TY - CONF A1 - Bonse, Jörn T1 - Femtosecond laser-induced periodic surface structures T2 - HiLASE Center, Institute of Physics, Academy of Science of the Czech Republic CY - Dolni Brezany, Czech Republic DA - 2014-09-19 PY - 2014 AN - OPUS4-32958 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CHAP A1 - Höhm, S. A1 - Rohloff, M. A1 - Krüger, Jörg A1 - Bonse, Jörn A1 - Rosenfeld, A. ED - Sakabe, S. ED - Lienau, C. ED - Grunwald, R. T1 - Formation of laser-induced periodic surface structures (LIPSS) on dielectrics and semiconductors upon double-femtosecond laser pulse irradiation sequences N2 - The formation of laser-induced periodic surface structures (LIPSS) on different materials (silicon, fused silica, quartz) with linearly polarized fs-laser irradiation is studied experimentally. In dielectrics, the importance of transient excitation stages in the LIPSS formation is demonstrated by using (multiple) cross-polarized double-fs-laser-pulse irradiation sequences. A characteristic decrease of the spatial LIPSS periods is observed for double-pulse delays of less than 2 ps along with a characteristic 90°-rotation of the LIPSS orientation. PY - 2015 SN - 978-3-319-12216-8 SN - 978-3-319-12217-5 DO - https://doi.org/10.1007/978-3-319-12217-5_5 SN - 2192-1970 N1 - Serientitel: Nano-Optics and Nanophotonics – Series title: Nano-Optics and Nanophotonics SP - Chapter 5, 85 EP - 99 PB - Springer AN - OPUS4-32541 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Bonse, Jörn T1 - Femtosecondd laser-induced periodic surface structures on titanium and titanium alloys for tribological applications T2 - European Materials Research Society (EMRS) Spring Meeting 2015, Symposium CC "Laser and plasma processing for advanced applications in material science" CY - Lille, France DA - 2015-05-11 PY - 2015 AN - OPUS4-32766 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Bonse, Jörn T1 - Tribological performance of femtosecond LIPSS on metals T2 - 4th International workshop on laser-induced periodic surface structures CY - Dolni Brezany, Czech Republic DA - 2014-11-11 PY - 2014 AN - OPUS4-32119 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Bonse, Jörn T1 - Laser-induced periodic surface structures (ripples): current state of art T2 - 16th International Symposium on Laser Precision Microfabrication LPM 2015 CY - Kitakyushu, Fukuoka, Japan DA - 2015-05-26 PY - 2015 AN - OPUS4-32596 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Bonse, Jörn T1 - Tribological performance of femtosecond laser-induced periodic surface structures on titanium T2 - 16th International Symposium on Laser Precision Microfabrication LPM 2015 CY - Kitakyushu, Fukuka, Japan DA - 2015-05-26 PY - 2015 AN - OPUS4-32598 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Höhm, S. A1 - Herzlieb, M. A1 - Rosenfeld, A. A1 - Krüger, Jörg A1 - Bonse, Jörn T1 - Femtosecond laser-induced periodic surface structures on silicon upon polarization controlled two-color double-pulse irradiation N2 - Two-color double-fs-pulse experiments were performed on silicon wafers to study the temporally distributed energy deposition in the formation of laser-induced periodic surface structures (LIPSS). A Mach-Zehnder interferometer generated parallel or cross-polarized double-pulse sequences at 400 and 800 nm wavelength, with inter-pulse delays up to a few picoseconds between the sub-ablation 50-fs-pulses. Multiple two-color double-pulse sequences were collinearly focused by a spherical mirror to the sample. The resulting LIPSS characteristics (periods, areas) were analyzed by scanning electron microscopy. A wavelength-dependent plasmonic mechanism is proposed to explain the delay-dependence of the LIPSS. These two-color experiments extend previous single-color studies and prove the importance of the ultrafast energy deposition for LIPSS formation. PY - 2015 DO - https://doi.org/10.1364/OE.23.000061 SN - 1094-4087 VL - 23 IS - 1 SP - 61 EP - 71 PB - Optical Society of America CY - Washington, DC AN - OPUS4-32405 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Höhm, S. A1 - Herzlieb, M. A1 - Rosenfeld, A. A1 - Krüger, Jörg A1 - Bonse, Jörn T1 - Laser-induced periodic surface structures on fused silica upon cross-polarized two-color double-fs-pulse irradiation N2 - The dynamics of the formation of laser-induced periodic surface structures (LIPSS) on fused silica upon irradiation with linearly polarized fs-laser pulses (50 fs pulse duration) is studied by cross-polarized two-color double-fs-pulse experiments. In order to analyze the relevance of temporally distributed energy deposition in the early stage of LIPSS formation, a Mach-Zehnder interferometer was used for generating multiple double-pulse sequences at two different wavelengths (400 and 800 nm). The inter-pulse delay between the individual cross-polarized pulses of each sequence was systematically varied in the sub-ps range and the resulting LIPSS morphologies were characterized by scanning electron microscopy. It is found that the polarization of the first laser pulse arriving to the surface determines the orientation and the periodicity of the LIPSS. These two-color experiments further confirm the importance of the ultrafast energy deposition to the silica surface for LIPSS formation, particularly by the first laser pulse of each sequence. The second laser pulse subsequently reinforces the previously seeded spatial LIPSS characteristics (period, orientation). KW - Laser-induced periodic surface structures (LIPSS) KW - Femtosecond laser ablation KW - Double-pulse experiments KW - Ultrafast optical techniques KW - Mach-Zehnder interferometer PY - 2015 DO - https://doi.org/10.1016/j.apsusc.2014.09.101 SN - 0169-4332 SN - 1873-5584 VL - 336 SP - 39 EP - 42 PB - North-Holland CY - Amsterdam AN - OPUS4-32860 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Bonse, Jörn A1 - Koter, Robert A1 - Hartelt, Manfred A1 - Spaltmann, Dirk A1 - Pentzien, Simone A1 - Höhm, S. A1 - Rosenfeld, A. A1 - Krüger, Jörg T1 - Tribological performance of femtosecond laser-induced periodic surface structures on titanium and a high toughness bearing steel N2 - Laser-induced periodic surface structures (LIPSS, ripples) were processed on steel (X30CrMoN15-1) and titanium (Ti) surfaces by irradiation in air with linear polarized femtosecond laser pulses with a pulse duration of 30 fs at 790 nm wavelength. For the processing of large LIPSS covered surface areas (5 mm × 5 mm), the laser fluence and the spatial spot overlap were optimized in a sample-scanning geometry. The laser-processed surfaces were characterized by optical microscopy (OM), white light interference microscopy (WLIM) and scanning electron microscopy (SEM). Spatial LIPSS periods between 450 and 600 nm were determined. The nanostructured surface regions were tribologically tested under reciprocal sliding conditions against a 10-mm diameter ball of hardened 100Cr6 steel. Paraffin oil and engine oil were used as lubricants for 1000 sliding cycles at 1 Hz with a normal load of 1.0 N. The corresponding wear tracks were analyzed by OM and SEM. In particular cases, the laser-generated nanostructures endured the tribological treatment. Simultaneously, a significant reduction of the friction coefficient and the wear was observed in the laser-irradiated (LIPSS-covered) areas when compared to the non-irradiated surface. The experiments reveal the potential benefit of laser surface structuring for tribological applications. KW - Laser-induced periodic surface structures (LIPSS) KW - Femtosecond laser processing KW - Tribology KW - Metals PY - 2015 DO - https://doi.org/10.1016/j.apsusc.2014.08.111 SN - 0169-4332 SN - 1873-5584 VL - 336 SP - 21 EP - 27 PB - North-Holland CY - Amsterdam AN - OPUS4-32861 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Bonse, Jörn T1 - Femtosecond time-resolved diffraction and two-color dynamics of laser-induced periodic surface structures on fused silica T2 - European Materials Research Society (EMRS) Spring Meeting 2014, Symposium J "Laser interaction with advanced materials:fundamentals and applications" CY - Lille, France DA - 2014-05-26 PY - 2014 AN - OPUS4-30917 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Bonse, Jörn T1 - Tribological performance of femtosecond laser-induced periodic surface structures on metals T2 - European Materials Research Society (EMRS) Spring Meeting 2014, Symposium J "Laser interaction with advanced materials:fundamentals and applications" CY - Lille, France DA - 2014-05-26 PY - 2014 AN - OPUS4-30918 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Höhm, S. A1 - Herzlieb, M. A1 - Rosenfeld, A. A1 - Krüger, Jörg A1 - Bonse, Jörn T1 - Formation of laser-induced periodic surface structures on fused silica upon two-color double-pulse irradiation N2 - The formation of laser-induced periodic surface structures (LIPSS) upon irradiation of fused silica with multiple irradiation sequences consisting of laser pulse pairs (50 fs single-pulse duration) of two different wavelengths (400 and 800 nm) is studied experimentally. Parallel polarized double-pulse sequences with a variable delay Δt between -10 and +10 ps and between the individual fs-laser pulses were used to investigate the LIPSS periods versus Δt. These two-color experiments reveal the importance of the ultrafast energy deposition to the silica surface by the first laser pulse for LIPSS formation. The second laser pulse subsequently reinforces the previously seeded spatial LIPSS frequencies. PY - 2013 DO - https://doi.org/10.1063/1.4850528 SN - 0003-6951 SN - 1077-3118 VL - 103 IS - 25 SP - 254101-1 EP - 254101-4 PB - American Institute of Physics CY - Melville, NY AN - OPUS4-29812 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Bonse, Jörn A1 - Koter, Robert A1 - Hartelt, Manfred A1 - Spaltmann, Dirk A1 - Pentzien, Simone A1 - Höhm, S. A1 - Rosenfeld, A. A1 - Krüger, Jörg T1 - Femtosecond laser-induced periodic surface structures on steel and titanium alloy for tribological applications N2 - Laser-induced periodic surface structures (LIPSS, ripples) were generated on stainless steel (100Cr6) and titanium alloy (Ti6Al4V) surfaces upon irradiation with multiple femtosecond laser pulses (pulse duration 30 fs, central wavelength 790 nm). The experimental conditions (laser fluence, spatial spot overlap) were optimized in a sample-scanning geometry for the processing of large surface areas (5 × 5 mm²) covered homogeneously by the nanostructures. The irradiated surface regions were subjected to white light interference microscopy and scanning electron microscopy revealing spatial periods around 600 nm. The tribological performance of the nanostructured surface was characterized by reciprocal sliding against a ball of hardened steel in paraffin oil and in commercial engine oil as lubricants, followed by subsequent inspection of the wear tracks. For specific conditions, on the titanium alloy a significant reduction of the friction coefficient by a factor of more than two was observed on the laser-irradiated (LIPSS-covered) surface when compared to the non-irradiated one, indicating the potential benefit of laser surface structuring for tribological applications. PY - 2014 DO - https://doi.org/10.1007/s00339-014-8229-2 SN - 0947-8396 VL - 117 IS - 1 SP - 103 EP - 110 PB - Springer CY - Berlin AN - OPUS4-31450 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Derrien, Thibault A1 - Krüger, Jörg A1 - Itina, T.E. A1 - Höhm, S. A1 - Rosenfeld, A. A1 - Bonse, Jörn T1 - Rippled area formed by surface plasmon polaritons upon femtosecond laser double-pulse irradiation of silicon: the role of carrier generation and relaxation processes N2 - The formation of laser-induced periodic surface structures (LIPSS, ripples) upon irradiation of silicon with multiple irradiation sequences consisting of femtosecond laser pulse pairs (pulse duration 150 fs, central wavelength 800 nm) is studied numerically using a rate equation system along with a two-temperature model accounting for one- and two-photon absorption and subsequent carrier diffusion and Auger recombination processes. The temporal delay between the individual equal-energy fs-laser pulses was varied between 0 and ~4 ps for quantification of the transient carrier densities in the conduction band of the laser-excited silicon. The results of the numerical analysis reveal the importance of carrier generation and relaxation processes in fs-LIPSS formation on silicon and quantitatively explain the two time constants of the delay-dependent decrease of the low spatial frequency LIPSS (LSFL) area observed experimentally. The role of carrier generation, diffusion and recombination is quantified individually. PY - 2014 DO - https://doi.org/10.1007/s00339-013-8205-2 SN - 0947-8396 VL - 117 IS - 1 SP - 77 EP - 81 PB - Springer CY - Berlin AN - OPUS4-31451 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Haro-Poniatowski, E. A1 - Acosta-Zepeda, C. A1 - Mecalco, G. A1 - Hernández-Pozos, J.L. A1 - Batina, Nikola A1 - Morales-Reyes, I. A1 - Bonse, Jörn T1 - Diffraction-assisted micropatterning of silicon surfaces by ns-laser irradiation N2 - Single-pulse (532 nm, 8 ns) micropatterning of silicon with nanometric surface modulation is demonstrated by irradiating through a diffracting pinhole. The irradiation results obtained at fluences above the melting threshold are characterized by scanning electron and scanning force microscopy and reveal a good agreement with Fresnel diffraction theory. The physical mechanism is identified and discussed on basis of both thermocapillary and chemicapillary induced material transport during the molten state of the surface. PY - 2014 UR - http://scitation.aip.org/content/aip/journal/jap/115/22/10.1063/1.4882660 DO - https://doi.org/10.1063/1.4882660 SN - 0021-8979 SN - 1089-7550 VL - 115 IS - 22 SP - Article 224309, 1 EP - 6 PB - American Institute of Physics CY - Melville, NY AN - OPUS4-30862 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Bonse, Jörn T1 - Structural phenomena in multicomponent silicate glasses after femtosecond laser pulse irradiation T2 - European Materials Research Society (EMRS) Spring Meeting 2014, Symposium J "Laser interaction with advanced materials: fundamentals and applications" CY - Lille, France DA - 2014-05-26 PY - 2014 AN - OPUS4-30915 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Bonse, Jörn T1 - Plasmonic origin of near-wavelength laser-induced periodic surface structures on silicon: double-pulse experiments and theory T2 - European Materials Research Society (EMRS) Spring Meeting 2014, Symposium J "Laser interaction with advanced materials:fundamentals and applications" CY - Lille, France DA - 2014-05-26 PY - 2014 AN - OPUS4-30916 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Derrien, Thibault A1 - Koter, Robert A1 - Krüger, Jörg A1 - Höhm, S. A1 - Rosenfeld, A. A1 - Bonse, Jörn T1 - Plasmonic formation mechanism of periodic 100-nm-structures upon femtosecond laser irradiation of silicon in water N2 - The formation of laser-induced periodic surface structures (LIPSS) upon irradiation of silicon by multiple (N = 100) linearly polarized Ti:sapphire femtosecond laser pulses (duration τ = 30 fs, center wavelength λ0 ~ 790 nm) is studied experimentally in air and water environment. The LIPSS surface morphologies are characterized by scanning electron microscopy and their spatial periods are quantified by two-dimensional Fourier analyses. It is demonstrated that the irradiation environment significantly influences the periodicity of the LIPSS. In air, so-called low-spatial frequency LIPSS (LSFL) were found with periods somewhat smaller than the laser wavelength (ΛLSFL ~ 0.7 × λ0) and an orientation perpendicular to the laser polarization. In contrast, for laser processing in water a reduced ablation threshold and LIPSS with approximately five times smaller periods ΛLIPSS ~ 0.15 × λ0 were observed in the same direction as in air. The results are discussed within the frame of recent LIPSS theories and complemented by a thin film based surface plasmon polariton model, which successfully describes the tremendously reduced LIPSS periods in water. PY - 2014 DO - https://doi.org/10.1063/1.4887808 SN - 0021-8979 SN - 1089-7550 VL - 116 IS - 7 SP - 074902-1 EP - 074902-8 PB - American Institute of Physics CY - Melville, NY AN - OPUS4-31209 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Grehn, M. A1 - Seuthe, T. A1 - Höfner, M. A1 - Griga, N. A1 - Theiss, C. A1 - Mermillod-Blondin, A. A1 - Eberstein, Markus A1 - Eichler, H. A1 - Bonse, Jörn T1 - Femtosecond-laser induced ablation of silicate glasses and the intrinsic dissociation energy N2 - The relation between ablation threshold fluence upon femtosecond laser pulse irradiation and the average dissociation energy density of silicate based multicomponent glass is studied. A simple model based on multiphoton absorption quantifies the absorbed energy density at the ablation threshold fluence. This energy density is compared to a calculated energy density which is necessary to decompose the glass compound into its atomic constituents. The results confirm that this energy density is a crucial intrinsic material parameter for the description of the femtosecond laser ablation threshold fluence of dielectrics. PY - 2014 DO - https://doi.org/10.1364/OME.4.000689 SN - 2159-3930 VL - 4 IS - 4 SP - 689 EP - 700 PB - OSA CY - Washington, DC AN - OPUS4-30475 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Bonse, Jörn T1 - Mimicking lizard-like surface structures and their fluid transport upon ultrashort laser pulse irradiation of steel N2 - The wetting behavior of material surfaces can be controlled by surface structures. We functionalized case-hardened alloyed carbon steel to modify the wetting behavior using ultrashort laser pulses (fs- to ps-range). The laser processing was performed by scanning the laser beam across the surface of initially polished flat sample material. An experimental study of the laser processing parameters (peak fluence, scan velocity, line overlap) rendered an assignment of different regimes associated with characteristic surface morphologies (laser-induced periodic surface structures, grooves, micro cones, etc.) possible. Analyzing the surface using optical as well as scanning electron microscopy allowed the identification of morphologies providing the optimum similarity to the natural skin of non-moisture havesting lizards. For mimicking skin structures of moisture-harvesting lizards, additionally a two-step laser processing strategy was established for realizing hierarchical microstructures. In this approach, micrometer-scaled capillaries (step 1) were superimposed by a laser-generated regular array of small dimples (step 2). Optical focus variation imaging measurements finally revealed the three dimensional topography of the laser processed surfaces derived from lizard skin structures. The functionality of these surfaces was analyzed in view of wetting and directional fluid transport properties. The results suggest possible applications of the laser-structured surfaces. T2 - European Materials Research Society (EMRS) Spring Meeting 2017, Symposium K “Bioinspired and biointegrated materials as new frontiers nanomaterials VII” CY - Strasbourg, France DA - 22.05.2017 KW - Lizards KW - Laser processing KW - Steel KW - Fluid transport KW - Wetting PY - 2017 AN - OPUS4-40421 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Bonse, Jörn A1 - Kirner, Sabrina A1 - Koter, Robert A1 - Pentzien, Simone A1 - Spaltmann, Dirk A1 - Krüger, Jörg T1 - Femtosecond laser-induced periodic surface structures on titanium nitride coatings for tribological applications N2 - Titanium nitride (TiN) was coated on different substrate materials, namely pure titanium (Ti), titanium alloy (Ti6Al4V) and steel (100Cr6), generating 2.5 μm thick TiN layers. Using femtosecond laser pulses (30 fs, 790 nm, 1 kHz pulse repetition rate), large surface areas (5 mm × 5 mm) of laser-induced periodic surface structures (LIPSS) with sub-wavelength periods ranging between 470 nm and 600 nm were generated and characterized by optical microscopy (OM), white light interference microscopy (WLIM) and scanning electron microscopy (SEM). In tribological tests, coefficients of friction (COF) of the nanostructured surfaces were determined under reciprocating sliding conditions (1 Hz, 1.0 N normal load) against a 10-mm diameter ball of hardened 100Cr6 steel during 1000 cycles using two different lubricants, namely paraffin oil and engine oil. It turned out that the substrate material, the laser fluence and the lubricant are crucial for the tribological performance. However, friction and wear could not be significantly reduced by LIPSS on TiN layers in comparison to unstructured TiN surfaces. Finally, the resulting wear tracks on the nanostructured surfaces were investigated with respect to their morphology (OM, SEM), depth (WLIM) and chemical composition by energy dispersive X-ray spectroscopy (EDX) and, on one hand, compared with each other, on the other hand, with non-structured TiN surfaces. KW - Laser-induced periodic surface structures (LIPSS) KW - Femtosecond laser ablation KW - Titanium nitride films KW - Friction KW - Wear PY - 2017 UR - http://www.sciencedirect.com/science/article/pii/S0169433216322486 DO - https://doi.org/10.1016/j.apsusc.2016.10.132 SN - 0169-4332 SN - 1873-5584 VL - 418 IS - Part B SP - 572 EP - 579 PB - Elsevier B.V. CY - Amsterdam AN - OPUS4-40507 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Hermens, U. A1 - Kirner, Sabrina A1 - Emonts, C. A1 - Comanns, P. A1 - Skoulas, E. A1 - Mimidis, A. A1 - Mescheder, H. A1 - Winands, K. A1 - Krüger, Jörg A1 - Stratakis, E. A1 - Bonse, Jörn T1 - Mimicking lizard-like surface structures upon ultrashort laser pulse irradiation of inorganic materials N2 - Inorganic materials, such as steel, were functionalized by ultrashort laser pulse irradiation (fs- to ps-range) to modify the surface’s wetting behavior. The laser processing was performed by scanning the laser beam across the surface of initially polished flat sample material. A systematic experimental study of the laser processing parameters (peak fluence, scan velocity, line overlap) allowed the identification of different regimes associated with characteristic surface morphologies (laser-induced periodic surface structures, grooves, spikes, etc.). Analyses of the surface using optical as well as scanning electron microscopy revealed morphologies providing the optimum similarity to the natural skin of lizards. For mimicking skin structures of moisture-harvesting lizards towards an optimization of the surface wetting behavior, additionally a two-step laser processing strategy was established for realizing hierarchical microstructures. In this approach, micrometer-scaled capillaries (step 1) were superimposed by a laser-generated regular array of small dimples (step 2). Optical focus variation imaging measurements finally disclosed the three dimensional topography of the laser processed surfaces derived from lizard skin structures. The functionality of these surfaces was analyzed in view of wetting properties. KW - Femtosecond laser ablation KW - Laser-induced periodic surface structures KW - Lizard KW - Surface wetting KW - Fluid transport KW - Steel PY - 2017 UR - http://www.sciencedirect.com/science/article/pii/S0169433216328306 DO - https://doi.org/10.1016/j.apsusc.2016.12.112 SN - 0169-4332 SN - 1873-5584 VL - 418 IS - Part B SP - 499 EP - 507 PB - Elsevier, North-Holland CY - Amsterdam AN - OPUS4-40509 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Ringleb, F. A1 - Eylers, K. A1 - Teubner, T. A1 - Schramm, H.-P. A1 - Symietz, Christian A1 - Bonse, Jörn A1 - Andree, Stefan A1 - Heidmann, B. A1 - Schmid, M. A1 - Krüger, Jörg A1 - Boeck, T. T1 - Growth and shape of indium islands on molybdenum at micro-roughened spots created by femtosecond laser pulses N2 - Indium islands on molybdenum coated glass can be grown in ordered arrays by surface structuring using a femtosecond laser. The effect of varying the molybdenum coated glass substrate temperature and the indium deposition rate on island areal density, volume and geometry is investigated and evaluated in a physical vapor deposition (PVD) process. The joined impact of growth conditions and spacing of the femtosecond laser structured spots on the arrangement and morphology of indium islands is demonstrated. The results yield a deeper understanding of the island growth and its precise adjustment to industrial requirements, which is indispensable for a technological application of such structures at a high throughput, for instance as precursors for the preparation of Cu(In,Ga)Se2 micro concentrator solar cells. KW - Indium islands KW - Femtosecond laser patterning KW - Diffusion KW - CIGSe micro solar cells PY - 2017 UR - http://www.sciencedirect.com/science/article/pii/S0169433216325764 DO - https://doi.org/10.1016/j.apsusc.2016.11.135 SN - 0169-4332 SN - 1873-5584 VL - 418 SP - 548 EP - 553 PB - Elsevier B.V. CY - Amsterdam AN - OPUS4-40551 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Bonse, Jörn T1 - Laser-induzierte periodische Oberflächenstrukturen N2 - Der Vortrag gibt einen Überblick zu aktuellen Projekt- und Publikationsaktivitäten im BAM-Fachbereich 6.4 Technologien mit Nanowerkstoffen zum Thema “Laser-induzierte periodische Oberflächenstrukturen”. Die Herstellung solcher Mikro- und Nanostrukturen mittels ultrakurzer Laserpulse wird beschrieben, wodurch optische, chemische, mechanische oder biologische Oberflächenfunktionalsierungen vorgenommen werden können. Beispiele aus den Bereichen der Farbwirkung, der Benetzbarkeit mit Flüssigkeiten und der Reibungs- und Verschleissminderung werden erläutert. T2 - IFSW-Kolloquium CY - Universität Stuttgart, Stuttgart, Germany DA - 15.02.2017 KW - Femtosekundenlaser KW - Laser-Materialbearbeitung KW - Oberflächenfunktionalisierung KW - Nanostrukturen PY - 2017 AN - OPUS4-39215 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Bonse, Jörn T1 - Applications of laser-induced periodic surface structures (LIPSS) N2 - Laser-induced periodic surface structures (LIPSS, ripples) are a universal phenomenon that can be observed on almost any material after the irradiation by linearly polarized laser beams, particularly when using ultrashort laser pulses with durations in the picosecond to femtosecond range. During the past few years significantly increasing research activities have been reported in the field of LIPSS, since their generation in a single-step process provides a simple way of nanostructuring and surface functionalization towards the control of optical, mechanical or chemical properties. In this contribution current applications of LIPSS are reviewed, including the colorization of technical surfaces, the control of surface wetting, the mimicry of the natural texture of animal integuments, the tailoring of surface colonization by bacterial biofilms, and the improvement of the tribological performance of nanostructured metal surfaces. T2 - SPIE Photonics West Conference, Symposium "Laser-Based Micro- and Nanoprocessing XI" CY - San Francisco, USA DA - 28.01.2017 KW - Laser-induced periodic surface structures KW - Surface functionalization KW - Femtosecond laser PY - 2017 AN - OPUS4-39216 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Bonse, Jörn A1 - Kirner, Sabrina V. A1 - Höhm, S. A1 - Epperlein, Nadja A1 - Spaltmann, Dirk A1 - Rosenfeld, A. A1 - Krüger, Jörg T1 - Applications of laser-induced periodic surface structures (LIPSS) N2 - Laser-induced periodic surface structures (LIPSS, ripples) are a universal phenomenon that can be observed on almost any material after the irradiation by linearly polarized laser beams, particularly when using ultrashort laser pulses with durations in the picosecond to femtosecond range. During the past few years significantly increasing research activities have been reported in the field of LIPSS, since their generation in a single-step process provides a simple way of nanostructuring and surface functionalization towards the control of optical, mechanical or chemical properties. In this contribution current applications of LIPSS are reviewed, including the colorization of technical surfaces, the control of surface wetting, the tailoring of surface colonization by bacterial biofilms, and the improvement of the tribological performance of nanostructured metal surfaces. T2 - SPIE Photonics West Conference, Laser-based Micro- and Nanoprocessing XI CY - San Francisco, USA DA - 27.01.2017 KW - Laser-induced periodic surface structures (LIPSS) KW - Laser processing KW - Surface functionalization KW - Application PY - 2017 SN - 978-1-5106-0625-8 SN - 978-1-5106-0626-5 DO - https://doi.org/10.1117/12.2250919 SN - 0277-786X SN - 1996-756X VL - 10092 SP - Article UNSP 100920N, 100920N-1 EP - 100920N-9 PB - SPIE CY - Bellingham, USA AN - OPUS4-39305 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Höhm, S. A1 - Rosenfeld, A. A1 - Krüger, Jörg A1 - Bonse, Jörn T1 - Laser-induced periodic surface structures on zinc oxide crystals upon two-colour femtosecond double-pulse irradiation N2 - In order to study the temporally distributed energy deposition in the formation of laser-induced periodic surface structures (LIPSS) on single-crystalline zinc oxide (ZnO), two-colour double-fs-pulse experiments were performed. Parallel or cross-polarised double-pulse sequences at 400 and 800 nm wavelength were generated by a Mach–Zehnder interferometer, exhibiting inter-pulse delays up to a few picoseconds between the sub-ablation 50-fs-pulses. Twenty two-colour double-pulse sequences were collinearly focused by a spherical mirror to the sample surface. The resulting LIPSS periods and areas were analysed by scanning electron microscopy. The delay-dependence of these LIPSS characteristics shows a dissimilar behaviour when compared to the semiconductor silicon, the dielectric fused silica, or the metal titanium. A wavelength-dependent plasmonic mechanism is proposed to explain the delay-dependence of the LIPSS on ZnO when considering multi-photon excitation processes. Our results support the involvement of nonlinear processes for temporally overlapping pulses. These experiments extend previous two-colour studies on the indirect semiconductor silicon towards the direct wide band-gap semiconductor ZnO and further manifest the relevance of the ultrafast energy deposition for LIPSS formation. KW - Laser-induced periodic surface structures, LIPSS KW - Laser ablation KW - Surface plasmon polariton PY - 2017 DO - https://doi.org/10.1088/1402-4896/aa5578 SN - 1402-4896 SN - 0031-8949 VL - 92 IS - 3 SP - Article 034003, 1 EP - 7 PB - IOP CY - Bristol, UK AN - OPUS4-39082 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Bonse, Jörn A1 - Höhm, S. A1 - Kirner, Sabrina A1 - Rosenfeld, A. A1 - Krüger, Jörg T1 - Laser-induced periodic surface structures (LIPSS) - A scientific evergreen N2 - The current state in the field of laser-induced periodic surface structures (LIPSS, ripples) is reviewed. Their formation mechanisms are analyzed in ultrafast experiments (time-resolved diffraction and polarization controlled double-pulse experiments) and technological applications are demonstrated. T2 - Conference on Lasers and Electro-Optics (CLEO) - Science and Innovations 2016 CY - San Jose, CA, USA DA - 05.06.2016 KW - Laser materials processing KW - Optics at surfaces KW - Ultrafast phenomena KW - Laser-induced periodic surface strcutures (LIPSS) KW - Femtosecond laser ablation PY - 2016 SN - 978-1-943580-11-8 DO - https://doi.org/10.1364/CLEO_SI.2016.STh1Q.3 SP - STh1Q.3, 1 EP - 2 PB - Optical Society of America AN - OPUS4-37072 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Derrien, T. J.-Y. A1 - Krüger, Jörg A1 - Bonse, Jörn T1 - Properties of surface plasmon polaritons on lossy materials: lifetimes, periods and excitation conditions N2 - The possibility to excite surface plasmon polaritons (SPPs) at the interface between two media depends on the optical properties of both media and geometrical aspects. Specific conditions allowing the coupling of light with a plasmon-active interface must be satisfied. Plasmonic effects are well described in noble metals where the imaginary part of the dielectric permittivity is often neglected ('perfect medium approximation (PMA)'). However, some systems exist for which such approximation cannot be applied, hence requiring a refinement of the common SPP theory. In this context, several properties of SPPs such as excitation conditions, period of the electromagnetic field modulation and SPP lifetime then may strongly deviate from that of the PMA. In this paper, calculations taking into account the imaginary part of the dielectric permittivities are presented. The model identifies analytical terms which should not be neglected in the mathematical description of SPPs on lossy materials. These calculations are applied to numerous material combinations resulting in a prediction of the corresponding SPP features. A list of plasmon-active interfaces is provided along with a quantification of the above mentioned SPP properties in the regime where the PMA is not applicable. KW - plasmon lifetime KW - surface plasmon polaritons KW - lossy materials PY - 2016 DO - https://doi.org/10.1088/2040-8978/18/11/115007 SN - 2040-8986 (online) / 2040-8978 (print) VL - 18 IS - 11 SP - 115007 PB - IOP Publishing Ltd AN - OPUS4-37905 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Bonse, Jörn T1 - Scattering on scattering N2 - Ultrafast experiments can reveal the spatiotemporal dynamics of nanostructure formation via scattering in background-free optical dark-field microscopy. KW - Ultrafast microscopy KW - Scattering KW - Darkfield microscopy KW - Laser ablation PY - 2017 UR - https://nbn-resolving.org/urn:nbn:de:kobv:b43-411596 DO - https://doi.org/10.1038/lsa.2017.88 SN - 2047-7538 VL - 6 SP - e17088, 1 EP - 2 PB - Springer Nature AN - OPUS4-41159 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Bonse, Jörn T1 - Extended Drude-Sipe theory of femtosecond laser-induced periodic surface structures on ZnO T2 - Workshop "ZnO and TiO2 nanostructures" CY - Berlin, Germany DA - 2009-07-09 PY - 2009 AN - OPUS4-19605 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Bonse, Jörn T1 - Transient changes of the optical properties of solids during fs-laser pulse irradiation and its implications for the formation of laser-induced periodic surface structures T2 - Forschungsseminar ULTRA des Fachbereichs Naturwissenschaften der Universität Kassel CY - Kassel, Germany DA - 2009-06-22 PY - 2009 AN - OPUS4-19609 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Bonse, Jörn T1 - Transient respnse of laser-irradiated solids studied with femtosecond short-wavelength free-electron-lasers T2 - Laser Damage Symposium XLI: Annual Symposium on Optical Materials for High Power Lasers CY - Boulder, CO, USA DA - 2009-09-21 PY - 2009 AN - OPUS4-19629 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Sokolowski-Tinten, K. A1 - Barty, A. A1 - Boutet, S. A1 - Shymanovich, U. A1 - Bogan, M. A1 - Marchesini, S. A1 - Hau-Riege, S. A1 - Stojanovic, N. A1 - Bonse, Jörn A1 - Tobey, R. A1 - Ehrke, H. A1 - Cavalleri, A. A1 - Duesterer, S. A1 - Frank, M. A1 - Bajt, S. A1 - Schulz, J. A1 - Seibert, M. A1 - Hajdu, J. A1 - Treusch, R. A1 - Chapman, H. T1 - Short-pulse laser induced transient structure formation and ablation studied with time-resolved coherent XUV-scattering N2 - XUV- and X-ray free-electron-lasers (FEL) combine short wavelength, ultrashort pulse duration, spatial coherence and high intensity. This unique combination of properties opens up new possibilities to study the dynamics of non-reversible phenomena with ultrafast temporal and nano- to atomic-scale spatial resolution. In this contribution we wish to present results of time-resolved experiments performed at the XUV-FEL FLASH (HASYLAB/Hamburg) aimed to investigate the nano-scale structural dynamics of laser-irradiated materials. Thin films and fabricated nano-structures, deposited on Si3N4-membranes, have been excited with ultrashort optical laser pulses. The dynamics of the non-reversible structural evolution of the irradiated samples during laser-induced melting and ablation has been studied in an optical pump - XUV-probe configuration by means of single-shot coherent scattering techniques (i.e. diffraction imaging [1]). In a first set of experiments we investigated the formation of laser induced periodic surface structures (LIPSS) on the surface of thin Si-films (thickness 100 nm). In a simplified view LIPPS are generated as a result of interference between the incident laser pulse and surface scattered waves which leads to a periodically modulated energy deposition. Time-resolved scattering using femtosecond XUV-pulses (with a wavelength of 13.5 nm and 7 nm) allowed us to directly follow LIPSS evolution on an ultrafast time-scale and with better than 40 nm spatial resolution. The observed scattering patterns show almost quantitative agreement with theoretical predictions [2] and reveal that the LIPSS start to form already during the 12 ps pump pulse. In the second set of measurements we studied picosecond and femtosecond laser induced ablation and disintegration of fabricated nano-structures. Correlations of coherent diffraction patterns measured at various time delays to the pattern of the undisturbed object show that order in the structure is progressively lost starting from short length scales. This structural rearrangement progresses at close to the speed of sound in the material. Under certain circumstances (e.g. adequate sampling) it became also possible to reconstruct real-space images of the object as it evolves over time [3]. The possibility of femtosecond single-shot imaging of ultrafast dynamic processes with nanoscale resolution provides yet more details of the physical processes involved. [1] H. N. Chapman et al. Nature Phys. 2, 839 (2006). [2] J. F. Young et al., Phys. Rev. B 27, 1155 (1983). [3] A. Barty et al. Nature Phot. 2, 415 (2008). T2 - Fall meeting of the materials research society 2009 CY - Boston, MA, USA DA - 2009-11-30 KW - Femtosecond laser ablation KW - Laser-induced periodic surface structures KW - Time-resolved coherent XUV scattering KW - Semiconductor KW - Silicon PY - 2010 DO - https://doi.org/10.1557/PROC-1230-MM05-03 N1 - Serientitel: Materials Research Society symposium proceedings – Series title: Materials Research Society symposium proceedings VL - 1230E IS - Paper 1230-MM05-03 SP - 1 EP - 6 AN - OPUS4-21438 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Bonse, Jörn T1 - Short-pulse laser induced melting and ablation studied with time-resolved coherent XUV scattering T2 - Laser Damage Symposium XLII: Annual Symposium on Optical Materials for High Power Lasers CY - Boulder, CO, USA DA - 2010-09-26 PY - 2010 AN - OPUS4-21686 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Bonse, Jörn A1 - Krüger, Jörg T1 - Pulse number dependence of laser-induced periodic surface structures for femtosecond laser irradiation of silicon N2 - The formation of nearly wavelength-sized laser-induced periodic surface structures (LIPSS) on single-crystalline silicon upon irradiation with single (N = 1) and multiple (N ≤ 1000) linearly polarized femtosecond (fs) laser pulses (pulse duration τ = 130 fs, central wavelength λ = 800 nm) in air is studied experimentally. Scanning electron microscopy (SEM) and optical microscopy are used for imaging of the ablated surface morphologies, both revealing LIPSS with periodicities close to the laser wavelength and an orientation always perpendicular to the polarization of the fs-laser beam. It is experimentally demonstrated that these LIPSS can be formed in silicon upon irradiation by single fs-laser pulses—a result that is additionally supported by a recent theoretical model. Two-dimensional Fourier transforms of the SEM images allow the detailed analysis of the distribution of the spatial frequencies of the LIPSS and indicate, at a fixed peak fluence, a monotonous decrease in their mean spatial period between ~770 nm (N = 1) and 560 nm (N = 1000). The characteristic decrease in the LIPSS period is caused by a feedback-mechanism acting upon excitation of surface plasmon polaritons at the rough silicon surface which is developing under the action of multiple pulses into a periodically corrugated surface. KW - Elemental semiconductors KW - Fourier transforms KW - Laser beam effects KW - Optical microscopy KW - Polarisation KW - Polaritons KW - Scanning electron microscopy KW - Silicon KW - Surface morphology KW - Surface plasmons PY - 2010 UR - http://jap.aip.org/resource/1/japiau/v108/i3/p034903_s1 DO - https://doi.org/10.1063/1.3456501 SN - 0021-8979 SN - 1089-7550 VL - 108 IS - 3 SP - 034903-1 - 034903-5 PB - American Institute of Physics CY - Melville, NY AN - OPUS4-21804 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Bonse, Jörn T1 - Bearbeiten und Reinigen mit Laserstrahlungen T2 - Eingeladener Vortrag in durch das Max-Born-Institut organisiertem Workshop CY - Königs Wusterhausen, Germany DA - 2009-10-05 PY - 2009 AN - OPUS4-20044 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Bonse, Jörn T1 - High Spped Laser Scribe Systems fpr Large Area Thin Film Solar Cells Manufacturing T2 - 24th European Photovoltaic Solar Energy Conference CY - Hamburg, Germany DA - 2009-09-21 PY - 2009 AN - OPUS4-20047 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Bonse, Jörn T1 - Short-pulse laser induced transient structure formation and ablation studied with time-resolved coherent XUV-scattering T2 - 2009 Fall Meeting of the Materials Resarch Society CY - Boston, MA, USA DA - 2009-11-30 PY - 2009 AN - OPUS4-20048 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Bonse, Jörn A1 - Rosenfeld, A. A1 - Grebing, C. A1 - Steinmeyer, G. A1 - Mailman, N. A1 - Botton, G.A. A1 - Haugen, H.K. T1 - Ablation and structural changes induced in InP surfaces by single 10 fs laser pulses in air N2 - Ablation of single-crystalline (100) indium phosphide wafer surfaces with single 10 fs Ti:sapphire laser pulses in air has been studied by means of complementary cross-sectional transmission electron microscopy, scanning force microscopy, and optical microscopy. A local protrusion of ~70 nm height is generated within the ablation craters for fluences exceeding 0.78 J/cm². This morphological feature has been studied in detail, revealing the material structure of the laser-affected zone and its spatial extent. The resolidified layer (60-200 nm thick) consists of polycrystalline grains (5-15 nm diameter) and is covered by an ~10 nm thick amorphous top layer. Interestingly, the sharp boundary of the solidified layer to the unaffected crystal underneath exhibits a Gaussian-like shape and does not follow the shape of the surface topography. Evidence is presented that the central crater protrusion is formed by near-surface optical breakdown, and that the absorption in the material transiently changes during the femtosecond-laser pulse. KW - Femtosecond laser ablation KW - Optical breakdown KW - Transmission electron microscopy KW - Semiconductor KW - Indium phosphide KW - Scanning force microscopy KW - Time-resolved measurements PY - 2009 UR - http://link.aip.org/link/?JAPIAU/106/074907/1 DO - https://doi.org/10.1063/1.3236630 SN - 0021-8979 SN - 1089-7550 VL - 106 SP - 074907-1 - 074907-7 PB - American Institute of Physics CY - Melville, NY AN - OPUS4-20083 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Bonse, Jörn T1 - Femtosecond laser-induced ablation of dielectrics T2 - Topical Meeting "Emerging Trends and Novel Materials in Photonics" of the International Comission for Optics CY - Delphi, Greece DA - 2009-10-07 PY - 2009 AN - OPUS4-20087 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Bonse, Jörn T1 - Damage mechanisms in thin film and bulk polymers upon NIR femtosecond pulse laser irradiation: sub-threshold processes and their implications for laser safety applications T2 - The Internation High-power Laser Ablation Conference 2010 CY - Santa Fe, NM, USA DA - 2010-04-18 PY - 2010 AN - OPUS4-20276 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Bonse, Jörn T1 - Femtosecond pulse laser induced modification of sillicon: dynamical, structural and morphological aspects T2 - Seminar zur Optik und Photonik WS 09/10, TU Berlin CY - Berlin, Germany DA - 2009-11-27 PY - 2009 AN - OPUS4-20303 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Bonse, Jörn A1 - Krüger, Jörg T1 - Probing the heat affected zone by chemical modifications in femtosecond pulse laser ablation of titanium nitride films in air N2 - A new approach is presented to quantify the so-called "heat affected zone" (HAZ) during femtosecond laser pulse processing. Ablation of titanium nitride (TiN) thin films (~3 μm thickness) by multiple femtosecond laser pulses (τ=130 fs, λ=800 nm) in air environment was studied by means of two different surface analytical methods both being sensitive to chemical alterations at the surface. Scanning Auger electron microscopy was applied for a visualization of the spatial distribution of specific elements (Ti, O) within the laser-modified areas. The chemical state of the irradiated surface was revealed by complementary x-ray photoelectron spectroscopy. Both methods were used for a depth-profiling chemical analysis (tracking the elements Ti, N, O, and C) using an Ar-ion beam for surface sputtering. In a narrow laser fluence range slightly below the ablation threshold of TiN significant superficial oxidation can be observed leading to the formation of substoichiometric TiO2-x. At fluences above the ablation threshold, an increased titanium concentration is observed within the entire ablation craters. Following upon sputter removal the elemental distribution into the depth of the nonablated material, the results allow an estimation of the heat-affected zone for femtosecond laser ablation in air environment. According to our analyses, the HAZ extends up to a few hundreds of nanometers into the nonablated material. KW - Femtosecond laser ablation KW - Heat affected zone KW - Titanium nitride KW - Scanning Auger electron microscopy KW - X-ray KW - Photoelektron spectroscopy PY - 2010 UR - http://link.aip.org/link/?JAP/107/054902 DO - https://doi.org/10.1063/1.3311552 SN - 0021-8979 SN - 1089-7550 VL - 107 IS - 5 SP - 054902-1 - 054902-5 PB - American Institute of Physics CY - Melville, NY AN - OPUS4-20949 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Beke, S. A1 - Sugioka, K. A1 - Midorikawa, K. A1 - Bonse, Jörn T1 - Near-IR femtosecond and VUV nanosecond laser processing of TeO2 crystals in air N2 - Near-IR femtosecond ( τ = 150 fs, λ = 775 nm, repetition rate 1 kHz) and VUV nanosecond (τ = 20 ns, λ = 157 nm, repetition rate 1 to 5 Hz) laser pulse ablation of single-crystalline TeO2 (c-TeO2, grown by the balance controlled Czochalski growth method) surfaces was performed in air using the direct focusing technique. The multi-method characterization using optical microscopy, atomic force microscopy and scanning electron microscopy revealed the surface morphology of the ablated craters. This allowed us to characterize precisely the lateral and vertical dimensions of the laser-ablated craters for different laser pulse energies and pulse numbers at each spot. Based on the obtained information, we quantitatively determined the ablation threshold fluence for the fs laser irradiation when different pulse numbers were applied to the same spot by using two independent extrapolation techniques. We found that in case of NIR femtosecond laser pulse irradiation, the ablation threshold significantly depends on the number of laser pulses applied to the same spot indicating that incubation effects play an important role in this material. In case of VUV ns laser pulses, the ablation rate is significantly higher due to the high photon energy and the predominantly linear absorption in the material. These results are discussed on the basis of recent models of the interaction of laser pulses with dielectrics. PY - 2010 DO - https://doi.org/10.1117/12.845074 SN - 0277-786X SN - 0038-7355 SN - 0361-0748 VL - 7584 SP - 758415-1 - 758415-10 PB - Soc. CY - Redondo Beach, Calif. [u.a.] AN - OPUS4-20912 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Bonse, Jörn T1 - Transient changes of the optical properties of solids during femtosecond laser pulse irradiation and its implications for the formation of lase-induced periodic surface structures T2 - European Materials Research Society (EMRS) Spring Meeting, Symposium R "Laser processing an diagnostics for micro and nano applications" CY - Strasbourg, France DA - 2010-06-07 PY - 2010 AN - OPUS4-20993 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Puerto, D. A1 - Siegel, J. A1 - Gawelda, W. A1 - Galvan-Sosa, M. A1 - Ehrentraut, L. A1 - Bonse, Jörn A1 - Solis, J. T1 - Dynamics of plasma formation, relaxation, and topography modification induced by femtosecond laser pulses in crystalline and amorphous dielectrics N2 - We have studied plasma formation and relaxation dynamics along with the corresponding topography modifications in fused silica and sapphire induced by single femtosecond laser pulses (800 nm and 120 fs). These materials, representative of high bandgap amorphous and crystalline dielectrics, respectively, require nonlinear mechanisms to absorb the laser light. The study employed a femtosecond time-resolved microscopy technique that allows obtaining reflectivity and transmission images of the material surface at well-defined temporal delays after the arrival of the pump pulse which excites the dielectric material. The transient evolution of the free-electron plasma formed can be followed by combining the time-resolved optical data with a Drude model to estimate transient electron densities and skin depths. The temporal evolution of the optical properties is very similar in both materials within the first few hundred picoseconds, including the formation of a high reflectivity ring at about 7 ps. In contrast, at longer delays (100 ps–20 ns) the behavior of both materials differs significantly, revealing a longer lasting ablation process in sapphire. Moreover, transient images of sapphire show a concentric ring pattern surrounding the ablation crater, which is not observed in fused silica. We attribute this phenomenon to optical diffraction at a transient elevation of the ejected molten material at the crater border. On the other hand, the final topography of the ablation crater is radically different for each material. While in fused silica a relatively smooth crater with two distinct regimes is observed, sapphire shows much steeper crater walls, surrounded by a weak depression along with cracks in the material surface. These differences are explained in terms of the most relevant thermal and mechanical properties of the material. Despite these differences the maximum crater depth is comparable in both material at the highest fluences used (16J/cm2). The evolution of the crater depth as a function of fluence can be described taking into account the individual bandgap of each material. KW - Femtosecond laser ablation KW - Plasma formation KW - Time-resolved microscopy KW - Dielectrics KW - Fused silica KW - Sapphire KW - Scanning force microscopy KW - Reflectivity measurements KW - Transmission measurements KW - Drude model PY - 2010 DO - https://doi.org/10.1364/JOSAB.27.001065 SN - 0740-3224 SN - 1520-8540 VL - 27 IS - 5 SP - 1065 EP - 1076 PB - Optical Society of America CY - Washington, DC AN - OPUS4-21167 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Bonse, Jörn T1 - Short-pulse laser induced transient structure formation and ablation studied with time-resolved coherant XUV-scattering T2 - The International High Power Laser Ablation Conference CY - Santa Fe, NM, USA DA - 2010-04-18 PY - 2010 AN - OPUS4-21229 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Bonse, Jörn T1 - Femtosecond laser-inducted periodic surface structures: recent approaches to explain their subwavelength periodicties T2 - International Conference on Lasers, Applications, and Techonlogies, ICONO/LAT 2010, Symposium 2 der LAT 2010 "Laser-assisted Micro- and Nanotechnologies" CY - Kazan, Russia DA - 2010-08-23 PY - 2010 AN - OPUS4-21230 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Bonse, Jörn T1 - Nanostructuring of solid surfaces basec on laser-induced periodic surface structures (LIPSS): recent experimental and theoretical approaches T2 - Poster-Session im Rahmen des deutsch-französischen Kolloquiums "French-German Research: 50 years In The Light Of The Laser" CY - Berlin, Germany DA - 2010-11-05 PY - 2010 AN - OPUS4-22324 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -