TY - JOUR A1 - Hodoroaba, Vasile-Dan T1 - Instrumental performance parameters for specification and check of energy dispersive X-ray spectrometers as in the international standard ISO 15632 JF - Microscopy and microanalysis N2 - Simple procedures for specifying and checking the performance of energy dispersive X-ray spectrometers (EDS) have been since 2002 available in form of the international standard ISO 15632:2002 [1]. When specifying their spectrometers all major EDS manufacturers refer meanwhile to this standard. Main spectrometer parameters such as energy resolution can be determined as recommended in there. Just several years ago the Si-Li detector has been the mostly widespread type of detector. Since four-five years, silicon drift detector (SDD) EDS providing comparable (in many cases even better) energy resolutions at much higher count rates than the conventional Si-Li’s have got the breakthrough on the market. KW - ED-EPMA KW - WD-EPMA KW - (mu-)XRF KW - EDX PY - 2011 DO - https://doi.org/10.1017/S1431927611003941 SN - 1431-9276 SN - 1435-8115 VL - 17 IS - Suppl. 2 SP - 614 EP - 615 PB - Cambridge University Press CY - New York, NY AN - OPUS4-26750 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Hodoroaba, Vasile-Dan A1 - Salge, T. A1 - Terborg, R. A1 - Rackwitz, Vanessa T1 - Advanced elemental analysis with ED-EPMA, WD-EPMA and mu-XRF at a SEM JF - Microscopy and microanalysis N2 - It is a latent wish of any SEM/EDS (scanning electron microscope with an energy dispersive spectrometer) analyst to “see more” of the analyzed specimen, i.e. to improve the existing analytical figures of merit. One key issue are the relatively poor limits of detection (not below 0.1 mass-%) provided by energy dispersive X-ray spectrometry (EDX) with the conventional electron excitation (ED-EPMA). This is a consequence of relatively low peak-to-background ratios and reduced energy resolution when compared to wavelength dispersive spectrometry (WD-EPMA). Recent technological developments make possible to equip the SEM with a wavelength dispersive spectrometer (WDS), so that significantly better energy resolution can be attained. Also a relative new product that can be easily attached to a SEM/EDS system is a micro-focus X-ray source. Hence, it is possible to perform (micro-focus) X-ray fluorescence spectrometry (μ-XRF) and take advantage of the enhanced peak-to-background ratios (well suited for trace analysis). However, there are also some disadvantages: an increased measurement time and excitation with a high current in the 10s of nA range are usually required for WDS. μ-XRF provides more bulk information and poor limits of detection for light elements. By combining the advantages of these analytical techniques “seeing more” becomes possible. KW - ED-EPMA KW - WD-EPMA KW - (mu-)XRF KW - EDX PY - 2011 DO - https://doi.org/10.1017/S1431927611003874 SN - 1431-9276 SN - 1435-8115 VL - 17 IS - Suppl. 2 SP - 600 EP - 601 PB - Cambridge University Press CY - New York, NY AN - OPUS4-26751 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -