TY - JOUR A1 - Baudach, Steffen A1 - Bonse, Jörn A1 - Krüger, Jörg A1 - Kautek, Wolfgang T1 - Ultrashort pulse laser ablation of polycarbonate and polymethylmethacrylate JF - Applied surface science N2 - Ablation experiments with ultrashort laser pulses (pulse duration 150 fs, wavelength 800 nm) on polymers (PC, PMMA) relevant for biomedical technology have been performed in air. The lateral and vertical machining precision was evaluated by optical, atomic force and scanning electron microscopy. The ablation threshold reaches values in the range of 0.5–2.5 J/cm2 and depends significantly on the number of laser pulses applied to the same spot. The hole diameters are influenced by the laser fluence and the number of laser pulses. The relation between the ablation threshold and the number of laser pulses applied to the same spot is described in accordance with an incubation model. KW - Femtosecond laser ablation KW - Polymer KW - Polycarbonate KW - Polymethylmethacrylate PY - 2000 DO - https://doi.org/10.1016/S0169-4332(99)00474-2 SN - 0169-4332 SN - 1873-5584 VL - 154-155 SP - 555 EP - 560 PB - North-Holland CY - Amsterdam AN - OPUS4-803 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CHAP A1 - Beke, S. A1 - Sugioka, K. A1 - Midorikawa, K. A1 - Bonse, Jörn ED - Hemsworth, E.J. T1 - Nanaosecond and femtosecond laser ablation of TeO2 crystals: surface characterization and plasma analysis T2 - Laser-induced plasmas: theory and applications N2 - Near-IR femtosecond (fs) (pulse duration = 150 fs, wavelength = 775 nm, repetition rate 1 kHz) and VUV nanosecond (ns) (pulse duration = 20 ns, wavelength = 157 nm, repetition rate 1 to 5 Hz) laser pulse ablation of single-crystalline TeO2 (c-TeO2 ) surfaces was performed in air using the direct focusing technique. A multi-method characterization using optical microscopy, atomic force microscopy and scanning electron microscopy revealed the surface morphology of the ablated craters. This allowed us at each irradiation site to characterize precisely the lateral and vertical dimensions of the laser-ablated craters for different laser pulse energies and number of laser pulses per spot. Based on the obtained information, we quantitatively determined the ablation threshold fluence for the fs laser irradiation when different pulse numbers were applied to the same spot using two independent extrapolation techniques. We found that in the case of NIR fs laser pulse irradiation, the ablation threshold significantly depends on the number of laser pulses applied to the same spot indicating that incubation effects play an important role in this material. In the case of VUV ns laser pulses, the ablation rate is significantly higher due to the high photon energy and the predominantly linear absorption in the material. These results are discussed on the basis of recent models of the interaction of laser pulses with dielectrics. In the second part of this chapter, we use time- of-flight mass spectrometry (TOFMS) to analyze the elemental composition of the ablation products generated upon laser irradiation of c-TeO2 with single fs- (pulse duration ~200 fs, wavelength 398 nm) and ns-pulses (pulse duration 4 ns, wavelength 355 nm). Due to the three order of magnitude different peak intensities of the ns- and fs laser pulses, significant differences were observed regarding the laser-induced species in the plasma plume. Positive singly, doubly and triply charged Te ions (Te+, Te2+, Te3+) in the form of many different isotopes were observed in case of both irradiations. In the case of the ns-laser ablation, the TeO+ formation was negligible compared to the fs case and there was no Te trimer (Te3+) formation observed. It was found that the amplitude of Te ion signals strongly depends on the applied laser pulse energy. Singly charged oxygen ions (O+) are always present as a byproduct in both kinds of laser ablation. KW - Tellurium dioxide crystals KW - Femtosecond laser ablation KW - VUV nanosecond laser ablation KW - Multiphoton absorption KW - Time-of-flight mass spectroscopy KW - Incubation KW - Optical properties KW - Scanning electron microscopy KW - Atomic force microscopy KW - Isotopes PY - 2011 SN - 978-1-61324-851-5 N1 - Serientitel: Physics Research and Technology – Series title: Physics Research and Technology IS - Chapter 4 SP - 77 EP - 96 PB - Nova Science Publishers, Inc. AN - OPUS4-25454 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CHAP A1 - Beke, S. A1 - Sugioka, K. A1 - Midorikawa, K. A1 - Bonse, Jörn ED - Hemsworth, E.J. T1 - Nanosecond and femtosecond laser ablation of TeO2 crystals: surface characterization and plasma analysis T2 - Laser-induced plasmas: theory and applications N2 - Near-IR femtosecond (fs) (pulse duration = 150 fs, wavelength = 775 um, Repetition rate 1 kHz) and VUV nanosecond (ns) (pulse duration = 20 ns, wavelength = 157 nm, repetition rate 1 to 5 Hz) laser pulse ablation of single-crystalline TeO? (c-Te02) surfaces was performed in air using the direct focusing technique. A multi-method characterization using optical microscopy, atomic force microscopy and scanning electron microscopy revealed the surface morphology of the ablated craters. This allowed us at each irradiation site to characterize precisely the lateral and vertical dimensions of the laser-ablated craters for different laser pulse energies and number of laser pulses per spot. Based on the obtained information, we quantitatively determined the Ablation threshold fluence for the fs laser irradiation when different pulse numbers were applied to the same spot using two independent extrapolation techniques. We found that in the case of NIR fs laser pulse irradiation, the ablation threshold significantly depends on the number of laser pulses applied to the same spot indicating that incubation effects play an important role in this material. In the case of VUV ns laser pulses, the ablation rate is significantly higher due to the high photon energy and the predominantly linear absorption in the material. These results are discussed on the basis of recent models of the interaction of laser pulses with dielectrics. In the second part of this chapter, we use timeof-flight mass spectrometry (TOFMS) to analyze the elemental composltion of the ablation products generated upon laser irradiation of c-Te02 with single fs- (pulse duration ~ 200 fs, wavelength 398 nm) and ns-pulses (pulse duration 4 ns, wavelength 355 nm). Due to the three Order of magnitude different peak intensities of the ns- and fs laser pulses, significant differences were observed regarding the laser-induced species in the plasma plume. Positive singly, doubly and triply charged Te ions (Te+, Te2+, Te3+) in the form of many different isotopes were observed in case of both irradiations. In the case of the ns-laser ablation, the TeO+ formation was negligible compared to the fs case and there was no Te trimer (Te3+) formation observed. It was found that the amplitude of Te ion Signals strongly depends on the applied laser pulse energy. Singly charged Oxygen ions (0+) are always present as a byproduct in both kinds of laser ablation. KW - Femtosecond laser ablation KW - Nanosecond laser ablation KW - Damage threshold KW - TeO2 KW - Dielectrics KW - Time-of-flight mass spectrometry (TOF-MS) PY - 2011 SN - 978-1-61324-851-5 N1 - Serientitel: Physics Research and Technology – Series title: Physics Research and Technology IS - Chapter 4 SP - 77 EP - 96 PB - Nova Science Publishers, Inc. AN - OPUS4-25465 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Beke, S. A1 - Sugioka, K. A1 - Midorikawa, K. A1 - Péter, Á. A1 - Nánai, L. A1 - Bonse, Jörn T1 - Characterization of the ablation of TeO2 crystals in air with femtosecond laser pulses JF - Journal of physics D N2 - Femtosecond (fs) laser pulse ablation (pulse duration of 150 fs, wavelength of 775 nm, repetition rate of 1 kHz) of single-crystalline TeO2 surfaces was performed in air using the direct focusing technique. The lateral and vertical dimensions of laser ablated craters as well as the laser damage thresholds were evaluated for different pulse numbers applied to the same spot. The joint observation using optical microscopy, atomic force microscopy and scanning electron microscopy revealed the surface morphology of the ablated craters and also showed that the ablation threshold depends significantly on the number of laser pulses applied to the same spot due to incubation effects. The incubation effects change the absorption processes involved in fs-laser ablation of the transparent material from multiphoton absorption to a single-photon absorption. These results are discussed on the basis of recent models of the interaction of fs-laser pulses with dielectrics. KW - Femtosecond laser ablation KW - Damage threshold KW - TeO2 KW - Dielectrics PY - 2010 DO - https://doi.org/10.1088/0022-3727/43/2/025401 SN - 0022-3727 SN - 1361-6463 VL - 43 IS - 2 SP - 025401-1 - 025401-6 PB - IOP Publ. CY - Bristol AN - OPUS4-20665 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Bonse, Jörn A1 - Derra, U. A1 - Mescheder, H. A1 - Winands, K. A1 - Emonts, C. A1 - Comanns, P. A1 - Krüger, Jörg A1 - Kirner, Sabrina A1 - Skoulas, E. A1 - Tsibidis, G.D. A1 - Stratakis, E. T1 - Mimicking lizard-like surface structures upon ultrashort laser pulse irradiation of inorganic materials N2 - The wetting behavior of material surfaces can be controlled by surface structures. We functionalized inorganic material surfaces, such as steel, titanium alloy and silicon, to modify the wetting behavior using ultrashort laser pulses (fs- to ps-range). The laser processing was performed by scanning the laser beam across the surface of initially polished flat sample material. A combined experimental and theoretical study of the laser processing parameters (peak fluence, scan velocity, line overlap) allowed the identification of different regimes associated with characteristic surface morphologies (laser-induced periodic surface structures, grooves, micro cones, dimples, etc.). Analyses of the surface using optical as well as scanning electron microscopy allowed the identification of morphologies providing the optimum similarity to the natural skin of lizards. For mimicking skin structures of moisture-harvesting lizards towards an optimization of the surface wetting behavior, additionally, a two-step laser processing strategy was established for realizing hierarchical micro- and nanostructures. In this approach, a laser-generated regular array of small dimples was superimposed (step 2) to the micron-scaled capillaries processed before (step 1). Optical focus variation imaging measurements finally revealed the three dimensional topography of the laser processed surfaces derived from lizard skin structures. The functionality of these surfaces was analyzed in view of wetting properties. T2 - E-MRS 2016 Spring Meeting, Symposium C: "Laser-material interactions for tailoring future applications" CY - Lille, France DA - 02.05.2016 KW - Laser-induced periodic surface structures (LIPSS) KW - Femtosecond laser ablation KW - Steel KW - Lizard KW - Wetting PY - 2016 AN - OPUS4-36047 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Bonse, Jörn A1 - Koter, Robert A1 - Hartelt, Manfred A1 - Spaltmann, Dirk A1 - Kirner, Sabrina A1 - Pentzien, Simone A1 - Höhm, S. A1 - Rosenfeld, A. A1 - Krüger, Jörg T1 - Tribological properties of femtosecond laserinduced periodic surface structures on metals N2 - Laser-induced periodic surface structures (LIPSS, ripples) were generated on steel and titanium surfaces upon irradiation with multiple linear polarized femtosecond laser pulses (pulse duration 30 fs, central wavelength 790 nm). The experimental conditions (laser fluence, spatial spot overlap) were optimized in a sample-scanning geometry for the processing of large surface areas covered homogeneously by the nanostructures. The irradiated surface regions were subjected to optical microscopy (OM), white light interference microscopy (WLIM) and scanning electron microscopy (SEM) revealing sub-wavelength spatial periods. The nanostructured surfaces were tribologically tested under reciprocal sliding conditions against a sphere of hardened 100Cr6 steel at 1 Hz using paraffin oil and engine oil as lubricants. After 1000 sliding cycles at a load of 1.0 N, the corresponding wear tracks were characterized by OM and SEM. For specific conditions the laser-generated nanostructures endured the tribological treatment. Simultaneously, a significant reduction of the friction coefficient was observed in the laser-irradiated (LIPSS-covered) areas when compared to the non-irradiated surface, indicating the potential benefit of laser surface structuring for tribological applications. T2 - SPIE Photonics West Conference, Symposium "Laser Applications in Microelectronic and Optoelectronic Manufacturing" (LAMOM) XXI CY - San Francisco, CA, USA DA - 13.02.2016 KW - Femtosecond laser ablation KW - Laser-induced periodic surface structures (LIPSS) KW - Tribology KW - Friction KW - Wear PY - 2016 AN - OPUS4-36041 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Bonse, Jörn A1 - Kirner, Sabrina V. A1 - Epperlein, Nadja A1 - Spaltmann, Dirk A1 - Krüger, Jörg T1 - Surface functionalization by laser-induced periodic surface structures (LIPSS) N2 - Laser-induced periodic surface structures (LIPSS, ripples) are a universal phenomenon that can be observed on almost any material after the irradiation by linearly polarized laser beams, particularly when using ultrashort laser pulses with durations in the femtosecond to picosecond range. During the past few years significantly increasing research activities have been reported in the field of LIPSS, since their generation in a single-step process provides a simple way of nanostructuring and surface functionalization towards the control of optical, mechanical, biological, or chemical surface properties. In this contribution the mechanisms of formation and current applications of LIPSS are reviewed, including the colorization of technical surfaces, the control of surface wetting properties, the mimicry of the natural texture of animal integuments, the tailoring of surface colonization by bacterial biofilms, the advancement of medical pacemakers, and the improvement of the tribological performance of nanostructured metal surfaces. T2 - Stuttgarter Lasertage - SLT 2018 CY - Stuttgart, Germany DA - 05.06.2018 KW - Surface functionalization KW - Laser-induced periodic surface structures (LIPSS) KW - Femtosecond laser ablation PY - 2018 AN - OPUS4-45132 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Bonse, Jörn A1 - Florian, Camilo A1 - Kirner, Sabrina V. A1 - Krüger, Jörg T1 - Quo vadis LIPSS? – Applications of Laser-Induced Periodic Surface Structures N2 - Laser-induced periodic surface structures (LIPSS, ripples) are a universal phenomenon that can be observed on almost any material after the irradiation by linearly polarized laser beams, particularly when using ultrashort laser pulses with durations in the femtosecond to picosecond range. During the past years significantly increasing industrial and research activities have been reported in the field of LIPSS, since their generation in a single-step process provides a simple way of nanostructuring and surface functionalization towards the control of optical, mechanical, biological, or chemical surface properties. In this contribution the mechanisms of formation and current trends and applications of LIPSS are reviewed, including the colorization of technical surfaces, the control of surface wetting properties, the mimicry of the natural texture of animals, the tailoring of surface colonization by bacterial biofilms, the advancement of leadless medical pacemakers, and the improvement of the tribological performance of nanostructured metal surfaces. T2 - 11. Mittweidaer Lasertagung CY - Mittweida, Germany DA - 13.11.2019 KW - Femtosecond laser ablation KW - Laser-induced periodic surface structures (LIPSS) KW - Surface functionalization KW - Applications PY - 2019 AN - OPUS4-49655 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Bonse, Jörn A1 - Florian, Camilo A1 - Krüger, Jörg T1 - Quo vadis LIPSS? – Recent developments in theoretical modelling and technical applications N2 - This presentation reviews current and expected developments in the field of laser-induced periodic surface structures (LIPSS, ripples). These surface nanostructures are a universal phenomenon and can be generated on almost any material by irradiation with intense linearly polarized radiation. LIPSS are formed in a “self-ordered” way and are often accompanying laser material processing applications. The structures can be produced in a single-step process and enable surface functionalization through the adaption of optical, mechanical and chemical surface properties. Their spatial periods typically range from several micrometers down to less than 100 nanometers, exhibiting a clear correlation with the polarization direction of the laser radiation used. Various types of LIPSS have been classified, relevant control parameters were identified, and material specific formation mechanisms are analyzed for different types of inorganic solids, i.e., metals, semiconductors, and dielectrics, through time-resolved optical experiments and theoretical simulations. Special attention will be paid to a comparison of the currently available formation theories for LIPSS with a discussion of their respective strengths and weaknesses. Currrently explored applications featuring surface functionalization in the fields of optics, surface wetting, medicine, and tribology will be discussed. T2 - 9th International LIPSS Workshop CY - Ljubljana, Slovenia DA - 26.09.2019 KW - Laser-induced periodic surface structures (LIPSS) KW - Surface functionalization KW - Femtosecond laser ablation KW - Modelling KW - Applications PY - 2019 AN - OPUS4-49708 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Bonse, Jörn T1 - Laser-induced periodic surface structures N2 - This presentation reviews the current state in the field of Laser-induced Periodic Surface Structures (LIPSS). These surface nanostructures are a universal phenomenon and can be generated on almost any material by irradiation with intense linearly polarized laser radiation. LIPSS are formed in a “self-ordered” way and are often accompanying material processing applications. They can be produced following a single-step process and enable surface functionalization through the adaption of optical, mechanical and chemical surface properties. Their structural sizes typically range from several micrometers down to less than 100 nanometers exhibiting a clear correlation with the polarization direction of the laser radiation. Various types of surface structures are classified, relevant control parameters are identified, and their material specific formation mechanisms are analyzed for different types of inorganic solids, i.e., metals, semiconductors, and dielectrics, through time-resolved optical experiments and theoretical simulations. Finally, technological applications featuring surface functionalization in the fields of optics, fluidics, medicine, and tribology are discussed. T2 - Seminar CY - Laser-Laboratorium Göttingen e.V., Germany DA - 18.11.2019 KW - Laser-induced periodic surface structures (LIPSS) KW - Surface functionalization KW - Electromagnetic radiation KW - Applications KW - Femtosecond laser ablation PY - 2019 AN - OPUS4-49689 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Bonse, Jörn A1 - Bachelier, G. A1 - Wiggins, S. M. A1 - Siegel, J. A1 - Solis, J. A1 - Krüger, Jörg A1 - Sturm, Heinz T1 - Femtosecond laser ablation of indium phosphide in air: dynamical, structural and morphological evolution JF - Journal of optoelectronics and advanced materials N2 - The irradiation of single-crystalline indium phosphide (c-InP) by Ti:sapphire femtosecond laser pulses (130 fs, 800 nm) in air is studied by means of in-situ time resolved reflectivity measurements [fs-time-resolved microscopy (100 fs-10 ns) and point probing analysis (ns - µs)] and by complementary ex-situ surface analytical methods (Micro Raman Spectroscopy, Scanning Force, and Optical Microscopy). The dynamics of melting, ablation, and optical breakdown as well as structural changes resulting from rapid solidification are investigated in detail. Different laser-induced surface morphologies are characterized and discussed on the basis of recent ablation and optical breakdown models. KW - Femtosecond laser ablation KW - Optical breakdown KW - Time-resolved measurements KW - Semiconductor KW - Indium phosphide PY - 2010 SN - 1454-4164 VL - 12 IS - 3 SP - 421 EP - 426 PB - INOE & INFM CY - Bucharest AN - OPUS4-21082 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Bonse, Jörn A1 - Brzezinka, Klaus-Werner A1 - Meixner, A.J. T1 - Modifying single-crystalline silicon by femtosecond laser pulses: an analysis by micro Raman spectroscopy, scanning laser microscopy and atomic force microscopy JF - Applied surface science N2 - The surface modification of single-crystalline silicon induced by single 130 femtosecond (fs) Ti:sapphire laser pulses (wavelength 800 nm) in air is investigated by means of micro Raman spectroscopy (?-RS), atomic force microscopy and scanning laser microscopy. Depending on the laser fluence, in some regions the studies indicate a thin amorphous top-layer as well as ablated and recrystallized zones. The single-pulse threshold fluences for melting, ablation and polycrystalline recrystallization are determined quantitatively. Several different topographical surface structures (rims and protrusions) are found. Their formation is discussed in the context of recent studies of the laser irradiation of silicon. In combination with a thin-film optical model, the thickness of the amorphous layer is determined by two independent and nondestructive optical methods to be in the order of several 10 nm. KW - Femtosecond laser ablation KW - Silicon KW - Raman spectroscopy KW - Atomic force microscopy KW - Laser scanning microscopy PY - 2004 DO - https://doi.org/10.1016/S0169-4332(03)00881-X SN - 0169-4332 SN - 1873-5584 VL - 221 IS - 1-4 SP - 215 EP - 230 PB - North-Holland CY - Amsterdam AN - OPUS4-3224 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Bonse, Jörn A1 - Höhm, S. A1 - Kirner, Sabrina A1 - Rosenfeld, A. A1 - Krüger, Jörg T1 - Laser-induced periodic surface structures (LIPSS) - A scientific evergreen T2 - OSA Technical Digest (2016) N2 - The current state in the field of laser-induced periodic surface structures (LIPSS, ripples) is reviewed. Their formation mechanisms are analyzed in ultrafast experiments (time-resolved diffraction and polarization controlled double-pulse experiments) and technological applications are demonstrated. T2 - Conference on Lasers and Electro-Optics (CLEO) - Science and Innovations 2016 CY - San Jose, CA, USA DA - 05.06.2016 KW - Laser materials processing KW - Optics at surfaces KW - Ultrafast phenomena KW - Laser-induced periodic surface strcutures (LIPSS) KW - Femtosecond laser ablation PY - 2016 SN - 978-1-943580-11-8 DO - https://doi.org/10.1364/CLEO_SI.2016.STh1Q.3 SP - STh1Q.3, 1 EP - 2 PB - Optical Society of America AN - OPUS4-37072 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Bonse, Jörn A1 - Höhm, S. A1 - Koter, Robert A1 - Hartelt, Manfred A1 - Spaltmann, Dirk A1 - Pentzien, Simone A1 - Rosenfeld, A. A1 - Krüger, Jörg T1 - Tribological performance of sub-100-nm femtosecond laser-induced periodic surface structures on titanium JF - Applied Surface Science N2 - Sub-100-nm laser-induced periodic surface structures (LIPSS) were processed on bulk titanium (Ti) surfaces by femtosecond laser pulse irradiation in air (30 fs pulse duration, 790 nm wavelength). The laser peak fluence, the spatial spot overlap, and the number of overscans were optimized in a sample-scanning geometry in order to obtain large surface areas (5 mm × 5 mm) covered homogeneously by the LIPSS. The laser-processed regions were characterized by optical microscopy (OM), white light interference microscopy (WLIM) and scanning electron microscopy (SEM). The friction coefficient of the nanostructured surfaces was tested during 1000 cycles under reciprocal sliding conditions (1 Hz, 1.0 N normal load) against a 10-mm diameter ball of hardened 100Cr6 steel, both in paraffin oil and in engine oil used as lubricants. Subsequently, the corresponding wear tracks were qualified by OM, SEM, and energy dispersive X-ray analyses (EDX). The results of the tribological tests are discussed and compared to that obtained for near wavelength-sized fs-LIPSS, processed under somewhat different irradiation conditions. Some constraints for a beneficial effect of LIPSS on the tribological performance are provided. KW - Femtosecond laser ablation KW - Laser-induced periodic surface structures, LIPSS KW - Friction KW - Wear KW - Nanostructures KW - Surface functionalization PY - 2016 UR - http://www.sciencedirect.com/science/article/pii/S0169433215026987 DO - https://doi.org/10.1016/j.apsusc.2015.11.019 SN - 0169-4332 SN - 1873-5584 VL - 374 SP - 190 EP - 196 PB - Elsevier B.V. CY - Amsterdam, Netherlands AN - OPUS4-35937 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Bonse, Jörn A1 - Kirner, Sabrina A1 - Koter, Robert A1 - Pentzien, Simone A1 - Spaltmann, Dirk A1 - Krüger, Jörg T1 - Femtosecond laser-induced periodic surface structures on titanium nitride coatings for tribological applications JF - Applied Surface Science N2 - Titanium nitride (TiN) was coated on different substrate materials, namely pure titanium (Ti), titanium alloy (Ti6Al4V) and steel (100Cr6), generating 2.5 μm thick TiN layers. Using femtosecond laser pulses (30 fs, 790 nm, 1 kHz pulse repetition rate), large surface areas (5 mm × 5 mm) of laser-induced periodic surface structures (LIPSS) with sub-wavelength periods ranging between 470 nm and 600 nm were generated and characterized by optical microscopy (OM), white light interference microscopy (WLIM) and scanning electron microscopy (SEM). In tribological tests, coefficients of friction (COF) of the nanostructured surfaces were determined under reciprocating sliding conditions (1 Hz, 1.0 N normal load) against a 10-mm diameter ball of hardened 100Cr6 steel during 1000 cycles using two different lubricants, namely paraffin oil and engine oil. It turned out that the substrate material, the laser fluence and the lubricant are crucial for the tribological performance. However, friction and wear could not be significantly reduced by LIPSS on TiN layers in comparison to unstructured TiN surfaces. Finally, the resulting wear tracks on the nanostructured surfaces were investigated with respect to their morphology (OM, SEM), depth (WLIM) and chemical composition by energy dispersive X-ray spectroscopy (EDX) and, on one hand, compared with each other, on the other hand, with non-structured TiN surfaces. KW - Laser-induced periodic surface structures (LIPSS) KW - Femtosecond laser ablation KW - Titanium nitride films KW - Friction KW - Wear PY - 2017 UR - http://www.sciencedirect.com/science/article/pii/S0169433216322486 DO - https://doi.org/10.1016/j.apsusc.2016.10.132 SN - 0169-4332 SN - 1873-5584 VL - 418 IS - Part B SP - 572 EP - 579 PB - Elsevier B.V. CY - Amsterdam AN - OPUS4-40507 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Bonse, Jörn A1 - Kirner, Sabrina V. A1 - Epperlein, Nadja A1 - Spaltmann, Dirk A1 - Krüger, Jörg T1 - Surface functionalization by laser-induced periodic surface structures (LIPSS) T2 - 10th Stuttgart Laser Technology Forum 2018, Book of Abstracts N2 - In this contribution the mechanisms of formation and current applications of LIPSS are reviewed, including the colorization of technical surfaces, the control of surface wetting properties, the mimicry of the natural texture of animal integuments, the tailoring of surface colonization by bacterial biofilms, and the improvement of the tribological performance of nanostructured metal surfaces. T2 - 10th Stuttgart Laser Technology Forum 2018 CY - Stuttgart, Germany DA - 05.06.2018 KW - Laser-induced periodic surface structures (LIPSS) KW - Femtosecond laser ablation KW - Surface functionalization KW - Wetting KW - Tribology KW - Biofilms PY - 2018 SP - 35 AN - OPUS4-45128 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Bonse, Jörn A1 - Krüger, Jörg T1 - Probing the heat affected zone by chemical modifications in femtosecond pulse laser ablation of titanium nitride films in air JF - Journal of applied physics N2 - A new approach is presented to quantify the so-called "heat affected zone" (HAZ) during femtosecond laser pulse processing. Ablation of titanium nitride (TiN) thin films (~3 μm thickness) by multiple femtosecond laser pulses (τ=130 fs, λ=800 nm) in air environment was studied by means of two different surface analytical methods both being sensitive to chemical alterations at the surface. Scanning Auger electron microscopy was applied for a visualization of the spatial distribution of specific elements (Ti, O) within the laser-modified areas. The chemical state of the irradiated surface was revealed by complementary x-ray photoelectron spectroscopy. Both methods were used for a depth-profiling chemical analysis (tracking the elements Ti, N, O, and C) using an Ar-ion beam for surface sputtering. In a narrow laser fluence range slightly below the ablation threshold of TiN significant superficial oxidation can be observed leading to the formation of substoichiometric TiO2-x. At fluences above the ablation threshold, an increased titanium concentration is observed within the entire ablation craters. Following upon sputter removal the elemental distribution into the depth of the nonablated material, the results allow an estimation of the heat-affected zone for femtosecond laser ablation in air environment. According to our analyses, the HAZ extends up to a few hundreds of nanometers into the nonablated material. KW - Femtosecond laser ablation KW - Heat affected zone KW - Titanium nitride KW - Scanning Auger electron microscopy KW - X-ray KW - Photoelektron spectroscopy PY - 2010 UR - http://link.aip.org/link/?JAP/107/054902 DO - https://doi.org/10.1063/1.3311552 SN - 0021-8979 SN - 1089-7550 VL - 107 IS - 5 SP - 054902-1 - 054902-5 PB - American Institute of Physics CY - Melville, NY AN - OPUS4-20949 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Bonse, Jörn A1 - Krüger, Jörg T1 - Structuring of thin films by ultrashort laser pulses JF - Applied physics A N2 - Modern life and global communication would not be possible without technologically tailored thin films; they are omnipresent in daily life applications. In most cases, the films are deposited entirely at the carrying substrates in a specific processing step of the device or sample. In some cases, however, removal or modification must be performed locally, i.e., site-controlled and material selective through an additional laser processing step. For that ultrashort laser pulses with durations in the femtosecond and picosecond range can provide unique advantages and capabilities in industrially scalable schemes. This article reviews the current state of the research and corresponding industrial transfer related to the structuring of thin films by ultrashort pulsed lasers. It focuses on the pertinent historic developments, reveals the relevant physical and chemical effects, explores the ultimate limits, and discusses selected industrial and scientific applications. KW - Thin films KW - Laser processing KW - Ultrashort lasers KW - Laser damage KW - Femtosecond laser ablation PY - 2023 UR - https://nbn-resolving.org/urn:nbn:de:kobv:b43-565732 DO - https://doi.org/10.1007/s00339-022-06229-x SN - 0947-8396 SN - 1432-0630 VL - 129 IS - 1 SP - 1 EP - 38 PB - Springer CY - Berlin AN - OPUS4-56573 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Bonse, Jörn A1 - Krüger, Jörg A1 - Höhm, S. A1 - Rosenfeld, A. T1 - Femtosecond laser-induced periodic surface structures JF - Journal of laser applications N2 - The formation of laser-induced periodic surface structures (LIPSS) in different materials (metals, semiconductors, and dielectrics) upon irradiation with linearly polarized fs-laser pulses (τ~30–150 fs, λ~800 nm) in air environment is studied experimentally and theoretically. In metals, predominantly low-spatial-frequency-LIPSS with periods close to the laser wavelength λ are observed perpendicular to the polarization. Under specific irradiation conditions, high-spatial-frequency-LIPSS with sub-100-nm spatial periods (~λ/10) can be generated. For semiconductors, the impact of transient changes of the optical properties to the LIPSS periods is analyzed theoretically and experimentally. In dielectrics, the importance of transient excitation stages in the LIPSS formation is demonstrated experimentally using (multiple) double-fs-laser-pulse irradiation sequences. A characteristic decrease of the LIPSS periods is observed for double-pulse delays of less than 2 ps. KW - Laser-induced periodic surface structures (LIPSS) KW - Femtosecond laser ablation KW - Ultrafast optical techniques KW - Silicon KW - Titanium KW - Silica PY - 2012 DO - https://doi.org/10.2351/1.4712658 SN - 1042-346X SN - 1938-1387 VL - 24 IS - 4 SP - 042006-1 EP - 042006-7 PB - Laser Institute of America CY - Orlando, Fla., USA AN - OPUS4-26198 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - GEN A1 - Bonse, Jörn A1 - Krüger, Jörg A1 - Kautek, Wolfgang A1 - Wrobel, J. M. T1 - Femtosecond pulse laser machining of InP wafers T2 - Laser applications in microelectronic and optoelectronic manufacturing V N2 - Ablation of indium phosphide wafers in air was performed with 130 fs laser pulses at a wavelength of 800 nm at a low repetition rate of 10 Hz. In order to evaluate the role of the incubation effects, the relationship between the number of laser pulses used for the ablation and the threshold fluence was studied. Particular attention was paid to the chemical composition, surface morphology and structural variations of the ablated area. T2 - 5th Laser Applications in Microelectronics and Optoelectronics Manufacturing Conference (LAMOM) CY - San José, CA, USA DA - 240.01.2000 KW - Femtosecond laser ablation KW - Indium phosphide KW - Auger electron spectroscopy PY - 2000 SN - 0-8194-3550-3 SN - 1605-7422 N1 - Serientitel: SPIE proceedings series – Series title: SPIE proceedings series IS - 3933 SP - 280 EP - 287 PB - SPIE CY - Bellingham, Wash. AN - OPUS4-937 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -