TY - CONF A1 - Bonse, Jörn A1 - Mann, Guido A1 - Krüger, Jörg A1 - Eberstein, M. A1 - Hainich, S. A1 - Marcinkowski, M. T1 - Femtosecond laser-induced removal of antireflection coatings from textured silicon wafers T2 - SiliconPV 2013, 3rd International Conference on Crystalline Silicon Photovoltaics CY - Hamelin, Germany DA - 2013-03-25 PY - 2013 AN - OPUS4-28049 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Seuthe, T. A1 - Grehn, M. A1 - Mermillod-Blondin, A. A1 - Eichler, H.J. A1 - Bonse, Jörn A1 - Eberstein, M. T1 - Structural modifications of binary lithium silicate glasses upon femtosecond laser pulse irradiation probed by micro-Raman spectroscopy N2 - The effects of single femtosecond laser pulse irradiation (130 fs pulse duration, 800 nm center wavelength) on the structure of binary lithium silicate glasses of varying chemical compositions were investigated by micro-Raman spectroscopy. Permanent modifications were generated at the surface of the glass samples with varying laser fluences in the ablative regime and evaluated for changes in the corresponding Raman band positions and bandwidths. For increasing laser fluences, the position of certain Raman bands changed, indicating an increase in the mass density of the glass inside the irradiated area. Simultaneously, the widths of all investigated bands increased, indicating a higher degree of disorder in the glass structure with respect to bond-angle and bond-length variations. PY - 2013 DO - https://doi.org/10.1364/OME.3.000755 SN - 2159-3930 VL - 3 IS - 6 SP - 755 EP - 764 PB - OSA CY - Washington, DC AN - OPUS4-28372 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Grehn, M. A1 - Reinhardt, F. A1 - Bonse, Jörn A1 - Eberstein, M. A1 - Seuthe, T. T1 - Response to "comment on 'femtosecond laser-induced modification of potassium-magnesium silicate glasses: an analysis of structural changes by near edge x-ray absorption spectroscopy'" KW - Bond lengths KW - Glass KW - High-speed optical techniques KW - Magnesium compounds KW - Monochromators KW - Potassium compounds KW - Silicon compounds KW - XANES PY - 2013 DO - https://doi.org/10.1063/1.4804148 SN - 0003-6951 SN - 1077-3118 VL - 102 SP - 196102-1 - 196102-2 PB - American Institute of Physics CY - Melville, NY AN - OPUS4-28520 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Höhm, S. A1 - Rosenfeld, A. A1 - Krüger, Jörg A1 - Bonse, Jörn T1 - Area dependence of femtosecond laser-induced periodic surface structures for varying band gap materials after double pulse excitation N2 - The formation of laser-induced periodic surface structures upon irradiation of titanium, silicon, and fused silica with multiple irradiation sequences consisting of parallel polarized Ti:sapphire femtosecond laser pulse pairs (pulse duration 50–150 fs, central wavelength ~800 nm) is studied experimentally. The temporal delay between the individual near-equal energy fs-laser pulses was varied between 0 and 5 ps with a temporal resolution of better than 0.2 ps. The surface morphology of the irradiated surface areas is characterized by means of scanning electron microscopy (SEM). In all materials a decrease of the rippled surface area is observed for increasing delays. The characteristic delay decay scale is quantified and related to material dependent excitation and energy relaxation processes. KW - Laser-induced periodic surface structures (LIPSS) KW - Femtosecond laser ablation KW - Double-pulse experiments KW - Ultrafast optical techniques KW - Mach-Zehnder interferometer PY - 2013 DO - https://doi.org/10.1016/j.apsusc.2012.10.188 SN - 0169-4332 SN - 1873-5584 VL - 278 SP - 7 EP - 12 PB - North-Holland CY - Amsterdam AN - OPUS4-28601 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Bonse, Jörn A1 - Hertwig, Andreas A1 - Koter, Robert A1 - Weise, Matthias A1 - Beck, Uwe A1 - Reinstädt, Philipp A1 - Griepentrog, Michael A1 - Krüger, Jörg A1 - Picquart, M. A1 - Haro-Poniatowski, E. T1 - Femtosecond laser pulse irradiation effects on thin hydrogenated amorphous carbon layers N2 - The irradiation of ~0.9-µm-thick hydrogenated amorphous carbon (a-C:H) layers deposited on silicon substrates with single femtosecond (fs) laser pulses (35 fs pulse duration, 790 nm centre wavelength) in air is studied experimentally. Irradiation spots have been generated with different peak fluences and subsequently investigated by optical topometry, micro Raman spectroscopy and microscale mechanical indentation in order to evaluate their microscopic, topographical, structural and mechanical properties (e.g. elastic modulus). By this multi-method approach, a clear separation of different effects (delamination and graphitisation) becomes possible. The joint application of mechanical and spectroscopic techniques provides unique insights into the effects of the fs-laser radiation on the carbon layer. PY - 2013 DO - https://doi.org/10.1007/s00339-012-7170-5 SN - 0947-8396 VL - 112 IS - 1 SP - 9 EP - 14 PB - Springer CY - Berlin AN - OPUS4-28629 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Bonse, Jörn A1 - Krüger, Jörg A1 - Höhm, S. A1 - Rosenfeld, A. T1 - Generation, control and mechanisms of the formation of femtosecond laser-induced periodic surface structures T2 - European Materials Research Society (EMRS) Spring Meeting 2013, Symposium V "Laser materials interactions for micro and nano applications" CY - Strasbourg, France DA - 2013-05-27 PY - 2013 AN - OPUS4-28806 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Bonse, Jörn A1 - Grehn, M. A1 - Seuthe, T. A1 - Reinhardt, F. A1 - Eichler, H. J. A1 - Eberstein, M. T1 - Structural modification of femtosecond laser pulse irradiated potassium-magnesium silicate glasses probed by near edge X-ray absorption spectroscopy T2 - European Materials Research Society (EMRS) Spring Meeting 2013, Symposium V "Laser materials interactions for micro and nano applications" CY - Strasbourg, France DA - 2013-05-27 PY - 2013 AN - OPUS4-28809 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Höhm, S. A1 - Rosenfeld, A. A1 - Krüger, Jörg A1 - Bonse, Jörn T1 - Femtosecond diffraction dynamics of laser-induced periodic surface structures on fused silica N2 - The formation of laser-induced periodic surface structures (LIPSS) on fused silica upon irradiation with linearly polarized fs-laser pulses (50 fs pulse duration, 800?nm center wavelength) is studied experimentally using a transillumination femtosecond time-resolved (0.1 ps-1 ns) pump-probe diffraction approach. This allows to reveal the generation dynamics of near-wavelength-sized LIPSS showing a transient diffraction at specific spatial frequencies even before a corresponding permanent surface relief was observed. The results confirm that the ultrafast energy deposition to the materials surface plays a key role and triggers subsequent physical mechanisms such as carrier scattering into self-trapped excitons. KW - High-speed optical techniques KW - Laser beam effects KW - Silicon compounds KW - Surface structure PY - 2013 DO - https://doi.org/10.1063/1.4790284 SN - 0003-6951 SN - 1077-3118 VL - 102 IS - 5 SP - 054102-1 EP - 054102-4 PB - American Institute of Physics CY - Melville, NY AN - OPUS4-27646 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Bonse, Jörn A1 - Krüger, Jörg A1 - Höhm, S. A1 - Rosenfeld, A. T1 - Periodic surface structures generated by cross-polarized double femtosecond laser pulse irradiation sequences T2 - Photonics West, SPIE Conference 8607 on Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVIII CY - San Francisco, CA, USA DA - 2013-02-02 PY - 2013 AN - OPUS4-27668 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Höhm, S. A1 - Rohloff, M. A1 - Rosenfeld, A. A1 - Krüger, Jörg A1 - Bonse, Jörn T1 - Dynamics of the formation of laser-induced periodic surface structures on dielectrics and semiconductors upon femtosecond laser pulse irradiation sequences N2 - The formation of laser-induced periodic surface structures (LIPSS) upon irradiation of fused silica and silicon with multiple (NDPS) irradiation sequences consisting of linearly polarized femtosecond laser pulse pairs (pulse duration ~150 fs, central wavelength ~800 nm) is studied experimentally. Nearly equal-energy double-pulse sequences are generated allowing the temporal pulse delay Δt between the cross-polarized individual fs-laser pulses to be varied from -40 ps to +40 ps with a resolution of ~0.2 ps. The surface morphologies of the irradiated surface areas are characterized by means of scanning electron and scanning force microscopy. Particularly for dielectrics in the sub-ps delay range striking differences in the orientation and spatial characteristics of the LIPSS can be observed. For fused silica, a significant decrease of the LIPSS spatial periods from ~790 nm towards ~550 nm is demonstrated for delay changes of less than ~2 ps. In contrast, for silicon under similar irradiation conditions, the LIPSS periods remain constant (~760 nm) for delays up to 40 ps. The results prove the impact of laser-induced electrons in the conduction band of the solid and associated transient changes of the optical properties on fs-LIPSS formation. PY - 2013 DO - https://doi.org/10.1007/s00339-012-7184-z SN - 0947-8396 VL - 110 IS - 3 SP - 553 EP - 557 PB - Springer CY - Berlin AN - OPUS4-27787 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -