9% efficiency and a significant efficiency enhancement under concentrated Illumination. KW - Chalcopyrite KW - Femtosecond laser patterning KW - Laser-induced forward transfer KW - Micro-concentrator solar cell KW - Photovoltaics PY - 2018 UR - https://nbn-resolving.org/urn:nbn:de:kobv:b43-470026 DO - https://doi.org/10.3762/bjnano.9.281 SN - 2190-4286 VL - 9 SP - 3025 EP - 3038 PB - Beilstein-Institut zur Förderung der Chemischen Wissenschaften CY - Frankfurt, M. AN - OPUS4-47002 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Bonse, Jörn A1 - Kirner, Sabrina V. A1 - Griepentrog, Michael A1 - Spaltmann, Dirk A1 - Krüger, Jörg T1 - Femtosecond laser texturing of surfaces for tribological applications N2 - Laser texturing is an emerging technology for generating surface functionalities on basis of optical, mechanical, or chemical properties. Taking benefit of laser sources with ultrashort (fs) pulse durations features outstanding precision of machining and negligible rims or burrs surrounding the laser-irradiation zone. Consequently, additional mechanical or chemical post-processing steps are usually not required for fs-laser surface texturing (fs-LST). This work aimed to provide a bridge between research in the field of tribology and laser materials processing. The paper reviews the current state-of-the-art in fs-LST, with a focus on the tribological performance (friction and wear) of specific self-organized surface structures (so-called ripples, grooves, and spikes) on steel and titanium alloys. On the titanium alloy, specific sickle-shaped hybrid micro-nanostructures were also observed and tribologically tested. Care is taken to identify accompanying effects affecting the materials hardness, superficial oxidation, nano- and microscale topographies, and the role of additives contained in lubricants, such as commercial engine oil. KW - Femtosecond laser processing KW - Surface texture KW - Laser-induced periodic surface structures (LIPSS) KW - Friction KW - Wear PY - 2018 UR - http://www.mdpi.com/1996-1944/11/5/801 DO - https://doi.org/10.3390/ma11050801 SN - 1996-1944 VL - 11 IS - 5 SP - 801, 1 EP - 19 PB - MDPI AG CY - Basel, Switzerland AN - OPUS4-44905 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Krüger, Jörg A1 - Spielmann, C. T1 - Femtosecond Laser Technology in Use: Safety Aspects - A Detailed Study compares different Materials for Eye Protection N2 - In recent years, femtosecond lasers matured from sensitive research setups to turnkey systems for an increasing number of applications. Now that running an ultra-short pulse laser system needs no longer a specialized scientist, safety issues become more crucial. Ultrashort laser pulses have extremely high peak powers and even scattered radiation may possess severe risks to the unprotected eye. Accordingly, special protection schemes are necessary for these unique laser systems. PY - 2008 DO - https://doi.org/10.1002/latj.200790209 SN - 1613-7728 VL - 5 IS - 1 SP - 48 EP - 52 PB - Wiley-VCH CY - Weinheim AN - OPUS4-16471 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Andree, Stefan A1 - Heidmann, B. A1 - Ringleb, F. A1 - Eylers, K. A1 - Bonse, Jörn A1 - Boeck, T. A1 - Schmid, M. A1 - Krüger, Jörg T1 - Femtosecond laser pulses for photovoltaic bottom-up strategies N2 - A promising technology in photovoltaics is based on micro-concentrator solar cells, where the photovoltaic active area is realized as an array of sub-millimeter sized cells onto which the incident light is focused via microlenses. This approach allows to increase the cell efficiency and to realize much more compact modules compared to macroscopic concentrator devices. At the same time, expensive raw materials can be saved, which is of interest, for example, with respect to indium in the case of copper-indium-gallium-diselenide (CIGSe) thin film solar cells. Two methods to produce micro-sized precursors of CIGSe absorbers on molybdenum are presented using 30-fs laser pulses at 790 nm wavelength. On the one hand, a multi pulse surface structuring of the molybdenum film or the underlying glass substrate and a subsequent physical vapor deposition were used for a site-selective aggregation of indium droplets. On the other hand, a single pulse laser-induced forward transfer was utilized to selectively deposit combined copper-indium precursor pixels on the molybdenum back contact of the solar cell. Post-processing (selenization, isolation, contacting) of the laser-generated micro-sized precursors results in functional CIGSe solar cells. T2 - 10. Mittweidaer Lasertagung CY - Mittweida, Germany DA - 16.11.2017 KW - Copper indium gallium diselenide (CIGSe) KW - Micro solar cell KW - Femtosecond laser KW - Laser ablation KW - Laser-induced forward transfer (LIFT) PY - 2017 SN - 1437-7624 VL - 2 SP - 1 EP - 4 PB - Hochschule Mittweida CY - Mittweida AN - OPUS4-42988 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Krüger, Jörg T1 - Femtosecond laser pulses for photovoltaic bottom-up strategies N2 - A bottom-up approach is presented for the production of arrays of indium islands on a molybdenum layer on glass using 30-fs laser pulses at 790 nm wavelength. The indium islands can serve as micro-sized precursors for indium compounds such as copper-indium-gallium-diselenide (CIGSe) used in photovoltaics. Molybdenum is the standard back contact material of CIGSe solar cells. Femtosecond laser ablation of glass and a subsequent deposition of a molybdenum film or direct laser processing of the molybdenum film both allow the preferential nucleation and growth of indium islands at the predefined locations in a following indium-based physical vapor deposition (PVD) process. A proper choice of laser and deposition parameters ensures the controlled growth of indium islands exclusively at the laser ablated spots. Based on a statistical analysis, these results are compared to the non-structured molybdenum surface, leading to randomly grown indium islands after PVD. T2 - 7th European Conference on Applications of Femtosecond Lasers in Materials Science (FemtoMat 2017) CY - Mauterndorf, Austria DA - 20.03.2017 KW - Femtosecond laser KW - Copper-indium-gallium-diselenide KW - CIGSe KW - Indium preferential nucleation KW - Photovoltaics PY - 2017 AN - OPUS4-39599 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Krüger, Jörg T1 - Femtosecond laser pulses for photovoltaic bottom-up strategies N2 - A bottom-up approach to produce arrays of indium islands on a molybdenum layer on glass using 30-fs laser pulses at 790 nm wavelength is presented. These islands can serve as micro-sized precursors for indium compounds such as copper-indium-gallium-diselenide (CIGSe) used in photovoltaics. Molybdenum is the standard back contact material of CIGSe solar cells. Femtosecond laser ablation of glass and a subsequent deposition of a molybdenum film or direct laser processing of the molybdenum film both allow the preferential nucleation and growth of indium islands at the predefined locations in a following indium-based physical vapor deposition (PVD) process. A proper choice of laser and deposition parameters ensures the controlled growth of indium islands exclusively at the laser ablated spots. Based on a statistical analysis, these results are compared to the non-structured molybdenum surface, leading to randomly grown indium islands after PVD. T2 - 10. Mittweidaer Lasertagung CY - Mittweida, Germany DA - 16.11.2017 KW - Copper-indium-gallium-diselenide KW - CIGSe KW - Femtosecond laser KW - Micro solar cell KW - Laser ablation PY - 2017 AN - OPUS4-42987 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Bonse, Jörn A1 - Hertwig, Andreas A1 - Koter, Robert A1 - Weise, Matthias A1 - Beck, Uwe A1 - Reinstädt, Philipp A1 - Griepentrog, Michael A1 - Krüger, Jörg A1 - Picquart, M. A1 - Haro-Poniatowski, E. T1 - Femtosecond laser pulse irradiation effects on thin hydrogenated amorphous carbon layers N2 - The irradiation of ~0.9-µm-thick hydrogenated amorphous carbon (a-C:H) layers deposited on silicon substrates with single femtosecond (fs) laser pulses (35 fs pulse duration, 790 nm centre wavelength) in air is studied experimentally. Irradiation spots have been generated with different peak fluences and subsequently investigated by optical topometry, micro Raman spectroscopy and microscale mechanical indentation in order to evaluate their microscopic, topographical, structural and mechanical properties (e.g. elastic modulus). By this multi-method approach, a clear separation of different effects (delamination and graphitisation) becomes possible. The joint application of mechanical and spectroscopic techniques provides unique insights into the effects of the fs-laser radiation on the carbon layer. PY - 2013 DO - https://doi.org/10.1007/s00339-012-7170-5 SN - 0947-8396 VL - 112 IS - 1 SP - 9 EP - 14 PB - Springer CY - Berlin AN - OPUS4-28629 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Baudach, Steffen A1 - Krüger, Jörg A1 - Kautek, Wolfgang T1 - Femtosecond Laser Processing of Soft Materials KW - Femtosecond pulse laser KW - Laser processing KW - Polymer ablation KW - Nanostructures PY - 2001 SN - 0387-0200 VL - 29 IS - 11 SP - 705 EP - 709 PB - Gakkai CY - Suita AN - OPUS4-6006 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Kautek, Wolfgang A1 - Martin, Sven A1 - Krüger, Jörg A1 - Lenzner, Matthias A1 - Fiedler, A. ED - Meunier, M. T1 - Femtosecond laser multi-pulse interaction with optical filters and fabrics N2 - Optical filters and fabrics are important parts of laser safety equipment such as goggles and curtains. A choice of these materials with varying absorption spectra is investigated with respect to their resistance to Ti:sapphire femtosecond laser radiation (800 nm wavelength, 1 kHz repetition rate). Pulse durations down to 30 fs and multiple-pulse irradiation conditions are employed to evaluate technically relevant damage thresholds. The ablation threshold fluences of the absorbing filters are comparable to those observed for transparent materials with 30-fs-pulses. These investigations together with scanning electron microscopy of the surface morphology after laser treatment provide insight into the interaction mechanism of the short pulses with the materials. T2 - Symposium D - European Materials Research Society CY - Strasbourg, France DA - 2002-06-18 PY - 2002 UR - http://www.emrs-strasbourg.com/files/pdf/2002_SPRING/02_Prog_Dv2.pdf N1 - Serientitel: Applied surface science – Series title: Applied surface science VL - 208/209.2003,1 IS - 1 SP - 1(?) PB - Elsevier CY - Amsterdam AN - OPUS4-1730 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Krüger, Jörg T1 - Femtosecond Laser Micromachining: Potentials, Applications, Safety Aspects T2 - Materials Seminar Series, Paul Scherrer Institut CY - Villigen, Switzerland DA - 2003-05-19 PY - 2003 AN - OPUS4-4360 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - GEN A1 - Bonse, Jörn A1 - Baudach, Steffen A1 - Krüger, Jörg A1 - Kautek, Wolfgang ED - Phipps, C. T1 - Femtosecond laser micromachining of technical materials N2 - Micromachining experiments were performed with Ti:sapphire laser pulses (130 fs - 150 fs, 800 nm, approximately 10 Hz) in air. Employing the direct focusing technique, highly absorbing titanium nitride (TiN) and weakly absorbing polyimide (PI) and polymethylmethacrylate (PMMA) served as target materials. The lateral and vertical precision of the laser ablation and morphological features were characterized by scanning force (SFM), scanning electron (SEM) and optical microscopy. For TiN, incubation can be observed, i.e. the single-pulse surface damage threshold (0.26 J/cm2) is by a factor of two greater than the threshold for 100 pulses. Ablation rates below 10 nm per pulse can be achieved. The evolution of sub-wavelength ripples is presented in dependence on pulse number and laser fluence, respectively. The incubation behavior of the polymers can be described by an accumulation model as for TiN. Experiments on PI with varying focal lengths result in the same modification thresholds. Different polarization states of light (linear, circular) lead to a variation of the ablation rate and to various morphological patterns in the ablation craters (wavelength ripples, cones). Swelling of PMMA occurred at fluences below the ablation threshold. T2 - 3rd SPIE's International Conference on High-Power Laser Ablation CY - Santa Fe, NM, USA DA - 24.04.2000 KW - Ablation KW - Femtosecond pulse laser KW - Laser processing KW - Micromachining KW - Polymer KW - Titanium nitride KW - Ripples PY - 2000 SN - 0-8194-3700-X DO - https://doi.org/10.1117/12.407346 SN - 1605-7422 N1 - Serientitel: SPIE proceedings series – Series title: SPIE proceedings series IS - 4065 SP - 161 EP - 172 PB - SPIE CY - Bellingham, Wash. AN - OPUS4-967 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Krüger, Jörg T1 - Femtosecond laser micromachining N2 - The presentation reviews femtosecond laser ablation experiments on metals, semiconductors, dielectrics, and biological materials. T2 - 19th Erwin Schrödinger Colloquium CY - Vienna, Austria DA - 24.09.2018 KW - Laser ablation KW - Laser micromachining KW - Femtosecond laser KW - Ultrashort pulse laser PY - 2018 AN - OPUS4-46075 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Krüger, Jörg T1 - Femtosecond laser interactions with dielectrics and polymers T2 - 4th Users Meeting of the European Network Laserlab-Europe CY - Madrid, Spain DA - 2007-11-28 PY - 2007 AN - OPUS4-16071 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -