TY - JOUR A1 - Krüger, Jörg A1 - Kautek, Wolfgang T1 - Femtosecond-pulse visible laser processing of transparent materials N2 - High-power lasers in industrial and R & D applications raise the general problem of reliability and degradation of optical components. A systematic study of nonlinear interaction of various transparent dielectric materials as e.g. glasses, fused silica, and polymers, with laser-pulses in the intensity range of up to 1013 W cm-2 is presented. On the other hand, femtosecond-pulse laser processing in the visible spectral range (300 fs; 620 nm, ~ 2 eV) allows precise microstructuring of transparent dielectrics without disruption of the remnant material. Damage and ablation threshold fluences occur above 1.2 J cm-2 at both silicate glasses and fused silica. Two different photon absorption mechanisms have been observed. The first occurs during the initial laser pulses in the incubation range. There, multiphoton absorption results in moderate energy volume densities. These are sufficient to generate morphological changes and optically active defect sites (colour centres) which provide a much higher absorptivity relevant for the second mechanism. It results in gasification without participation of melt. PY - 1996 SN - 0169-4332 SN - 1873-5584 VL - 96-98 SP - 430 EP - 438 PB - North-Holland CY - Amsterdam AN - OPUS4-11509 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - v. Woedtke, T. A1 - Abel, P. A1 - Krüger, Jörg A1 - Kautek, Wolfgang T1 - Subpicosecond-pulse laser microstructuring for enhanced reproducibility of biosensors N2 - Curved substrates can be micro-structured by laser ablation, which is not possible with standard lithographic methods. The novel femtosecond-pulse laser technique allows the production of defined and reproducible micro-perforations of originally analyte-impermeable membranes. The trans-membrane analyte flux can be controlled both by the variation of the laser focus diameter resulting in different areas of single perforations, and the number of perforations in arrays on small membrane areas. This leads to a higher degree of variability as well as reproducibility of the diffusion qualities of sensor membranes, and marks the main innovation with this technique compared to the hand-made mechanical perforation by specially grinded needles used up to now. Touchless micro-perforation of small membrane areas with negligible heat damage of the structures adjacent to the perforation allows the application of ‘analyte door’ membranes directly onto curved surfaces of miniaturized needle-sensors assigned for in vivo glucose monitoring, for the first time. KW - Biosensor KW - Glucose KW - Membrane perforation KW - Subpicosecond laser ablation KW - Reproducibility PY - 1997 DO - https://doi.org/10.1016/S0925-4005(97)80330-9 SN - 0925-4005 SN - 1873-3077 VL - 42 IS - 3 SP - 151 EP - 156 PB - Elsevier CY - Amsterdam [u.a.] AN - OPUS4-11513 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Kautek, Wolfgang A1 - Pentzien, Simone A1 - Rudolph, Pascale A1 - Krüger, Jörg A1 - König, E. T1 - Laser interaction with coated collagen und cellulose fibre composites: fundamentals of laser cleaning of ancient parchment manuscripts and paper N2 - Laser cleaning of delicate biological composite materials such as ancient parchment manuscripts from the 15th and 16th century and printed paper from the 19th century is demonstrated with an ultraviolet excimer pulsed laser at 308 nm. Laser fluence levels must stay below the ablation and destruction threshold of the parchment or paper substrate, and have to surpass the threshold of the contaminant matter. Foreign layers to be removed must exhibit a higher optical density than the artifact substrates. Synthetic carbonaceous dirt modelled by water-soluble black crayons showed a characteristically weak featureless laser-induced plasma spectroscopy spectrum near the noise limit. It turned out that laser-induced plasma spectroscopy is of limited use in monitoring halting points (or etch-stops) because it relies on the destruction not only of the laterally inhomogenously distributed contaminant but also of pigment phases on a microscopically rough parchment substrate. Laser-induced fluorescence spectroscopy, however, promises to be a valuable non-destructive testing technique for etch-stop monitoring. KW - Laser KW - Parchment KW - Papery KW - Spectroscopy KW - Laser cleaning PY - 1998 SN - 0169-4332 SN - 1873-5584 VL - 127-129 SP - 746 EP - 754 PB - North-Holland CY - Amsterdam AN - OPUS4-11516 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Kautek, Wolfgang A1 - Krüger, Jörg A1 - Lenzner, M. A1 - Sartania, S. A1 - Spielmann, Ch. A1 - Krausz, F. T1 - Laser ablation of dielectrics with pulse durations between 20 fs and 3 ps PY - 1996 SN - 0003-6951 SN - 1077-3118 VL - 69 IS - 21 SP - 3146 EP - 3148 PB - American Institute of Physics CY - Melville, NY AN - OPUS4-11496 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Krüger, Jörg A1 - Lenzner, Matthias A1 - Martin, Sven A1 - Lenner, M. A1 - Spielmann, Ch. A1 - Fiedler, A. A1 - Kautek, Wolfgang T1 - Single- and multi-pulse femtosecond laser ablation of optical filter materials N2 - Ablation experiments employing Ti:sapphire laser pulses with durations from 30 to 340 fs (centre wavelength 800 nm, repetition rate 1 kHz) were performed in air. Absorbing filters (Schott BG18 and BG36) served as targets. The direct focusing technique was used under single- and multi-pulse irradiation conditions. Ablation threshold fluences were determined from a semi-logarithmic plot of the ablation crater diameter versus laser fluence. The threshold fluence decreases for a shorter pulse duration and an increasing number of pulses. The multi-pulse ablation threshold fluences are similar to those of undoped glass material (~1 J cm-2). That means that the multi-pulse ablation threshold is independent on the doping level of the filters. For more than 100 pulses per spot and all pulse durations applied, the threshold fluence is practically constant. This leads to technically relevant ablation threshold values. KW - Damage KW - Femtosecond laser ablation KW - Filter KW - Incubation KW - Laser safety KW - Threshold PY - 2003 DO - https://doi.org/10.1016/S0169-4332(02)01389-2 SN - 0169-4332 SN - 1873-5584 VL - 208-209 SP - 233 EP - 237 PB - North-Holland CY - Amsterdam AN - OPUS4-11545 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Martin, Sven A1 - Krüger, Jörg A1 - Hertwig, Andreas A1 - Fiedler, A. A1 - Kautek, Wolfgang T1 - Femtosecond laser interaction with protection materials N2 - Textile, aluminium and polyethylene used as components in laser protection curtains were investigated with respect to their ablation behaviour. Employing 33-fs pulses (800 nm wavelength, 1 kHz repetition rate), ex situ geometrical measurements of the ablation cavities and in situ acoustic investigations with a microphone were performed to determine the ablation thresholds in the single- and multi-pulse cases. The acoustical method proved advantageous for complex surface morphologies and/or single laser pulse interactions. Incubation phenomena can be observed for all the materials studied. Technically relevant multi-pulse ablation thresholds are presented and are compared with the single-pulse (1-on-1) irradiation. KW - Damage KW - Femtosecond laser ablation KW - Laser safety KW - Threshold KW - Aluminium KW - Textile PY - 2003 DO - https://doi.org/10.1016/S0169-4332(02)01392-2 SN - 0169-4332 SN - 1873-5584 VL - 208-209 SP - 333 EP - 339 PB - North-Holland CY - Amsterdam AN - OPUS4-11546 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Lenzner, Matthias A1 - Krüger, Jörg A1 - Sartania, S. A1 - Cheng, Z. A1 - Spielmann, Ch. A1 - Mourou, G. A1 - Kautek, Wolfgang A1 - Krausz, F. T1 - Femtosecond Optical Breakdown in Dielectrics N2 - We report measurements of the optical breakdown threshold and ablation depth in dielectrics with different band gaps for laser pulse durations ranging from 5 ps to 5 fs at a carrier wavelength of 780 nm. For tau <100 fs, the dominant channel for free electron generation is found to be either impact or multiphoton ionization (MPI) depending on the size of the band gap. The observed MPI rates are substantially lower than those predicted by the Keldysh theory. We demonstrate that sub-10-fs laser pulses open up the way to reversible nonperturbative nonlinear optics (at intensities greater than 1014 W/cm2 slightly below damage threshold) and to nanometer-precision laser ablation (slightly above threshold) in dielectric materials. PY - 1998 SN - 0031-9007 SN - 1079-7114 VL - 80 IS - 18 SP - 4076 EP - 4079 PB - American Physical Society CY - Ridge, NY AN - OPUS4-11518 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Krüger, Jörg A1 - Kautek, Wolfgang T1 - Femtosecond pulse visible laser processing of fibre composite materials N2 - A first investigation on the ablation of composite materials like carbon and silicon-carbide reinforced alumo- and borosilicate glasses by 300 fs laser pulses (620 nm) in comparison to experiments with 17 ns pulse excimer laser (308 nm) treatment is presented. In all composites, femtosecond laser scans with a fluence of less than 2 J cm-2 produce well defined cuts with smooth side walls in contrast to the nanosecond laser result where extremely incongruent ablation is observed. Visible lasers should not be applicable because SiC and the glasses are practically transparent. Visible subpicosecond pulses of high intensity in the TW cm-2 range allow multi-photon absorption accompanied by incubation phenomena. The morphology of the groove edges reveal the contrasting ablation thresholds and rates of the fibre and glass materials. The ablation thresholds of the transparent components, i.e. the glass matrices and SiC, are about one order of magnitude greater than that of carbon which is ~ 0.15 J cm-2. Incubation effects are important for the absorption mechanisms in the transparent materials. When a critical number of pulses has not been reached at the SiC-glass composites, only the glass is preferentially ablated, and the fibres remain intact. This is in contrast to the C-glass composites where the ablation behaviour is opposite. PY - 1996 SN - 0169-4332 SN - 1873-5584 VL - 106 SP - 383 EP - 389 PB - North-Holland CY - Amsterdam AN - OPUS4-11506 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Bunte, J. A1 - Barcikowski, S. A1 - Burmester, T. A1 - Püster, T. A1 - Hertwig, Andreas A1 - Kautek, Wolfgang A1 - Krüger, Jörg A1 - Martin, Sven A1 - Spielmann, C. A1 - Lenner, M. A1 - Brose, M. T1 - Sicherer Umgang mit Ultrakurzpuls-Lasern, Teil 1: Primäre Gefährdungen PY - 2005 SN - 0945-8875 IS - 2 SP - 6 EP - 11 PB - Magazin-Verl. CY - Bad Nenndorf AN - OPUS4-11001 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Bunte, J. A1 - Barcikowski, S. A1 - Burmester, T. A1 - Püster, T. A1 - Hertwig, Andreas A1 - Kautek, Wolfgang A1 - Krüger, Jörg A1 - Martin, Sven A1 - Spielmann, C. A1 - Lenner, M. A1 - Brose, M. T1 - Sicherer Umgang mit Ultrakurzpuls-Lasern, Teil 2: Sekundäre Gefährdungen PY - 2005 SN - 0945-8875 IS - 4 SP - 13 EP - 18 PB - Magazin-Verl. CY - Bad Nenndorf AN - OPUS4-11002 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Krüger, Jörg T1 - Mikromaterialbearbeitung mit ultrakurzen Laserimpulsen: Vorzüge, Probleme, Sicherheitsaspekte T2 - Seminar "Laser in der Feinbearbeitung" CY - Teltow, Germany DA - 2005-10-22 PY - 2005 AN - OPUS4-10950 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Hertwig, Andreas A1 - Martin, S. A1 - Kautek, Wolfgang A1 - Krüger, Jörg ED - Maruray, L. T1 - Ultra-short Pulse Laser Safety - a Challenge to Materials Science N2 - In this paper, safety-related experiments with ultra-short laser pulses (down to 30 fs) on various components (goggles, curtains) for laser protection are presented. The damage and failure behaviour of protective devices has been investigated dependent on practical conditions such as pulse duration, laser .uence, pulse number, and repetition rate. The e.ects of laser-irradiation on materials can be roughly divided into transient ones like laserinduced transmission (LIT) or short-lived colour centres and permanent damages like the stable colour centres and ablation. The former e.ects are particularly important for transparent devices like laser goggles. To obtain a complete overview on laser safety issues and the prevention of failure there are two important .elds of investigation: 1. the e.ects of laser radiation on human eyes and skin, and 2. on the possible protection materials. Both .elds have been addressed during the recently .nished German project SAFEST (safety aspects in femtosecond technology). The amount of safety data available in the ultrashort pulse region has been increased remarkably. This allows for a re-evaluation of known laser protection materials for this region of pulse durations and for the evaluation of new designs that promise high protection levels while being light-weight and convenient to use. T2 - Optical design and engineering II CY - Jena, Germany DA - 2005-09-13 PY - 2005 N1 - Serientitel: Proceedings of SPIE – Series title: Proceedings of SPIE IS - 5962 SP - 59622J-1 - 59622J-10 PB - SPIE CY - Bellingham AN - OPUS4-11593 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Rudolph, Pascale A1 - Pentzien, Simone A1 - Krüger, Jörg A1 - Kautek, Wolfgang A1 - König, E. T1 - Laserreinigung von Pergament und Papier PY - 1998 SN - 0933-4017 IS - 6 SP - 396 EP - 402 PB - Callwey CY - München AN - OPUS4-11598 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Krüger, Jörg A1 - Sorg, N. A1 - Reif, J. A1 - Kautek, Wolfgang T1 - In situ second harmonic generation measurements during the electrodeposition of Ni on n-Si(111) PY - 1993 SN - 0169-4332 SN - 1873-5584 VL - 69 SP - 388 EP - 392 PB - North-Holland CY - Amsterdam AN - OPUS4-11657 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Sorg, N. A1 - Krüger, Jörg A1 - Kautek, Wolfgang T1 - SHG Measurements of n-Si(111)/aqueous Solution Interfaces PY - 1993 SN - 0005-9021 VL - 97 IS - 3 SP - 402 EP - 406 PB - Wiley-VCH Verl. CY - Weinheim AN - OPUS4-11658 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Kautek, Wolfgang A1 - Mitterer, S. A1 - Krüger, Jörg A1 - Husinsky, W. A1 - Grabner, G. T1 - Femtosecond-Pulse Laser Ablation of Human Corneas N2 - A femtosecond pulse laser in the visible spectral region shows promise as a potentially new powerful corneal sculpting tool. It combines the clinical and technical advantages of visible wavelengths with the high ablation quality observed with nanosecond-pulse excimer lasers at 193 nm. A femtosecond and a nanosecond dye laser with pulse durations of 300 fs and 7 ns, and centre wavelengths at 615 nm and 600 nm, respectively, both focused to an area of the order of 10–5 cm2, have been applied to human corneal ablation. Nanosecond laser pulses caused substantial tissue disruption within a 30–100 m range from the excision edge at all fluences above the ablation threshold of F th60 J cm–2 (I th9 GW cm–2). Completely different excisions are produced by the femtosecond-pulse laser: high quality ablations of the Bowman membrane and the stroma tissue characterised by damage zones of less than 0.5 m were observed at all fluences above ablation threshold of F th1 J cm–2 or I th3 TW cm–2 (3×1012 W cm–2). The transparent cornea material can be forced to absorb ultrashort pulses of extremely high intensity. The fs laser generates its own absorption by a multiphoton absorption process. PY - 1994 DO - https://doi.org/10.1007/BF00332446 SN - 0947-8396 VL - 58 IS - 5 SP - 513 EP - 518 PB - Springer CY - Berlin AN - OPUS4-11659 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Kautek, Wolfgang A1 - Sorg, N. A1 - Krüger, Jörg T1 - Femtosecond pulse laser second harmonic generation on semiconductor electrodes KW - Femtosecond pulse laser KW - Second harmonic generation (SHG) KW - Electrochemistry KW - Semiconductor electrode KW - Silicon KW - Silicon oxide KW - Oxide growth PY - 1994 SN - 0013-4686 SN - 1873-3859 VL - 39 IS - 8/9 SP - 1245 EP - 1249 PB - Elsevier Science CY - Kidlington AN - OPUS4-11660 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - GEN A1 - Kautek, Wolfgang A1 - Krüger, Jörg ED - Brieger, M. T1 - Femtosecond-pulse laser microstructuring of semiconducting materials T2 - 1st International Symposium on Semiconductor Processing and Characterization with Lasers - Applications in Photovoltaics CY - Stuttgart, Germany DA - 1994-04-18 KW - Femtosecond-Pulse Laser KW - Subpicosecond-Pulse Laser KW - Laser-Ablation KW - Multi-Photon Absorption KW - Microstructuring KW - Dry Etching KW - Semiconductors KW - Silicon PY - 1995 SN - 0-87849-683-1 SN - 0255-5476 N1 - Serientitel: Materials science forum – Series title: Materials science forum IS - 173/174 SP - 17 EP - 22 PB - Trans Tech Publ. CY - Aedermannsdorf AN - OPUS4-11671 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - GEN A1 - Kautek, Wolfgang A1 - Sorg, N. A1 - Krüger, Jörg ED - Brieger, M. T1 - Optical second-harmonic generation (SHG) on semiconductor electrodes by means of femtosecond and nanosecond-pulse lasers N2 - In situ optical second-harmonic generation (SHG) on centrosymmetric crystalline semiconductor electrodes opens up a new field of in situ investigations of hurried solid state interfaces and metal front contacts relevant to electronic and photovoltaic devices, which are rarely accessible by other methods. Photoelectrochemical nanosecond- and femtosecond-pulse laser investigations of silicon (111) electrodes show that in situ SHG is feasible in such complex interfacial systems. In a p-p polarization configuration, the azimuthal dependence of the SHG from oxide-covered and bare n-Si (111) electrodes, with and without Ni contact deposits, have been studied. Etching and regrowth of silicon oxides as well as burried interfacial electric field distributions were monitored. In situ SHG is shown to be extremely sensitive to trapped interfacial charge, crystal misorientations and surface step arrays. An advantage of femtosecond-pulses is the fact that illumination fluences that are well below the damage threshold, but still with sufficient power density, can be applied. (Author) T2 - 1st International Symposium on Semiconductor Processing and Characterization with Lasers - Applications in Photovoltaics CY - Stuttgart, Germany DA - 1994-04-18 KW - Femtosecond-Pulse Laser KW - Sub-Picosecond-Pulse Laser KW - Semiconductors KW - Silicon KW - Second-Harmonic Generation KW - SHG KW - Nonlinear Electroreflectance KW - Etch Process KW - Oxide KW - Interfacial Electronic States KW - Fermi-Level Pinning KW - MOS Diode PY - 1995 SN - 0-87849-683-1 DO - https://doi.org/10.4028/www.scientific.net/MSF.173-174.285 SN - 0255-5476 N1 - Serientitel: Materials science forum – Series title: Materials science forum IS - 173/174 SP - 285 EP - 290 PB - Trans Tech Publ. CY - Aedermannsdorf AN - OPUS4-11672 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Krüger, Jörg T1 - Short pulse laser processing: safety aspects T2 - Bereichsseminar A - Max Born Institut Berlin CY - Berlin, Germany DA - 2006-11-30 PY - 2006 AN - OPUS4-13779 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -