TY - JOUR A1 - Hodoroaba, Vasile-Dan A1 - Hoffmann, V. A1 - Steers, E.B.M. A1 - Griepentrog, Michael A1 - Dück, Alexander A1 - Beck, Uwe T1 - Round Robin exercise: Coated materials for glow discharge spectroscopy N2 - A Round Robin (RR) exercise on selected coated materials has been carried out with the aim of finding the optimal conditions for the analysis of nitride layers with GD-OES. Such pre-normative work is necessary for the evaluation of parallel development of the production of nitride layers as certified reference materials (CRMs). Two types of samples, Ti–N layer and V–N layer, respectively, with chemical compositions close to stoichiometry and a thickness of ~3 µm, deposited on a steel substrate, have been provided to the RR participants. Additionally, another type of sample, a (100 nm CrNi/100 nm Cu) multilayer (ML) stack deposited on silicon wafer has also been included in the RR. This sample can be used as a CRM for checking GD spectrometer conditions and it has been proved helpful in further development of GDS instrumentation and methodology. The RR exercise has been performed in the frame of the EC Thematic Network on Glow Discharge Spectroscopy for Spectrochemical Analysis (‘GDS-Net’). KW - Coated/Layered Reference Materials KW - Nitrides KW - Multilayer KW - GDS KW - Round Robin PY - 2006 U6 - https://doi.org/10.1039/B513426A SN - 0267-9477 SN - 1364-5544 VL - 21 IS - 1 SP - 74 EP - 81 PB - Royal Society of Chemistry CY - London AN - OPUS4-11762 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -