TY - CONF A1 - Bonse, Jörn T1 - The role of scattering in the formation of laserinduced periodic surface structures (LIPSS) N2 - Laser-induced periodic surface structures (LIPSS) are a universal phenomenon that is accompanying laser materials processing. These surface nanostructures pave a simple way for surface functionalization with numerous applications in optics, fluidics, tribology, medicine, etc. This contribution reviews the current view on the role of electromagnetic scattering in the formation of LIPSS. T2 - Workshop on Theoretical and Numerical Tools for Nanophotonics (TNTN 2020) CY - Berlin, Germany DA - 12.02.2020 KW - Laser-induced periodic surface structures, LIPSS KW - Electromagnetic scattering KW - Finite-difference time-domain calculations PY - 2020 AN - OPUS4-50399 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Mermillod-Blondin, A. A1 - Mauclair, C. A1 - Rosenfeld, A. A1 - Bonse, Jörn A1 - Stoian, R. A1 - Audouard, E. T1 - Time-resolved imaging of bulk a-SiO2 upon various ultrashort excitation sequences N2 - Ultrashort pulses lasers are tools of choice for functionalizing the bulk of transparent materials. In particular, direct photoinscription of simple photonic functions have been demonstrated. Those elementary functions rely on the local refractive index change induced when focusing an ultrashort pulse in the volume of a transparent material. The range of possibilities offered by direct photoinscription is still under investigation. To help understanding, optimizing and assessing the full potential of this method, we developed a time-resolved phase contrast microscopy setup. The imaginary part (absorption) and the real part of the laser-induced complex refractive index can be visualized in the irradiated region. The setup is based on a commercially available phase contrast microscope extended into a pump-probe scheme. The originality of our approach is that the illumination is performed by using a pulsed laser source (i.e. a probe beam). Speckle-related issues are solved by employing adequate sets of diffusers. This laser-microscopy technique has a spatial resolution of 650 nm, and the impulse response is about 300 fs. The laser-induced refractive index changes can be tracked up to milliseconds after the energy deposition. The excitation beam (the pump) is focused with a microscope objective (numerical aperture of 0.45) into the bulk of an a-SiO2 sample. The pump beam can be temporally shaped with a SLM-based pulse shaping unit. This additional degree of flexibility allows for observing different interaction regimes. For instance, bulk material processing with femtosecond and picosecond duration pulses will be studied. T2 - Photonics West 2011 CY - San Francisco, CA, USA DA - 22.01.2011 PY - 2011 DO - https://doi.org/10.1117/12.876687 VL - 7925 IS - 79250R SP - 1 EP - 7 AN - OPUS4-23332 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Bonse, Jörn T1 - Time-resolved imaging of bulk a-SiO2 upon various ultrashort excitation sequences T2 - SPIE Photonics West Conference: Frontiers in Ultrafast Optics: Biomedical, Scientific and Industrial Applications XI (Conference 7925) CY - San Francisco, CA, USA DA - 2011-01-22 PY - 2011 AN - OPUS4-22095 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Eberstein, M. A1 - Geier, M. A1 - Grießmann, H. A1 - Partsch, U. A1 - Voelkel, L. A1 - Böhme, R. A1 - Pentzien, Simone A1 - Koter, Robert A1 - Mann, Guido A1 - Bonse, Jörn A1 - Krüger, Jörg T1 - Towards an industrial laser doping process for the selective emitter using phosphoric acid as dopant N2 - Different laser supported approaches have already been realized, proving the great potential of laserdoped selective emitters (LDSE). However, it is challenging to establish a low-cost process by using pulsed laser tools. So far a single-step process only leads to satisfying results utilizing cw-lasers. In this paper we have examined a two-step process to produce laser-doped selective emitters on multicrystalline textured standard silicon photovoltaic wafers (90-Ω/sq-Emitter, SiN-antireflection coating (ARC)). The precise ARC removal by near-infrared fs-laser pulses (30 fs, 800 nm), and the doping of uncoated silicon wafers by ns-laser pulses (8 ns, 532 nm) were systematically investigated. In the fs-experiment, optimum conditions for ARC removal were identified. In the nsexperiments under suitable conditions (melting regime), the phosphorous concentration underneath the wafer surface was significantly increased and the sheet resistance was reduced by nearly a factor of two. Moreover, electrical measurements on fired metallization fingers deposited on the laser processed wafers showed low contact resistances. Hence, wafer conditioning with combined fs-laser- and ns-laser-processes are expected to be a promising technology for producing selective emitters. T2 - 26th European photovoltaic solar energy conference and exhibition CY - Hamburg, Germany DA - 05.09.2011 KW - Laser processing KW - Doping KW - Selective emitter KW - Multicrystalline silicon PY - 2011 SN - 3-936338-27-2 DO - https://doi.org/10.4229/26thEUPVSEC2011-2BV.1.2 SP - 1220 EP - 1223 AN - OPUS4-24996 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Bonse, Jörn T1 - Transient changes of the optical properties of solids during femtosecond laser pulse irradiation and its implications for the formation of lase-induced periodic surface structures T2 - European Materials Research Society (EMRS) Spring Meeting, Symposium R "Laser processing an diagnostics for micro and nano applications" CY - Strasbourg, France DA - 2010-06-07 PY - 2010 AN - OPUS4-20993 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Bonse, Jörn T1 - Transient changes of the optical properties of solids during fs-laser pulse irradiation and its implications for the formation of laser-induced periodic surface structures T2 - Forschungsseminar ULTRA des Fachbereichs Naturwissenschaften der Universität Kassel CY - Kassel, Germany DA - 2009-06-22 PY - 2009 AN - OPUS4-19609 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Bonse, Jörn T1 - Transient respnse of laser-irradiated solids studied with femtosecond short-wavelength free-electron-lasers T2 - Laser Damage Symposium XLI: Annual Symposium on Optical Materials for High Power Lasers CY - Boulder, CO, USA DA - 2009-09-21 PY - 2009 AN - OPUS4-19629 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Bonse, Jörn T1 - Tribological performance of femtosecond laser-induced periodic surface structures on metals T2 - European Materials Research Society (EMRS) Spring Meeting 2014, Symposium J "Laser interaction with advanced materials:fundamentals and applications" CY - Lille, France DA - 2014-05-26 PY - 2014 AN - OPUS4-30918 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Bonse, Jörn T1 - Tribological performance of femtosecond laser-induced periodic surface structures on titanium T2 - 16th International Symposium on Laser Precision Microfabrication LPM 2015 CY - Kitakyushu, Fukuka, Japan DA - 2015-05-26 PY - 2015 AN - OPUS4-32598 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Bonse, Jörn T1 - Tribological performance of femtosecond LIPSS on metals T2 - 4th International workshop on laser-induced periodic surface structures CY - Dolni Brezany, Czech Republic DA - 2014-11-11 PY - 2014 AN - OPUS4-32119 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Bonse, Jörn T1 - Tribological performance of titanium samples oxidized by fs-laser radiation, thermal heating, or electrochemical anodization N2 - Commercial grade-1 titanium samples (Ti, 99.5% purity) were treated using three alternative methods, i.e., fs-laser processing in air, thermal heat treatment in an oven, or anodization in an electrochemical bath, all resulting in the formation of differently conditioned superficial oxide layers. The laser processing was carried out by a Ti:sapphire laser (pulse duration 30 fs, central wavelength 790 nm, pulse repetition rate 1 kHz) in a regime of generating laser-induced periodic surface structures (LIPSS). The experimental conditions (laser fluence, spatial spot overlap) were optimized in a sample-scanning geometry for the processing of several square-millimetres large surface areas covered homogeneously by these nanostructures. The thermal processing in the oven was done at two different temperatures, while the electrochemical anodization was performed at room temperature, aiming to generate different polymorphs of titanium oxide at similar oxide layer thickness. The irradiated surface regions were characterized by optical and scanning electron microscopy, and micro Raman spectroscopy. The tribological performance of the differently treated titanium surfaces was characterized in the regime of mixed friction by reciprocating sliding tests against a sphere of hardened steel in un-additivated paraffin oil and fully formulated engine oil as lubricants. The specific tribological performance of the differently treated surfaces is discussed on the basis of possible physical and chemical mechanisms. T2 - International Conference on Laser Ablation, COLA 2017 CY - Marseille, France DA - 03.09.2017 KW - Femtosecond laser KW - Oxidation KW - Laser-induced periodic surface strcutures, LIPSS KW - Friction KW - Wear PY - 2017 AN - OPUS4-42032 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Bonse, Jörn T1 - Tribological properties of femtosecond laserinduced periodic surface structures on metals N2 - Laser-induced periodic surface structures (LIPSS, ripples) were generated on steel and titanium surfaces upon irradiation with multiple linear polarized femtosecond laser pulses (pulse duration 30 fs, central wavelength 790 nm). The experimental conditions (laser fluence, spatial spot overlap) were optimized in a sample-scanning geometry for the processing of large surface areas covered homogeneously by the nanostructures. The irradiated surface regions were subjected to optical microscopy (OM), white light interference microscopy (WLIM) and scanning electron microscopy (SEM) revealing sub-wavelength spatial periods. The nanostructured surfaces were tribologically tested under reciprocal sliding conditions against a sphere of hardened 100Cr6 steel at 1 Hz using paraffin oil and engine oil as lubricants. After 1000 sliding cycles at a load of 1.0 N, the corresponding wear tracks were characterized by OM and SEM. For specific conditions the laser-generated nanostructures endured the tribological treatment. Simultaneously, a significant reduction of the friction coefficient was observed in the laser-irradiated (LIPSS-covered) areas when compared to the non-irradiated surface, indicating the potential benefit of laser surface structuring for tribological applications. T2 - SPIE Photonics West Conference, Symposium "Laser Applications in Microelectronic and Optoelectronic Manufacturing" (LAMOM) XXI CY - San Francisco, CA, USA DA - 13.02.2016 KW - Femtosecond laser ablation KW - Laser-induced periodic surface structures (LIPSS) KW - Tribology KW - Friction KW - Wear PY - 2016 AN - OPUS4-36041 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Bonse, Jörn T1 - Tribologische Eigenschaften mittels Femtosekunden-Laserstrahlung nano- und mikrostrukturierter Metalloberflächen N2 - Lasermaterialbearbeitung ist eine sich schnell entwickelnde Technologie, um eine Vielzahl von Oberflächenfunktionalitäten auf Basis optischer, mechanischer oder chemischer Eigenschaften zu realisieren. Die Verwendung ultrakurzer Laserimpulse mit Dauern im Femtosekundenbereich ermöglicht dabei neben einer herausragenden Bearbeitungs-präzision auch die selbstorganisierte Erzeugung verschiedener charakteristischer Ober-flächenstrukturen mit Größenskalen im Mikrometer- bis hinunter in den sub-100-nm-Bereich, z.B. sogenannte Ripples („Laser-Induced Periodic Surface Structures“, LIPSS), Grooves, oder Spikes. In dem Vortrag wird ein Überblick über die in den vergangenen Jahren in Zusammenarbeit mit dem BAM Fachbereich 6.3 durchgeführten tribologischen Experimente gegeben. Besonderes Augenmerk liegt dabei auf den tribologischen Eigenschaften (Reibung und Verschleiß) der unterschiedlichen Femtosekunden-Laser-generierten Oberflächen-morphologien auf gängigen Metallen (z.B. Stahl, Titan). Einflüsse durch die Veränderungen der Härte des Werkstoffs infolge Laser-induzierter Oxidation, der Dicke und Struktur der Oxidschicht, und die Wirksamkeit unterschiedlicher Schmiermittel (z.B. additiviertes Motoröl) werden diskutiert. T2 - 76. Tribologie-Kolloquium des GfT-Arbeitskreises Berlin Brandenburg CY - Berlin, Germany DA - 12.06.2018 KW - Femtosekunden-Laserablation KW - Tribologie KW - Reibung KW - Verschleiß PY - 2018 AN - OPUS4-45169 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - BOOK A1 - Stoian, R. A1 - Bonse, Jörn T1 - Ultrafast Laser Nanostructuring — The Pursuit of Extreme Scales N2 - Long seen as “a solution seeking a problem,” laser pulses are nowadays – more than 60 years after their first practical demonstration – paramount in shaping and structuring matter. Harnessing their capabilities to direct intense beams of light, the number of scientific and technological developments and daily-life applications is continuously increasing. Today, the presence of lasers is ubiquitous in all sites of scientific and technological interest, from the most advanced research laboratories to industrial factories and medical hospitals. The directionality of the laser beam determines equally a local character on lightmatter interaction and as such a local modification to a material target. Furthermore, the coherence of laser radiation enables near-field or far-field scattering and interference effects that widen significantly the capabilities of controlling and tracking laser-matter interactions in space and time. Already with the advent of lasers, powerful beams of light have been directed at solid materials for a variety of purposes, making this application as old as the laser itself. The roots of the major applications for laser structuring were developed already in the 1960s, setting the base of both theoretical and experimental studies on laser ablation, with the number of publications expanding explosively during the next decades. Within this dynamic context, laser processing of materials experienced an impressive development over the years. Laser processing means specifically the capability to structure and tailor a material on its surface or even within its volume, rendering new functions and properties that are impacting the mechanical, electrical, or optical characteristics of the material. These properties are scaledependent, generating thus over the years an equally impressive quest for spatial or temporal resolution. Therefore, the developments in laser engineering with major breakthroughs, notably in pulse duration and power, always closely accompanied the efforts in material structuring with two milestones in sight: (1) yield and (2) resolution. Every step in shrinking the laser pulse duration led to a subsequent strong-impact development in process precision – particularly when the ultrashort pulse durations surpassed the fundamental electron-phonon relaxation times. Thus, minimizing heat diffusion, the advent of pulses with duration smaller than molecular or lattice vibration times has managed to confine the spatial resolution to the optical diffraction limit and sometimes even beyond. The nanoscale was already in sight at the turn of the millennium. An important question may be raised now; is there any fundamental limit in the processing resolution, a barrier defined by the intrinsic properties of light and matter? The answer has an inherently multidisciplinary nature, following the conversion of free-propagating electromagnetic radiation into material-confined energy potentially usable to drive or transform matter, and will be the focus of the present book. Relying on the experience and expertise of the leading researchers in the field, the present book intends to explore the current efforts in achieving laser processing resolution beyond the diffraction limit, laying down a perspective towards extreme laser nanostructuring. Following the most recent advances and developments, it puts forward a concept of extreme processing scales enabled by optical pulses that are able to bypass diffraction limits and achieve structuring characteristic scales beyond 100 nm. This objective can be achieved by a comprehensive understanding on how light can change matter and how, in turn, matter can change light, allowing jointly for actively controlling light and material processes. In order to give an extended perspective on the current state-of-the-art in the field of precision laser structuring, the book is divided into three main parts. The first part of the book (Part I: Fundamental Processes) offers a perspective into the fundamentals of laser-matter interaction on extreme spatial scales, with a description of the most advanced modeling efforts in understanding energy deposition in matter, a plethora of material-relaxation pathways, as well as advanced concepts for probing and observing matter in motion. Roadmaps for energy localization will be developed, and the atomistic perspective of laser ablation visualized. Theoretical modelling enables in-depth insights on ultrafast quantum processes at the nanoscale. Laser-driven self-organization at surfaces will be dissected regarding the question of how light drives material periodic patterns down to the nanoscale, explored and transmitted to its ultimate limits of an atomic printer, and immediately complemented by the unprecedented capabilities of ultrafast in-situ observation approaches for tracking the laser-induced material response with extreme spatial and temporal resolution. In the second part of the book (Part II: Concepts of Extreme Nanostructuring), distinct concepts will be developed and explored that allow confinement of light and harnessing of a material response restricted to nano- or mesoscopic scales at surfaces or in the volume of irradiated materials. A special focus will be on optical near-field related approaches for localizing light on scales even below the optical diffraction limit and plasmonic printing. Spatial and temporal beam-shaping and tailored interference techniques are discussed in the context of ultrashort laser pulses, and insights into some extreme states of matter realized by the tight confinement of laser energy are presented. The ultimate limits of writing waveguides in the bulk of dielectrics and for manifesting 3D-nanolithography are elucidated. Plasma-based surface treatments can significantly enhance the vertical precision of surface processing through etching processes. Finally, the third part of the book (Part III: Applications) leads us to a number of resuming applications, unveiling the tremendous capabilities of surface functionalization through laser micro- and nanostructuring, assessing the 3D-writing of waveguides in the bulk of dielectrics or semiconductors for enabling new branches of integrated photonics, and summarizing related applications ranging from nanophotonics to nanofluidics and from optical sensing to biomedical applications, including the latest capabilities of refractive eye surgery. This part will analyze the applications’ compatibility in yield and reproducibility with current industrial requirements, costs, and intellectual property aspects. It expands the involved spatial scales by more than eight orders of magnitude, when extending extremely small structures featuring sizes of few tens of nanometers to larger dimensions in the meter range. Thus, from surfaces to the bulk, from subtractive to additive manufacturing approaches, from advanced theoretical frames to practical technological processes – we invite the readers here to an exciting journey into the varicolored landscape of extreme laser nanostructuring. The idea of this book project was seeded in early 2020. We were delighted about the numerous and extremely positive responses from the laser-processing community, quickly receiving commitments for more than 30 individual book chapters. About 2500 communications later, the book is published. We would like to thank all authors of this book project for their insightful and detailed chapters, reviewing and reporting on this fascinating topic of the pursuit of extreme scales in ultrafast laser nanostructuring. Moreover, we would like to acknowledge the professional help and guidance of the staff of Springer Nature. Finally, we hope you will enjoy reading this book as much as we have enjoyed putting it together. Saint Etienne, France Razvan Stoian Berlin, Germany Jörn Bonse December 2022 KW - Laser nanostructuring KW - Surface engineering KW - Nonlinear lithography KW - Self-organization KW - Laser-induced periodic surface structures, LIPSS PY - 2023 SN - 978-3-031-14752-4 SN - 978-3-031-14751-7 DO - https://doi.org/10.1007/978-3-031-14752-4 SN - 0342-4111 VL - 239 SP - 1 EP - 1245 PB - Springer Nature Switzerland AG CY - Cham ET - 1 AN - OPUS4-57294 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Bonse, Jörn T1 - Ultrafast optical probing of laser-induced formation of periodic surface nanostructures N2 - Laser-induced Periodic Surface Structures (LIPSS, ripples) are a universal phenomenon and can be generated in a contactless, single-step process on almost any type of solid upon irradiation with intense laser pulses. They represent a (quasi-)periodic modulation of the surface topography in the form of a linear grating and are typically formed in a “self-ordered” way in the focus of a coherent laser beam. Thus, they are often accompanying laser material processing applications. The structural sizes of LIPSS typically range from several micrometers down to less than 100 nanometers – far beyond the optical diffraction limit – while their orientations exhibit a clear correlation with the local polarization direction of the laser radiation. From a theoretical point of view, a controversial debate has emerged during the last decades, whether LIPSS originate from electromagnetic effects (seeded already during the laser irradiation) – or whether they emerge from matter-reorganization processes (distinctly after the laser irradiation). From a practical point of view, however, LIPSS represent a simple and robust way for the nanostructuring of solids that allows creating a wide range of different surface functionalities featuring applications in optics, tribology, medicine, energy technologies, etc. The presentation provides an overview of current theories on LIPSS and the quest to achieve ever smaller surface nanostructures. The historical development of the fundamental ideas behind LIPSS is presented, together with experimental approaches that make it possible to distinguish between the various LIPSS formation scenarios. Time-resolved experimental methods are required to investigate the dynamics of their formation. The presentation focuses on ultrafast time-resolved optical (pump-probe) techniques that can be used for localized point measurements or microscopic imaging, utilizing the reflection, diffraction, or coherent scattering of the probe radiation at the emerging LIPSS, while simultaneously capturing information about rapid melting, ablation, and solidification phenomena. However, given the sub-micrometric spatial periods of LIPSS, their analysis using optical radiation employed in far-field techniques remained a challenge. Therefore, short wavelengths of the probe beam in the UV range or even below are required to overcome the diffraction limit imposed in the optical spectral range. Fourth-generation light sources, namely short-wavelength (XUV or X-ray) short-pulse free-electron lasers (FELs), offer new and fascinating possibilities for resolving laser-induced structure formation on surfaces in the sub-micrometer to nanometer range and in time domains from picoseconds to several nanoseconds with a resolution in the sub-picosecond regime. On laser-irradiated semiconductor surfaces, this unique spatio-temporal resolution enables the detection of early signs of coherent/plasmonic electromagnetic scattering effects, followed by the excitation of hydrodynamic capillary waves – providing new insights into the above-mentioned debate. Recent experiments at the European XFEL used fs-time-resolved small-angle X-ray scattering (fs-SAXS) and even fs-time-resolved grazing incidence small-angle X-ray scattering (fs-GISAXS), combined with grazing-incidence diffraction (fs-GID), to reveal the dynamics of the formation of nanometric LIPSS on metals. T2 - CINSaT Herbstkolloquium 2025 CY - Kassel, Germany DA - 05.11.2025 KW - Laser-induced periodic surface structures (LIPSS) KW - Ultrashort laser pulses KW - Pump-probe measurements KW - Free-electron laser KW - Small angle X-ray scattering (SAXS) PY - 2025 AN - OPUS4-64633 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Bonse, Jörn T1 - Ultrakurzpulslaser induzierte Oxidschichten zur Reduktion von Reibung und Verschleiß auf Metalloberflächen N2 - Die Reduktion von Reibung und Verschleiß in technischen Systemen bietet ein großes Potenzial zur Reduktion von CO2-Emissionen. Dieser Beitrag diskutiert die Erzeugung und tribologische Charakterisierung von Ultrakurzpuls-generierten Nano- und Mikrostrukturen auf Metallen (Stahl, Titan). Besonderes Augenmerk wird dabei auf die Rolle der laserinduzierten Oxidschicht im Zusammenspiel mit verschleißreduzierenden Additiven in ölbasierten Schmiermitteln gerichtet. T2 - Workshop "Nachhaltigkeit durch Tribologische Schichten" - Europäische Forschungsgesellschaft Dünne Schichten e.V. CY - Karlsruhe, Germany DA - 17.05.2022 KW - Laser-induzierte periodische Oberflächenstrukturen KW - Reibungsreduktion KW - Verschleißreduktion KW - Oberflächenmodifikation KW - Oxidation KW - Additive PY - 2022 AN - OPUS4-54849 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Kraft, S. A1 - Böttcher, Katrin A1 - Bonse, Jörn A1 - Schille, J. A1 - Löschner, U. A1 - Krüger, Jörg T1 - Unwanted X-ray emission in ultrashort pulse laser processing: From metallic to biological materials N2 - X-rays can be generated as an unwanted side effect during ultrashort pulse laser material processing of technical work pieces and even biological samples with laser intensities above 10^13 W/cm^2. First studies demonstrate the need to address this effect in industrial as well as in medical applications. This secondary hazard should be considered in work safety and risk assessment. T2 - Lasers in Manufacturing 2023 (LiM 2023) CY - Munich, Germany DA - 26.06.2023 KW - Ultrashort pulse laser processing KW - Laser-induced X-ray emission KW - Secondary hazard PY - 2023 SP - LiM 2023 - 1 EP - LiM 2023 - 6 PB - Wissenschaftliche Gesellschaft Lasertechnik und Photonik e.V. (WLT) AN - OPUS4-58358 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Hülagü, Deniz A1 - Hirahara, Kenta A1 - Fischer, Daniel A1 - Florian, Camilo A1 - Schusterbauer, Robert A1 - Ermilova, Elena A1 - Krüger, Jörg A1 - Unterreiner, Andreas-Neil A1 - Bonse, Jörn A1 - Hertwig, Andreas T1 - Using imaging ellipsometry to understand femtosecond laser materials processing of group IV materials N2 - Laser materials processing is an important tool for creating and shaping new materials. Laser machining, especially with ultrashort pulses offers the modification of surfaces, thin coatings, and bulk materials with an unprecedented precision and control. The most desired feature of pulsed laser processing in the femtosecond range is that the heat-affected zone in the irradiated material will be extremely small. To better understand the mechanisms involved during laser irradiation, it is important to analyse the outcome of light-matter interaction with spectroscopic methods. Ellipsometry, especially spectroscopic imaging ellipsometry (SIE), has become an important tool for this in recent times, as it gives access to local layer thicknesses, materials dielectric functions, and features like changes in surface roughness. This work includes an overview over our recent studies examining near-infrared fs-laser surface processing of different group IV materials. The superficial phase change of silicon from crystalline to amorphous has been investigated in the past as the result of laser processing strongly depends on the crystal orientation. Moreover, SIE is capable of determining the properties of buried a-Si interfaces with micrometer lateral and sub-nanoneter vertical precision. Additionally, the growth of native and laser-induced oxides can be revealed. T2 - ICSE10 - 10th International Conference on Spectroscopic Ellipsometry CY - Boulder, CO, USA DA - 08.06.2025 KW - Laser surface ablation KW - Amorphous Carbon KW - Silicon KW - Correlative Imaging Ellipsometry PY - 2025 AN - OPUS4-63633 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Bonse, Jörn T1 - X-Ray Emission during Laser Processing with Ultrashort Laser Pulses N2 - Ultrashort laser pulse micromachining features a high precision. By increasing the repetition rate of the applied laser to several 100 kHz, laser processing becomes quick and cost-effective and make this method attractive for industrial applications. Upon exceeding a critical laser intensity, hard X-ray radiation is generated as a side effect. Even if the emitted X-ray dose per pulse is low, the accumulated X-ray dose becomes significant for high-repetition-rate laser systems so that radiation safety must be considered. T2 - 5th UKP-Workshop: Ultrafast Laser Technology CY - Aachen, Germany DA - 10.04.2019 KW - Laser-induced X-ray emission KW - Radiation protection KW - Ultrashort laser material interaction PY - 2019 AN - OPUS4-47788 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Bonse, Jörn T1 - X-ray emission during processing of metals with ultrashort laser pulses N2 - Ultrashort laser pulse micromachining features a high precision. By increasing the repetition rate of the applied laser to several 100 kHz, laser processing becomes quick and cost-effective and make this method attractive for industrial applications. Upon exceeding a critical laser intensity, hard X-ray radiation is generated as a side effect. Even if the emitted X-ray dose per pulse is low, the accumulated X-ray dose becomes significant for high-repetition-rate laser systems so that radiation safety must be considered. T2 - 8th International LIPSS Workshop CY - Bochum, Germany DA - 27.09.2018 KW - X-ray KW - Laser processing KW - Ultrashort KW - Metals PY - 2018 AN - OPUS4-46104 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -