TY - CONF A1 - Bonse, Jörn A1 - Krüger, Jörg A1 - Höhm, S. A1 - Rosenfeld, A. T1 - Femtosecond laser-induced periodic nanostructures T2 - International workshop on "Laser micro and nano structuring: Fundamentals et applications" CY - Paris, France DA - 2012-12-10 PY - 2012 AN - OPUS4-27659 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Bonse, Jörn A1 - Seuthe, T. A1 - Grehn, M. A1 - Mermillod-Blondin, A. A1 - Eichler, H. J. A1 - Eberstein, M. T1 - Femtosecond laser pulse modification of binary lithium silicate glasses T2 - International workshop on "Laser micro and nano structuring: Fundamentals et applications" CY - Paris, France DA - 2012-12-10 PY - 2012 AN - OPUS4-27660 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Bonse, Jörn A1 - Krüger, Jörg A1 - Höhm, S. A1 - Rosenfeld, A. T1 - Periodic surface structures generated by cross-polarized double femtosecond laser pulse irradiation sequences T2 - Photonics West, SPIE Conference 8607 on Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVIII CY - San Francisco, CA, USA DA - 2013-02-02 PY - 2013 AN - OPUS4-27668 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CHAP A1 - Beke, S. A1 - Sugioka, K. A1 - Midorikawa, K. A1 - Bonse, Jörn ED - Hemsworth, E.J. T1 - Nanaosecond and femtosecond laser ablation of TeO2 crystals: surface characterization and plasma analysis N2 - Near-IR femtosecond (fs) (pulse duration = 150 fs, wavelength = 775 nm, repetition rate 1 kHz) and VUV nanosecond (ns) (pulse duration = 20 ns, wavelength = 157 nm, repetition rate 1 to 5 Hz) laser pulse ablation of single-crystalline TeO2 (c-TeO2 ) surfaces was performed in air using the direct focusing technique. A multi-method characterization using optical microscopy, atomic force microscopy and scanning electron microscopy revealed the surface morphology of the ablated craters. This allowed us at each irradiation site to characterize precisely the lateral and vertical dimensions of the laser-ablated craters for different laser pulse energies and number of laser pulses per spot. Based on the obtained information, we quantitatively determined the ablation threshold fluence for the fs laser irradiation when different pulse numbers were applied to the same spot using two independent extrapolation techniques. We found that in the case of NIR fs laser pulse irradiation, the ablation threshold significantly depends on the number of laser pulses applied to the same spot indicating that incubation effects play an important role in this material. In the case of VUV ns laser pulses, the ablation rate is significantly higher due to the high photon energy and the predominantly linear absorption in the material. These results are discussed on the basis of recent models of the interaction of laser pulses with dielectrics. In the second part of this chapter, we use time- of-flight mass spectrometry (TOFMS) to analyze the elemental composition of the ablation products generated upon laser irradiation of c-TeO2 with single fs- (pulse duration ~200 fs, wavelength 398 nm) and ns-pulses (pulse duration 4 ns, wavelength 355 nm). Due to the three order of magnitude different peak intensities of the ns- and fs laser pulses, significant differences were observed regarding the laser-induced species in the plasma plume. Positive singly, doubly and triply charged Te ions (Te+, Te2+, Te3+) in the form of many different isotopes were observed in case of both irradiations. In the case of the ns-laser ablation, the TeO+ formation was negligible compared to the fs case and there was no Te trimer (Te3+) formation observed. It was found that the amplitude of Te ion signals strongly depends on the applied laser pulse energy. Singly charged oxygen ions (O+) are always present as a byproduct in both kinds of laser ablation. KW - Tellurium dioxide crystals KW - Femtosecond laser ablation KW - VUV nanosecond laser ablation KW - Multiphoton absorption KW - Time-of-flight mass spectroscopy KW - Incubation KW - Optical properties KW - Scanning electron microscopy KW - Atomic force microscopy KW - Isotopes PY - 2011 SN - 978-1-61324-851-5 N1 - Serientitel: Physics Research and Technology – Series title: Physics Research and Technology IS - Chapter 4 SP - 77 EP - 96 PB - Nova Science Publishers, Inc. AN - OPUS4-25454 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Bonse, Jörn T1 - Femtosecond laser-induced periodic surface structures T2 - Institutskolloquium des Leibniz-Instituts für Oberflächenmodifizierung CY - Leipzig, Germany DA - 2012-06-07 PY - 2012 AN - OPUS4-25531 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Bonse, Jörn A1 - Höhm, S. A1 - Rosenfeld, A. A1 - Koter, Robert A1 - Krüger, Jörg T1 - Femtosecond laser-induced periodic surface structures generated in different environments T2 - European Materials Research Society (EMRS) Spring Meeting 2012, Symposium V "Laser materials processing for micro and nano applications" CY - Strasbourg, France DA - 2012-05-12 PY - 2012 AN - OPUS4-25521 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Bonse, Jörn A1 - Hertwig, Andreas A1 - Koter, Robert A1 - Weise, Matthias A1 - Beck, Uwe A1 - Reinstädt, Philipp A1 - Griepentrog, Michael A1 - Krüger, Jörg A1 - Picquart, M. A1 - Haro-Poniatowski, E. T1 - Femtosecond laser-induced modification and ablation of hydrogenated amorphous carbon films T2 - European Materials Research Society (EMRS) Spring Meeting 2012, Symposium V "Laser materials processing for micro and nano applications" CY - Strasbourg, France DA - 2012-05-12 PY - 2012 AN - OPUS4-25522 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Bonse, Jörn A1 - Munz, Martin A1 - Sturm, Heinz T1 - Scanning force microscopic investigations of the femtosecond pulse laser ablation of indium phosphide in air T2 - SPIE conference Nanotechnology Gran Canaria CY - Maspalomas, Spain DA - 2003-05-20 PY - 2003 AN - OPUS4-4081 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Bonse, Jörn A1 - Koter, Robert A1 - Hartelt, Manfred A1 - Spaltmann, Dirk A1 - Höhm, S. A1 - Rosenfeld, A. A1 - Krüger, Jörg T1 - Femtosecond Laser-induced periodic surface structures on steel for tribological applications T2 - 12th Conference on Laser Ablation, COLA 2013 CY - Ischia, Italy DA - 2013-10-06 PY - 2013 AN - OPUS4-29555 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Bonse, Jörn A1 - Shymanovich, U. A1 - Barty, A. A1 - Boutet, S. A1 - Bogan, M. A1 - Marchesini, S. A1 - Stojanovic, N. A1 - Sobierajski, R. A1 - Lu, W. A1 - El Kharrazi, M. A1 - Vattilana, M. A1 - Quirin, F. A1 - Brazda, T. A1 - Zastrau, U. A1 - Hau-Riege, S. A1 - Tobey, R. A1 - Ehrke, H. A1 - Cavalleri, A. A1 - Redlin, H. A1 - Düsterer, S. A1 - Frank, M. A1 - Bajt, S. A1 - Schulz, J. A1 - Seibert, M. A1 - Hajdu, J. A1 - Treusch, R. A1 - Chapman, H. A1 - Sokolowski-Tinten, K. T1 - Transient respnse of laser-irradiated solids studied with femtosecond short-wavelength free-electron-lasers T2 - Laser Damage Symposium XLI: Annual Symposium on Optical Materials for High Power Lasers CY - Boulder, CO, USA DA - 2009-09-21 PY - 2009 AN - OPUS4-19629 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Bonse, Jörn A1 - Bulgakova, N.M. A1 - Bulgakov, A.V. A1 - Zhukov, V. P. A1 - Rosenfeld, A. T1 - Fs-laser processing of metals: pulse duration effects and the role of air ionization T2 - COLA 2009, 10th International Conference on Laser Ablation CY - Singapore DA - 2009-11-22 PY - 2009 AN - OPUS4-20490 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Bonse, Jörn A1 - Sokolowski-Tinten, K. A1 - Barty, A. A1 - Boutet, S. A1 - Shymanovich, U. A1 - Chapman, H. N. A1 - Bogan, M. A1 - Marchesini, S. A1 - Hau-Riege, S. A1 - Stojanovic, N. A1 - Rosandi, Y. A1 - Urbassek, H. M. A1 - Tobey, R. A1 - Ehrke, H. A1 - Cavalleri, A. A1 - Düsterer, S. A1 - Redlin, H. A1 - Frank, M. A1 - Bajt, S. A1 - Schulz, J. A1 - Seibert, M. A1 - Hajdu, J. A1 - Treusch, R. A1 - Bostedt, Ch. A1 - Hoener, M. A1 - Moeller, T. T1 - Short-pulse laser induced melting and ablation studied with time-resolved coherent XUV scattering T2 - Laser Damage Symposium XLII: Annual Symposium on Optical Materials for High Power Lasers CY - Boulder, CO, USA DA - 2010-09-26 PY - 2010 AN - OPUS4-21686 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Bonse, Jörn A1 - Krüger, Jörg A1 - Rohloff, M. A1 - Das, S. K. A1 - Höhm, S. A1 - Rosenfeld, A. T1 - Femtosecond laser-induced periodic surface structures: importance of transient excitation stages T2 - SPIE Conference on Optics+Optoelktronics 2011, Conference "Damage to VUV, EUV and X-ray Optics (XDAM3)" CY - Prague, Czech Republic DA - 2011-04-18 PY - 2011 AN - OPUS4-23549 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Bonse, Jörn T1 - Structural morphological and dynamical aspects of fs-laser induced modification of crystalline silicon T2 - Eingeladener Vortrag im Seminar des Bereichs A des Max-Born-instituts, Adlershof CY - Berlin, Germany DA - 2010-01-12 PY - 2010 AN - OPUS4-20759 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Bonse, Jörn T1 - Structural and morphological modifikation of crystalline silicon induced femtosecond laser pulses T2 - internes Seminar des Fraunhofer-Instituts für Keramische Technologien und Systeme (IKTS) CY - Dresden, Germany DA - 2010-01-20 PY - 2010 AN - OPUS4-20805 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Beke, S. A1 - Sugioka, K. A1 - Midorikawa, K. A1 - Bonse, Jörn T1 - Near-IR femtosecond and VUV nanosecond laser processing of TeO2 crystals in air N2 - Near-IR femtosecond ( τ = 150 fs, λ = 775 nm, repetition rate 1 kHz) and VUV nanosecond (τ = 20 ns, λ = 157 nm, repetition rate 1 to 5 Hz) laser pulse ablation of single-crystalline TeO2 (c-TeO2, grown by the balance controlled Czochalski growth method) surfaces was performed in air using the direct focusing technique. The multi-method characterization using optical microscopy, atomic force microscopy and scanning electron microscopy revealed the surface morphology of the ablated craters. This allowed us to characterize precisely the lateral and vertical dimensions of the laser-ablated craters for different laser pulse energies and pulse numbers at each spot. Based on the obtained information, we quantitatively determined the ablation threshold fluence for the fs laser irradiation when different pulse numbers were applied to the same spot by using two independent extrapolation techniques. We found that in case of NIR femtosecond laser pulse irradiation, the ablation threshold significantly depends on the number of laser pulses applied to the same spot indicating that incubation effects play an important role in this material. In case of VUV ns laser pulses, the ablation rate is significantly higher due to the high photon energy and the predominantly linear absorption in the material. These results are discussed on the basis of recent models of the interaction of laser pulses with dielectrics. PY - 2010 U6 - https://doi.org/10.1117/12.845074 SN - 0277-786X SN - 0038-7355 SN - 0361-0748 VL - 7584 SP - 758415-1 - 758415-10 PB - Soc. CY - Redondo Beach, Calif. [u.a.] AN - OPUS4-20912 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Bonse, Jörn A1 - Maerten, L. A1 - Rosenfeld, A. A1 - Krüger, Jörg T1 - Transient changes of the optical properties of solids during femtosecond laser pulse irradiation and its implications for the formation of lase-induced periodic surface structures T2 - European Materials Research Society (EMRS) Spring Meeting, Symposium R "Laser processing an diagnostics for micro and nano applications" CY - Strasbourg, France DA - 2010-06-07 PY - 2010 AN - OPUS4-20993 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Bonse, Jörn A1 - Sokolowski-Tinten, K. A1 - Barty, A. A1 - Boutet, S. A1 - Bogan, M. A1 - Marchesini, S. A1 - Hau-Riege, S. A1 - Stojanovic, N. A1 - Tobey, R. A1 - Ehrke, H. A1 - Cavalleri, A. A1 - Düsterer, S. A1 - Frank, M. A1 - Bajt, S. A1 - Schulz, J. A1 - Seibert, M. A1 - Hajdu, J. A1 - Treusch, R. A1 - Chapman, H. T1 - Short-pulse laser induced transient structure formation and ablation studied with time-resolved coherant XUV-scattering T2 - The International High Power Laser Ablation Conference CY - Santa Fe, NM, USA DA - 2010-04-18 PY - 2010 AN - OPUS4-21229 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Bonse, Jörn A1 - Rosenfeld, A. A1 - Krüger, Jörg T1 - Femtosecond laser-inducted periodic surface structures: recent approaches to explain their subwavelength periodicties T2 - International Conference on Lasers, Applications, and Techonlogies, ICONO/LAT 2010, Symposium 2 der LAT 2010 "Laser-assisted Micro- and Nanotechnologies" CY - Kazan, Russia DA - 2010-08-23 PY - 2010 AN - OPUS4-21230 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Bonse, Jörn A1 - Mermillod-Blondin, A. A1 - Mauclair, C. A1 - Rosenfeld, A. A1 - Stoian, R. A1 - Audouard, E. T1 - Time-resolved imaging of bulk a-SiO2 upon various ultrashort excitation sequences T2 - SPIE Photonics West Conference: Frontiers in Ultrafast Optics: Biomedical, Scientific and Industrial Applications XI (Conference 7925) CY - San Francisco, CA, USA DA - 2011-01-22 PY - 2011 AN - OPUS4-22095 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -