TY - CONF A1 - Bonse, Jörn T1 - Nanostrukturierung mit Femtosekundenlaserpulsen T2 - Seminar "Laser in der Feinbearbeitung" des Laserverbundes Berlin Brandenburg e. V. CY - Brandenburg an der Havel, Germany DA - 2012-04-19 PY - 2012 AN - OPUS4-25681 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Bonse, Jörn A1 - Krüger, Jörg A1 - Höhm, S. A1 - Rosenfeld, A. T1 - Femtosecond laser-induced periodic surface structures N2 - The formation of laser-induced periodic surface structures (LIPSS) in different materials (metals, semiconductors, and dielectrics) upon irradiation with linearly polarized fs-laser pulses (τ~30–150 fs, λ~800 nm) in air environment is studied experimentally and theoretically. In metals, predominantly low-spatial-frequency-LIPSS with periods close to the laser wavelength λ are observed perpendicular to the polarization. Under specific irradiation conditions, high-spatial-frequency-LIPSS with sub-100-nm spatial periods (~λ/10) can be generated. For semiconductors, the impact of transient changes of the optical properties to the LIPSS periods is analyzed theoretically and experimentally. In dielectrics, the importance of transient excitation stages in the LIPSS formation is demonstrated experimentally using (multiple) double-fs-laser-pulse irradiation sequences. A characteristic decrease of the LIPSS periods is observed for double-pulse delays of less than 2 ps. KW - Laser-induced periodic surface structures (LIPSS) KW - Femtosecond laser ablation KW - Ultrafast optical techniques KW - Silicon KW - Titanium KW - Silica PY - 2012 U6 - https://doi.org/10.2351/1.4712658 SN - 1042-346X SN - 1938-1387 VL - 24 IS - 4 SP - 042006-1 EP - 042006-7 PB - Laser Institute of America CY - Orlando, Fla., USA AN - OPUS4-26198 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Höhm, S. A1 - Rosenfeld, A. A1 - Krüger, Jörg A1 - Bonse, Jörn T1 - Femtosecond laser-induced periodic surface structures on silica N2 - The formation of laser-induced periodic surface structures (LIPSS) on two different silica polymorphs (single-crystalline synthetic quartz and commercial fused silica glass) upon irradiation in air with multiple linearly polarized single- and double-fs-laser pulse sequences (τ = 150 fs pulse duration, λ = 800nm center wavelength, temporal pulse separation Δt < 40 ps) is studied experimentally and theoretically. Two distinct types of fs-LIPSS [so-called low-spatial-frequency LIPSS (LSFL) and high-spatial-frequency LIPSS (HSFL)] with different spatial periods and orientations were identified. Their appearance was characterized with respect to the experimental parameters peak laser fluence and number of laser pulses per spot. Additionally, the 'dynamics' of the LIPSS formation was addressed in complementary double-fs-pulse experiments with varying delays, revealing a characteristic change of the LSFL periods. The experimental results are interpreted on the basis of a Sipe-Drude model considering the carrier dependence of the optical properties of fs-laser excited silica. This new approach provides an explanation of the LSFL orientation parallel to the laser beam polarisation in silica—as opposed to the behaviour of most other materials. KW - High-speed optical techniques KW - Laser beam effects KW - Refractive index KW - Silicon compounds KW - Surface structure PY - 2012 U6 - https://doi.org/10.1063/1.4730902 SN - 0021-8979 SN - 1089-7550 VL - 112 IS - 1 SP - 014901-1 - 014901-9 PB - American Institute of Physics CY - Melville, NY AN - OPUS4-26201 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Bonse, Jörn A1 - Krüger, Jörg A1 - Höhm, S. A1 - Rosenfeld, A. T1 - Generation, Control and Mechanisms of the Formation of Periodic Surface Structures on the Nanometer Scale Induced by Femtosecond Laser Pulse Irradiation of Solids T2 - Julius Springer Forum for Applied Physics 2012 CY - Berlin, Germany DA - 2012-06-20 PY - 2012 AN - OPUS4-26141 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Bonse, Jörn A1 - Krüger, Jörg A1 - Höhm, S. A1 - Rosenfeld, A. T1 - Femtosecond laser-induced periodic nanostructures T2 - 8th International Conference on Photo-Excited Processes and Processes and Applications (ICPEPA-8) CY - Rochester, NY, USA DA - 2012-08-12 PY - 2012 AN - OPUS4-26144 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Grehn, M. A1 - Tsai, W.J. A1 - Höfner, M. A1 - Seuthe, T. A1 - Bonse, Jörn A1 - Mermillod-Blondin, A. A1 - Rosenfeld, A. A1 - Hennig, J. A1 - Achtstein, A. W. A1 - Theiss, C. A1 - Woggon, U. A1 - Eberstein, M. A1 - Eichler, H.J. T1 - Nonlinear optical properties of binary and ternary silicate glasses upon near-infrared femtosecond pulse laser irradiation N2 - Some nonlinear optical properties such as the nonlinear refractive index and the nonlinear effective absorption, as well as the laser-induced single-pulse ablation threshold are characterized for a series of binary and ternary silicate glasses upon irradiation with near-infrared femtosecond laser pulses (800 nm, 130 fs). The laser-induced ablation threshold varies from 2.3 J/cm² in case of potassium silicate glass up to 4.3 J/cm² in case of Fused Silica. Nonlinear refractive indices are qualitatively similar within the range 1.7-2.7×10-16 cm²/W. Complementary optical and physico-chemical properties like band gap energy and the glass transformation temperature have been measured for all the glasses. T2 - International symposium on high power laser ablation 2012 CY - Santa Fe, NM, USA DA - 30.04.2012 KW - Laser-induced damage threshold KW - Laser ablation KW - Nonlinear refractive index KW - Silicate glass systems KW - Glass transformation temperature KW - Coefficient of thermal expansion PY - 2012 SN - 978-0-7354-1068-8 U6 - https://doi.org/10.1063/1.4739918 N1 - Serientitel: AIP conference proceedings – Series title: AIP conference proceedings VL - 1464 SP - 660 EP - 670 AN - OPUS4-26318 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Bonse, Jörn A1 - Höhm, S. A1 - Rohloff, M. A1 - Rosenfeld, A. A1 - Krüger, Jörg T1 - Femtosecond laser-induced periodic surface structures T2 - International High-Power Laser Ablation Conference (HPLA 2012) CY - Santa Fe, NM, USA DA - 2012-04-30 PY - 2012 AN - OPUS4-24442 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Bonse, Jörn A1 - Krüger, Jörg A1 - Höhm, S. A1 - Rosenfeld, A. T1 - Femtosecond laser-induced periodic nanostructures T2 - International workshop on "Laser micro and nano structuring: Fundamentals et applications" CY - Paris, France DA - 2012-12-10 PY - 2012 AN - OPUS4-27659 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Bonse, Jörn A1 - Seuthe, T. A1 - Grehn, M. A1 - Mermillod-Blondin, A. A1 - Eichler, H. J. A1 - Eberstein, M. T1 - Femtosecond laser pulse modification of binary lithium silicate glasses T2 - International workshop on "Laser micro and nano structuring: Fundamentals et applications" CY - Paris, France DA - 2012-12-10 PY - 2012 AN - OPUS4-27660 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Bonse, Jörn T1 - Femtosecond laser-induced periodic surface structures T2 - Institutskolloquium des Leibniz-Instituts für Oberflächenmodifizierung CY - Leipzig, Germany DA - 2012-06-07 PY - 2012 AN - OPUS4-25531 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Bonse, Jörn A1 - Höhm, S. A1 - Rosenfeld, A. A1 - Koter, Robert A1 - Krüger, Jörg T1 - Femtosecond laser-induced periodic surface structures generated in different environments T2 - European Materials Research Society (EMRS) Spring Meeting 2012, Symposium V "Laser materials processing for micro and nano applications" CY - Strasbourg, France DA - 2012-05-12 PY - 2012 AN - OPUS4-25521 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Bonse, Jörn A1 - Hertwig, Andreas A1 - Koter, Robert A1 - Weise, Matthias A1 - Beck, Uwe A1 - Reinstädt, Philipp A1 - Griepentrog, Michael A1 - Krüger, Jörg A1 - Picquart, M. A1 - Haro-Poniatowski, E. T1 - Femtosecond laser-induced modification and ablation of hydrogenated amorphous carbon films T2 - European Materials Research Society (EMRS) Spring Meeting 2012, Symposium V "Laser materials processing for micro and nano applications" CY - Strasbourg, France DA - 2012-05-12 PY - 2012 AN - OPUS4-25522 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Seuthe, T. A1 - Höfner, M. A1 - Reinhardt, F. A1 - Tsai, W.J. A1 - Bonse, Jörn A1 - Eberstein, M. A1 - Eichler, H.J. A1 - Grehn, M. T1 - Femtosecond laser-induced modification of potassium-magnesium silicate glasses: An analysis of structural changes by near edge x-ray absorption spectroscopy N2 - The effects of femtosecond laser pulse irradiation on the glass structure of alkaline silicate glasses were investigated by x-ray absorption near edge structure spectroscopy using the beamline of the Physikalisch-Technische Bundesanstalt at the electron synchrotron BESSY II in Berlin (Germany) by analyzing the magnesium Κ-edge absorption peak for different laser fluences. The application of fluences above the material modification threshold (2.1 J/cm²) leads to a characteristic shift of ~1.0 eV in the Κ-edge revealing a reduced (~3%) mean magnesium bond length to the ligated oxygen ions (Mg-O) along with a reduced average coordination number of the Mg ions. KW - Glass KW - Glass structure KW - Laser beam effects KW - Magnesium compounds KW - Potassium compounds KW - XANES PY - 2012 U6 - https://doi.org/10.1063/1.4723718 SN - 0003-6951 SN - 1077-3118 VL - 100 IS - 22 SP - 224101-1 EP - 224101-3 PB - American Institute of Physics CY - Melville, NY AN - OPUS4-25918 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Rosenfeld, A. A1 - Rohloff, M. A1 - Höhm, S. A1 - Krüger, Jörg A1 - Bonse, Jörn T1 - Formation of laser-induced periodic surface structures on fused silica upon multiple parallel polarized double-femtosecond-laser-pulse irradiation sequences N2 - The formation of laser-induced periodic surface structures (LIPSS) upon irradiation of fused silica with multiple irradiation sequences of parallel polarized Ti:sapphire femtosecond laser pulse pairs (160 fs pulse duration, 800 nm central wavelength) was studied experimentally. For that purpose, a Michelson interferometer was used to generate near-equal-energy double-pulse sequences allowing the temporal pulse delay between the parallel-polarized individual fs-laser pulses to be varied between 0 and 40 ps with ~0.2 ps temporal resolution. The surface morphologies of the irradiated surface areas were characterized by means of scanning electron and scanning force microscopy. In the sub-ps delay range a strong decrease of the LIPSS periods and the ablation crater depths with the double-pulse delay was observed indicating the importance of the laser-induced free-electron plasma in the conduction band of the solids for the formation of LIPSS. KW - Laser-induced periodic surface structures (LIPSS) KW - Femtosecond laser ablation KW - Double-pulse experiments KW - Fused silica KW - Michelson interferometer PY - 2012 U6 - https://doi.org/10.1016/j.apsusc.2011.09.076 SN - 0169-4332 SN - 1873-5584 VL - 258 IS - 23 SP - 9233 EP - 9236 PB - North-Holland CY - Amsterdam AN - OPUS4-26226 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Schultz, C. A1 - Schüle, M. A1 - Stelmaszczyk, K. A1 - Bonse, Jörn A1 - Witteck, R. A1 - Weizman, M. A1 - Rhein, H. A1 - Rau, B. A1 - Schlatmann, R. A1 - Quaschning, V. A1 - Stegemann, B. A1 - Fink, F. T1 - Film side laser patterning of molybdenum thin films sputter-deposited onto glass N2 - Serial interconnection of CIGSe thin film solar modules involves typically glass-side laser patterning of the molybdenum layer (P1 scribe). In this paper we present a working principle of P1 film side patterning. The investigated samples were sputter-deposited onto soda-lime glass substrates. For understanding the fundamental ablation behavior, two kinds of layer systems were studied: on the one hand monolayer systems which are compressively stressed and on the other hand bilayer systems, consisting of a tensile stressed layer on the substrate and a second layer on top. The film-side ablation process was studied using a nanosecond as well as a picosecond laser source. The influence of intrinsic stress was studied by XRD. Time resolved spectroscopy reveals the formation of plasma as important driving mechanism for ablation. It is shown that by proper adaption of the sputter conditions high-quality P1 film side patterning is achieved. T2 - 27th European photovoltaic solar energy conference and exhibition CY - Frankfurt, Germany DA - 24.09.2012 KW - Laser processing KW - Molybdenum KW - Strain KW - Ablation KW - Sputter deposition KW - Cu(InGa)Se2 PY - 2012 SN - 3-936338-28-0 U6 - https://doi.org/10.4229/27thEUPVSEC2012-3CV.1.6 SP - 2266 EP - 2272 AN - OPUS4-27208 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Bonse, Jörn T1 - Femtosecond laser-induced periodic surface structures T2 - ULTRA Forschungseminar des Instituts für Physik der Universität Kassel CY - Kassel, Germany DA - 2012-11-12 PY - 2012 AN - OPUS4-27153 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -