TY - GEN A1 - Berger, Achim A1 - Ecker, Klaus A1 - Görner, Wolf A1 - Merchel, Silke A1 - Procop, Mathias A1 - Radtke, Martin A1 - Riesemeier, Heinrich T1 - X-ray fluorescence analysis at the BAMline PY - 2002 UR - http://www.helmholtz-berlin.de/media/media/oea/web/pr_webseite/druckschriften/berichte/bessy/annualreport2001.pdf#page=253 SN - 0179-4159 SP - 253 EP - 254 PB - Berliner Elektronenspeicherring-Gesellschaft für Synchrotronstrahlung CY - Berlin AN - OPUS4-1322 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Berger, Achim A1 - Ecker, Klaus A1 - Görner, Wolf A1 - Radtke, Martin A1 - Reinholz, Uwe A1 - Riesemeier, Heinrich A1 - Segebade, Christian T1 - Strahlenverfahren in Kombination - ein Werkzeug für Analyse und Zertifizierung von Feststoffen T2 - 12. Jahrescolloquium "Analyse von Feststoffen unterschiedlicher Materialien aus Industrie und Umwelt" CY - Berlin, Deutschland DA - 2002-11-19 PY - 2002 SP - 1(?) AN - OPUS4-2025 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Ecker, Klaus T1 - Antimon implantiert in Silizium - Ein Schichtreferenzmaterial für die Oberflächenanalytik T2 - Seminar der Abteilung I, BAM CY - Berlin, Germany DA - 2002-03-25 PY - 2002 AN - OPUS4-2972 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - GEN A1 - Radtke, Martin A1 - Berger, Achim A1 - Ecker, Klaus A1 - Merchel, Silke A1 - Procop, Mathias A1 - Riesemeier, Heinrich A1 - Görner, Wolf A1 - Reiche, I. T1 - Synchrotron induced X-ray fluorescence for trace element analysis T2 - Hamburg Workshop CY - Hamburg, Germany DA - 2002-09-16 PY - 2002 SN - 3-924330-53-0 SP - 1(?) PB - Gesellschaft Deutscher Chemiker AN - OPUS4-1525 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Ecker, Klaus A1 - Wätjen, U. A1 - Berger, Achim A1 - Persson, L. A1 - Pritzkow, Wolfgang A1 - Radtke, Martin A1 - Riesemeier, Heinrich T1 - RBS, SY-XRF, INAA and ICP-IDMS of antimony implanted in silicon - A multi-method approach to characterize and certify a reference material N2 - A layer of Sb atoms, implanted with an energy of 400 keV and a nominal dose of 5×1016 atoms/cm2 into a high purity silicon wafer, was certified for its areal density (atoms/cm2) using Rutherford backscattering spectrometry (RBS), instrumental neutron activation analysis (INAA) and inductively coupled plasma isotope dilution mass spectrometry (ICP-IDMS) and for its isotope ratio using INAA and ICP-IDMS. Excellent agreement between the results of the different independent methods was found. In the present work, the measurements of the homogeneity of the areal density of Sb, previously determined with RBS in spots having 1 mm diameter, are improved with synchrotron X-ray fluorescence analysis: Higher precision in even smaller sample spots allows to estimate a reduced inhomogeneity of the whole batch of samples of the order of only 0.4%. Thus the uncertainty of the certified value can further be reduced. Down to fractions of a chip with 0.3×0.4 mm2 area, the areal density is now certified as (4.81±0.06)×1016 Sb atoms/cm2, where the expanded uncertainty 0.06 (coverage factor k=2) corresponds to only 1.2%. The relative merits of the different analytical methods are discussed. KW - Certified reference material KW - RBS KW - INAA KW - ICP-IDMS KW - XRF KW - SY-XRF PY - 2002 U6 - https://doi.org/10.1016/S0168-583X(01)01038-2 SN - 0168-583X SN - 1872-9584 VL - 188 IS - 1-4 SP - 120 EP - 125 PB - Elsevier CY - Amsterdam AN - OPUS4-13870 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Merchel, Silke A1 - Dudzus, Thomas A1 - Ecker, Klaus A1 - Hedrich, Martina A1 - Kipphardt, Heinrich A1 - Recknagel, Sebastian T1 - Viele (BAM-) Wege führen zu den leichten Elementen T2 - 12. Jahrescolloquium "Analyse von Feststoffen unterschiedlicher Materialien aus Industrie und Umwelt" CY - Berlin, Deutschland DA - 2002-11-19 PY - 2002 SP - 1(?) AN - OPUS4-2024 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -