TY - CONF A1 - Bonse, Jörn A1 - Höhm, S. A1 - Rohloff, M. A1 - Rosenfeld, A. A1 - Krüger, Jörg T1 - Femtosecond laser-induced periodic surface structures on semiconductors and dielectrics T2 - EMRS Spring Meeting 2011, Symposium J "Laser materials processing for micro and nano applications" CY - Nice, France DA - 2011-05-09 PY - 2011 AN - OPUS4-23380 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -