TY - JOUR A1 - Procop, Mathias A1 - Hodoroaba, Vasile-Dan T1 - X-ray fluorescence as an additional analytical method for a scanning electron microscope JF - Microchimica acta N2 - Energy dispersive and wavelength dispersive X-ray spectrometry are used to determine the composition of a specimen in a scanning electron microscope (SEM) by electron probe microanalysis (EPMA). A valuable completion for the SEM is analysis by X-ray fluorescence (XRFA). The main advantage of this method consists in its low detection limit. XRFA with a SEM uses the same spectrometers as for EPMA, necessary are only an additional X-ray source for the excitation of fluorescence spectra and software for their evaluation. Recent developments of smart low-power X-ray tubes and X-ray optical components enabled the construction of compact X-ray sources with focussing properties as add-on for a SEM. For quantitative XRFA the source spectrum has to be known. For its calculation the X-ray production yields Y have been measured for the commonly used tube target materials Mo, Rh and W. The excitation spectra were calculated for a variety of source types and compared with respect to the achievable photon flux and its spectral distribution. KW - X-ray spectroscopy KW - X-ray production yield KW - X-ray tube spectrum KW - X-ray fluorescence analysis KW - XRF KW - X-ray optics KW - Scanning electron microscopy KW - Analytical SEM PY - 2008 DO - https://doi.org/10.1007/s00604-007-0854-4 SN - 0026-3672 SN - 1436-5073 VL - 161 IS - 3-4 SP - 413 EP - 419 PB - Springer CY - Wien AN - OPUS4-17537 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -