TY - CONF A1 - Griepentrog, Michael A1 - Chudoba, Thomas A1 - Dück, Alexander A1 - Beck, Uwe T1 - Evaluation of mechanical properties in the nanometer range - trueness and precision T2 - The 51st Annual Conference on Mass Spectrometry (AIST 2003) N2 - The aim of this study was to evaluate the limitations in the nanometer range film thickness for the application of instrumented indentation test (IIT) and to prepare an accuracy experiment (round robin) for validation of IIT and certification of coating/substrate systems. T2 - The 51st Annual Conference on Mass Spectrometry (AIST 2003) CY - Tsukuba, Japan DA - 2003-05-14 PY - 2003 AN - OPUS4-3321 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Griepentrog, Michael T1 - Vertrauern schaffen in die Vakuumbaschichtung von Kunststoffen - VDI Richtlinie 3823 T2 - 11. Neues Dresdner Vakuumtechnisches Kolloquium T2 - 11. Neues Dresdner Vakuumtechnisches Kolloquium CY - Dresden, Germany DA - 2003-10-16 PY - 2003 AN - OPUS4-4321 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Griepentrog, Michael T1 - Mechanische und optische Charakterisierung dünner Schichten T2 - 11. Bundesdeutsche Fachtagung Plasmatechnologie T2 - 11. Bundesdeutsche Fachtagung Plasmatechnologie CY - Ilmenau, Germany DA - 2003-03-09 PY - 2003 AN - OPUS4-4315 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Griepentrog, Michael A1 - Chudoba, Thomas A1 - Dück, Alexander A1 - Beck, Uwe T1 - Evaluation of mechanical properties in the nanometer range - trueness and precision T2 - AIST-BAM Symposium on Material Surface Technology in TWIN Institute Programme T2 - AIST-BAM Symposium on Material Surface Technology in TWIN Institute Programme CY - Tsukuba, Japan DA - 2003-02-18 PY - 2003 AN - OPUS4-4316 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Griepentrog, Michael A1 - Chudoba, Thomas A1 - Dück, Alexander A1 - Schneider, D. A1 - Siemroth, P. T1 - Determination of elastic properties of nanometer thin diamond-like carbon coatings T2 - 10th European Conference on Applications of Surface and Interface Analysis (ECASIA '03) T2 - 10th European Conference on Applications of Surface and Interface Analysis (ECASIA '03) CY - Berlin, Germany DA - 2003-10-05 PY - 2003 AN - OPUS4-4317 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -