TY - GEN A1 - Krüger, Jörg A1 - Bonse, Jörn A1 - Baudach, Steffen A1 - Kautek, Wolfgang A1 - Lenzner, M. A1 - Wrobel, J. M. T1 - Femtosecond-Pulse Laser Machining of Semiconducting Materials N2 - Summary form only given. Machining investigations of crystalline silicon have been performed with laser pulses at a wavelength of 780 nm in the range between 5 fs and 400 fs. Applying 100 pulses per spot, surface damage thresholds were determined by the measurement of the damage diameter. In this pulse duration regime, the threshold fluences were nearly constant. Single-pulse investigations with 5 fs pulses yielded a value of about 0.15 J cm-2 identical to the multi-pulse experiment. This is in contradiction to the behaviour of dielectrics where incubation effects alter the optical properties down to the 5 fs pulse regime. Employing laser pulses with a duration of 130 fs at a wavelength of 800 nm, single-pulse ablation thresholds of 0.23 J cm-2 and 0.16 J cm-2 were determined for Si and InP in air, respectively. The threshold fluence was calculated from the linear relation between the square of the diameters versus the logarithm of the laser fluences. T2 - CLEO/Europe 2000 ; Conference on Lasers and Electro-Optics Europe ; Conférence Européenne sur les Lasers et l'Electro-Optique ; CLEO/Europe-IQEC CY - Nice, France DA - 2000-09-10 PY - 2000 SN - 0-7803-6319-1 DO - https://doi.org/10.1109/CLEOE.2000.910410 PB - IEEE Service Center CY - Piscataway, NJ AN - OPUS4-958 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Kautek, Wolfgang T1 - Laserstrahlreinigung von historischem Pergament und Papier T2 - 4. Forum "Laser in der Restaurierung und Denkmalpflege" CY - Leipzig, Deutschland DA - 2000-10-27 KW - Laser PY - 2000 CY - Leipzig AN - OPUS4-903 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Kautek, Wolfgang A1 - Reetz, Susanne A1 - Pentzien, Simone T1 - Template Electrodeposition of Nanowire Arrays on Gold Foils Fabricated by Pulsed-Laser Deposition KW - Nanodraht KW - Gold KW - Galvanisierung, elektrisch KW - Verbundwerkstoff KW - Laser KW - Impulslaser PY - 1995 SN - 0013-4686 SN - 1873-3859 VL - 40 IS - 10 SP - 1461 EP - 1468 PB - Elsevier Science CY - Kidlington AN - OPUS4-626 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Kautek, Wolfgang A1 - Pentzien, Simone A1 - Conradi, Andrea A1 - Krüger, Jörg A1 - Brzezinka, Klaus-Werner T1 - Pulsed-laser deposition and boron-blending of diamond-like carbon (DLC) thin films KW - Pulslaser KW - Bor KW - Dünnfilmtechnologie KW - Dünnfilm, diamantartig PY - 1996 SN - 0169-4332 SN - 1873-5584 VL - 106 SP - 158 EP - 165 PB - North-Holland CY - Amsterdam AN - OPUS4-630 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - GEN A1 - Krüger, Jörg A1 - Kautek, Wolfgang ED - Dubowski, J. T1 - Femtosecond-pulse laser processing of metallic and semiconducting thin films KW - Femtosekundenpulslaser KW - Pulslaser KW - Dünnschicht, metallisch KW - Dünnschicht, halbleitend KW - Ablation PY - 1995 SN - 0-8194-1750-5 SN - 1605-7422 N1 - Serientitel: SPIE proceedings series – Series title: SPIE proceedings series IS - 2403 SP - 436 EP - 447 PB - SPIE CY - Bellingham, Wash. AN - OPUS4-637 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - GEN A1 - Kautek, Wolfgang A1 - Sahre, Mario ED - Dunsch, L. ED - Klatt, B. T1 - Neue Einblicke in elektrochemische Doppelschichtprozesse mit der Quarzmikrowaage: Halogenadsorption an Silberelektroden T2 - Jahrestagung der GDCh-Fachgruppe Angewandte Elektrochemie CY - Dresden, Deutschland DA - 1995-09-28 KW - Adsorption KW - Halogen KW - Elektrode KW - Elekrochemie KW - Doppelprozeß KW - Quarzmikrowaage PY - 1995 SN - 3-924763-48-8 VL - 2 SP - 359 CY - Frankfurt am Main AN - OPUS4-604 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Bonse, Jörn A1 - Rudolph, Pascale A1 - Krüger, Jörg A1 - Baudach, Steffen A1 - Kautek, Wolfgang T1 - Femtosecond pulse laser processing of TiN on silicon N2 - Ultrashort pulse laser microstructuring (pulse duration 130 fs, wavelength 800 nm, repetition rate 2 Hz) of titanium nitride (TiN) films on silicon substrates was performed in air using the direct focusing technique. The lateral and vertical precision of laser ablation was evaluated. The TiN ablation threshold changed with the number of pulses applied to the surface due to an incubation effect. An ablation depth per pulse below the penetration depth of light was observed. Columnar structures were formed in the silicon substrate after drilling through the TiN layer. KW - Femtosecond laser ablation KW - Titanium nitride KW - Silicon KW - Optical properties PY - 2000 DO - https://doi.org/10.1016/S0169-4332(99)00481-X SN - 0169-4332 SN - 1873-5584 VL - 154-155 SP - 659 EP - 663 PB - North-Holland CY - Amsterdam AN - OPUS4-802 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Baudach, Steffen A1 - Bonse, Jörn A1 - Krüger, Jörg A1 - Kautek, Wolfgang T1 - Ultrashort pulse laser ablation of polycarbonate and polymethylmethacrylate N2 - Ablation experiments with ultrashort laser pulses (pulse duration 150 fs, wavelength 800 nm) on polymers (PC, PMMA) relevant for biomedical technology have been performed in air. The lateral and vertical machining precision was evaluated by optical, atomic force and scanning electron microscopy. The ablation threshold reaches values in the range of 0.5–2.5 J/cm2 and depends significantly on the number of laser pulses applied to the same spot. The hole diameters are influenced by the laser fluence and the number of laser pulses. The relation between the ablation threshold and the number of laser pulses applied to the same spot is described in accordance with an incubation model. KW - Femtosecond laser ablation KW - Polymer KW - Polycarbonate KW - Polymethylmethacrylate PY - 2000 DO - https://doi.org/10.1016/S0169-4332(99)00474-2 SN - 0169-4332 SN - 1873-5584 VL - 154-155 SP - 555 EP - 560 PB - North-Holland CY - Amsterdam AN - OPUS4-803 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Sadagopan, Sathiyanarayanan A1 - Sahre, Mario A1 - Kautek, Wolfgang A1 - Sathiyanarayanan, S. T1 - In-situ grazing incidence X-ray diffractometry observation of pitting corrosion of copper in chloride solutions KW - Copper KW - Passive films KW - Pitting corrosion KW - Cyclic voltammetry KW - XRD PY - 1999 DO - https://doi.org/10.1016/S0010-938X(99)00021-9 SN - 0010-938X VL - 41 IS - 10 SP - 1899 EP - 1909 PB - Elsevier CY - Orlando, Fla. AN - OPUS4-804 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Krüger, Jörg A1 - Kautek, Wolfgang A1 - Lenzner, M. A1 - Krausz, F. T1 - Precision laser ablation of dielectrics in the 10-fs regime N2 - Zusammenfassung Laser pulses in the 10-fs domain provide a quality of micromachining of fused silica and borosilicate glass that is unobtainable with longer pulses in the range of several 100 femtoseconds up to picoseconds. The shortening of the pulses reduces the statistical behavior of the material removal and the ablation process thus attains a more deterministic and reproducible character. The improved reproducibility of ablation is accompanied by significantly smoother morphology. This offers the potential for lateral and vertical machining precision of the order of 100 nm and 10 nm, respectively. KW - Laser ablation PY - 1999 DO - https://doi.org/10.1007/s003390050906 SN - 0947-8396 VL - 68 IS - 3 SP - 369 EP - 371 PB - Springer CY - Berlin AN - OPUS4-825 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Krüger, Jörg A1 - Kautek, Wolfgang A1 - Krivenko, A.G. A1 - Benderskii, V.A. T1 - Gigantic Hydrogen-Ion Discharge Currents Initiated by a Subpicosecond Laser PY - 1998 SN - 0038-5387 SN - 1023-1935 VL - 34 IS - 10 SP - 1068 EP - 1075 PB - MAIK Nauka/Interperiodica Publ. CY - Moscow AN - OPUS4-826 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Sadagopan, Sathiyanarayanan A1 - Sahre, Mario A1 - Kautek, Wolfgang T1 - Influence of surface morphology on the oxidation of metal electrodes studied by in-situ grazing incidence x-ray diffractometry PY - 1999 SN - 0937-0633 IS - 363 SP - 197 EP - 201 PB - Springer CY - Berlin AN - OPUS4-827 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Krüger, Jörg A1 - Kautek, Wolfgang A1 - Lenzner, M. A1 - Krausz, F. T1 - Incubation of laser ablation in fused silica with 5-fs pulses N2 - Zusammenfassung The threshold fluences for laser-induced damage of fused silica with single 5-fs pulses from a Ti:sapphire laser system were determined by extrapolating the ablated volume to zero. These thresholds are about 4 times as high as the values previously obtained from multi-shot experiments. This result is interpreted in terms of an irreversible modification of the original material below the single-shot threshold (incubation). KW - Laser PY - 1999 DO - https://doi.org/10.1007/s003390051034 SN - 0947-8396 VL - 69 IS - 4 SP - 465 EP - 466 PB - Springer CY - Berlin AN - OPUS4-799 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Krüger, Jörg A1 - Kautek, Wolfgang A1 - Lenzner, M. A1 - Krausz, F. T1 - Photoablation with sub-10 fs laser pulses N2 - Ablation experiments in several glasses with single and multishot irradiation by laser pulses in the 10-fs pulse duration domain are presented; physical and technological implications are discussed. We demonstrate that these short pulses offer the potential for lateral and vertical machining precision of the order of 100 nm. KW - Ablation KW - Laser pulses KW - Femtosecond pulses PY - 2000 DO - https://doi.org/10.1016/S0169-4332(99)00432-8 SN - 0169-4332 SN - 1873-5584 VL - 154-155 SP - 11 EP - 16 PB - North-Holland CY - Amsterdam AN - OPUS4-800 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Rudolph, Pascale A1 - Bonse, Jörn A1 - Krüger, Jörg A1 - Kautek, Wolfgang T1 - Femtosecond- and nanosecond-pulse laser ablation of bariumalumoborosilicate glass N2 - Laser ablation with femtosecond pulses (130 fs, wavelength 800 nm, repetition rate 2 Hz) was compared with nanosecond-pulse ablation (10 ns, wavelength 266 nm, repetition rate 2.5 Hz) of bariumalumoborosilicate glass in air using the direct focusing technique. Different ablation thresholds and heat-affected zones were observed. The lateral and vertical machining precision was evaluated. Single nanosecond laser pulses in the far UV resulted in a bubble or a circular hole in the centre of the illuminated spot, depending on the applied fluence. The ablation behaviour in the case of near-IR femtosecond pulses contrasted to this. Bubble formation was not detected. It needed repeated pulses at the same spot to modify the surface until material removal could be observed (incubation). Cavity dimensions of less than the beam diameter were achieved in this case. T2 - 5th International Conference on Laser Ablation ; COLA '99 CY - Göttingen, Germany DA - 1998-07-19 KW - Laser ablation KW - Bariumalumoborosilicate glass PY - 1999 DO - https://doi.org/10.1007/s003390051524 SN - 0947-8396 VL - 69 IS - 7 SP - S763 EP - S766 PB - Springer CY - Berlin AN - OPUS4-801 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - GEN A1 - Kühnemund, Lutz A1 - Kautek, Wolfgang A1 - Röllig, Mathias ED - Plieth, W. T1 - Pulse Laser Depassivation at 532 nm of Titanium in NaCl Electrolytes T2 - Jahrestagung. Gesellschaft Deutscher Chemiker, Fachgruppe Angewandte Elektrochemie CY - Freiberg, Germany DA - 1999-09-29 KW - Pulsed-Laser-Depassivated Titanium PY - 2000 SN - 3-924763-85-2 N1 - Serientitel: GDCh-Monographien – Series title: GDCh-Monographien IS - 18 SP - 117 EP - 124 PB - Ges. Deutscher Chemiker CY - Frankfurt am Main AN - OPUS4-842 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Bonse, Jörn A1 - Sturm, Heinz A1 - Schmidt, Dieter A1 - Kautek, Wolfgang T1 - Chemical, morphological and accumulation phenomena in ultrashort-pulse laser ablation of TiN in air N2 - Ultrashort-pulse laser ablation (F=130 fs, 5=800 nm, repetition rate 2-20 Hz) of titanium nitride was investigated for laser fluences between 0.3 and 4.5 J/cm2 using the direct focusing technique in air. The influence of the laser pulse number and the peak fluence was investigated by means of several surface analytical techniques (optical microscopy, dynamic friction atomic force microscopy, scanning Auger electron microscopy and small-spot electron spectroscopy for chemical analysis). The correlation of the results about optical, physical and chemical properties of the irradiated areas allows us to propose a simple oxidation model, which explains different observed phenomena associated with surface damage such as mound formation and crater widening and clarifies the incubation behavior reported earlier for this material. PY - 2000 DO - https://doi.org/10.1007/s003390000585 SN - 0947-8396 VL - 71 IS - 6 SP - 657 EP - 665 PB - Springer CY - Berlin AN - OPUS4-1067 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Bonse, Jörn A1 - Baudach, Steffen A1 - Kautek, Wolfgang A1 - Geuss, Markus A1 - Sturm, Heinz T1 - The precision of the femtosecond-pulse laser ablation of TiN films on silicon N2 - Ti:sapphire laser pulses of 130 fs and 800 nm were focused on 3.2-7m-thick TiN films by a 60-mm focal length lens in air. The morphology of the ablated areas generated by laser pulses at a fluence slightly above the ablation threshold was characterized in dependence on the pulse number by scanning electron microscopy (SEM) and atomic force microscopy (AFM). The cavity profiles, depths, diameters, and volumes were quantitatively evaluated by AFM. The polarization state of the laser light is discussed as a further parameter, in addition to fluence and pulse number, that influences and controls the ablation precision of these materials. It was observed that circularly polarized radiation enhances the average ablation rates and reduces the roughness in the cavities by a factor of 2-3 as compared to linearly polarized radiation of the same incident laser fluence. Special attention was paid to the interfacial region between the coating and substrate. Ultrashort-pulse laser drilling into the Si substrate revealed the generation of columnar features which even may surmount the original coating under laser conditions. T2 - 5th International Conference on Laser Ablation ; COLA '99 CY - Göttingen, Germany DA - 1999-07-19 KW - Laser ablation KW - Picosecond PY - 1999 DO - https://doi.org/10.1007/s003390051425 SN - 0947-8396 VL - 69 IS - 7 SP - S399 EP - S402 PB - Springer CY - Berlin AN - OPUS4-778 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -