TY - JOUR A1 - Ritter, Martin A1 - Dziomba, T. A1 - Hemmleb, M. A1 - Koenders, L. A1 - Kranzmann, Axel T1 - A 3D-Calibration Method for the Quantitative SPM Measurement of Hardness Indenters KW - 3D Calibration KW - SPM KW - Hardness Indenter PY - 2007 SN - 0970-3950 VL - 22 IS - 3 SP - 167 EP - 175 PB - Metrology Society of India CY - New Delhi AN - OPUS4-16357 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -