TY - CONF A1 - Bonse, Jörn A1 - Krüger, Jörg A1 - Höhm, S. A1 - Rosenfeld, A. T1 - Periodic surface structures generated by cross-polarized double femtosecond laser pulse irradiation sequences T2 - Photonics West, SPIE Conference 8607 on Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVIII T2 - Photonics West, SPIE Conference 8607 on Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVIII CY - San Francisco, CA, USA DA - 2013-02-02 PY - 2013 AN - OPUS4-27668 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -