TY - JOUR A1 - Baudach, Steffen A1 - Bonse, Jörn A1 - Kautek, Wolfgang T1 - Ablation experiments on polyimide with femtosecond laser pulses N2 - Some applications of polymer films require the microstructuring of partly uneven substrates. This cannot be achieved by conventional photolithography, usually performed with ultraviolet short-pulse lasers (excimer, fourth harmonic Nd:YAG). When processing thermally sensitive or undoped polymers with low optical absorption, the use of femtosecond laser pulses can improve the ablation precision, also reducing the heat-affected zone. Therefore, a Ti:sapphire laser system was employed to perform ablation experiments on polyimide (PI). The irradiated areas were evaluated by means of optical and scanning electron microscopy. Highly oriented ripple structures, which are related to the polarization state of the laser pulses, were observed in the cavities. The relationship between the ablation threshold fluence and the number of laser pulses applied to the same spot is described in accordance with an incubation model. T2 - 5th International Conference on Laser Ablation ; COLA '99 CY - Göttingen, Germany DA - 1999-07-19 KW - Polyimide KW - Laser KW - Ablation KW - Femtosecond laser PY - 1999 U6 - https://doi.org/10.1007/s003390051424 SN - 0947-8396 VL - 69 IS - 7 SP - S395 EP - S398 PB - Springer CY - Berlin AN - OPUS4-780 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Rudolph, Pascale A1 - Bonse, Jörn A1 - Krüger, Jörg A1 - Kautek, Wolfgang T1 - Femtosecond- and nanosecond-pulse laser ablation of bariumalumoborosilicate glass N2 - Laser ablation with femtosecond pulses (130 fs, wavelength 800 nm, repetition rate 2 Hz) was compared with nanosecond-pulse ablation (10 ns, wavelength 266 nm, repetition rate 2.5 Hz) of bariumalumoborosilicate glass in air using the direct focusing technique. Different ablation thresholds and heat-affected zones were observed. The lateral and vertical machining precision was evaluated. Single nanosecond laser pulses in the far UV resulted in a bubble or a circular hole in the centre of the illuminated spot, depending on the applied fluence. The ablation behaviour in the case of near-IR femtosecond pulses contrasted to this. Bubble formation was not detected. It needed repeated pulses at the same spot to modify the surface until material removal could be observed (incubation). Cavity dimensions of less than the beam diameter were achieved in this case. T2 - 5th International Conference on Laser Ablation ; COLA '99 CY - Göttingen, Germany DA - 1998-07-19 KW - Laser ablation KW - Bariumalumoborosilicate glass PY - 1999 U6 - https://doi.org/10.1007/s003390051524 SN - 0947-8396 VL - 69 IS - 7 SP - S763 EP - S766 PB - Springer CY - Berlin AN - OPUS4-801 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Krüger, Jörg A1 - Bonse, Jörn A1 - Lenzner, Matthias T1 - Modification and Ablation of Semiconductors by Femtosecond Laser Pulses N2 - Physical and chemical phenomena resulting from irradiation of silicon and indium phosphide with ultrashort laser pulses (~100fs) were investigated with respect to the difference between single- and multiple-pulse treatment. In the single-pulse case, several processes were identified: modification, recrystallization and ablation. All processes exhibit a distinct treshold behaviour. A two photon-absorption coefficient can be determined from a single spatial ablation profile. Accumulation effects were observed for multi-pulse illumination. Different morphological features like bubbles, rippels and microcolumns were found. PY - 2002 VL - 5 IS - 2 SP - 437 EP - 461 PB - Transworld Research Network CY - Trivandrum AN - OPUS4-1585 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Bonse, Jörn A1 - Wrobel, J. M. A1 - Brzezinka, Klaus-Werner A1 - Esser, N. A1 - Kautek, Wolfgang T1 - Femtosecond laser irradiation of indium phosphide in air: Raman spectroscopic and atomic force microscopic investigations KW - Femtosecond laser ablation KW - Indium phosphide KW - Raman spectroscopy KW - Atomic force microscopy PY - 2002 SN - 0169-4332 SN - 1873-5584 VL - 202 SP - 272 EP - 282 PB - North-Holland CY - Amsterdam AN - OPUS4-2645 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Bonse, Jörn A1 - Baudach, Steffen A1 - Kautek, Wolfgang A1 - Krüger, Jörg A1 - Welsch, E. T1 - Femtosecond laser damage of a high reflecting mirror N2 - Multiple pulse investigations of 130-fs Ti:sapphire laser-induced damage of a high reflecting mirror consisting of alternating ?/4-layers of Ta2O5 and SiO2 and a single 500-nm Ta2O5 film were performed. In both cases, fused silica served as the substrate. For a fixed number of 1000 laser pulses per spot, a decrease in the damage threshold fluence of the mirror by a factor of two was observed by changing the repetition rate from 10 Hz to 1 kHz. A single 500-nm Ta2O5 film shows higher damage resistance compared to the mirror. The mirror and the Ta2O5 film samples were partially coated with a 300-nm-thick aluminium layer. The aluminium coating does not influence the damage threshold of the dielectrics underneath. KW - Aluminium KW - Laser ablation KW - Optical coatings KW - Silicon oxide PY - 2002 U6 - https://doi.org/10.1016/S0040-6090(02)00074-3 SN - 0040-6090 IS - 408 SP - 297 EP - 301 PB - Elsevier CY - Amsterdam AN - OPUS4-1382 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Bonse, Jörn A1 - Munz, Martin A1 - Sturm, Heinz T1 - Structure formation on the surface of indium phosphide irradiated by femtosecond laser pulses N2 - Laser-induced periodic surface structures (LIPSS; ripples) with different spatial characteristics have been observed after irradiation of single-crystalline indium phosphide (c-InP) with multiple linearly polarized femtosecond pulses (130 fs, 800 nm) in air. With an increasing number of pulses per spot, N, up to 100, a characteristic evolution of two different types of ripples has been observed, i.e., (i) the growth of a grating perpendicular to the polarization vector consisting of nearly wavelength-sized periodic lines and (ii), in a specific pulse number regime (N = 5–30), the additional formation of equally oriented ripples with a spatial period close to half of the laser wavelength. For pulse numbers higher than 50, the formation of micrometer-spaced grooves has been found, which are oriented perpendicular to the ripples. These topographical surface alterations are discussed in the frame of existing LIPSS theories. KW - Femtosecond laser irradiation KW - Indium phosphide KW - Microstructure KW - Laser induced periodic surface structures KW - LIPSS KW - SEM PY - 2005 U6 - https://doi.org/10.1063/1.1827919 SN - 0021-8979 SN - 1089-7550 VL - 97 SP - 013538-1 EP - 013538-9 PB - American Institute of Physics CY - Melville, NY AN - OPUS4-5992 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - GEN A1 - Bonse, Jörn A1 - Baudach, Steffen A1 - Krüger, Jörg A1 - Kautek, Wolfgang ED - Exarhos, G. T1 - Femtosecond laser damage in dielectric coatings N2 - Multi-shot investigations of Ti:sapphire laser (wavelength (lambda) approximately equals 800 nm) induced damage were performed in three different laboratories (BAM, Berlin; LZH, Hannover; UNM, Albuquerque). The ablation behavior of a high reflecting mirror consisting of alternating (lambda) /4- layers of Ta2O5 and SiO2 was studied. Fused silica served as substrate. The influence of the pulse duration ((tau) equals 13 - 130 fs), the pulse number (30 - (infinity) ) and the repetition rate (10 Hz - 100 MHz) on the damage threshold will be discussed. T2 - 32nd Annual Boulder Damage Symposium CY - Boulder, CO, USA DA - 2000-10-16 PY - 2001 SN - 0-8194-4036-1 U6 - https://doi.org/10.1117/12.425056 SN - 1605-7422 N1 - Serientitel: SPIE proceedings series – Series title: SPIE proceedings series IS - 4347 SP - 24 EP - 34 PB - International Society for Optical Engineering (SPIE) CY - Bellingham, Wash. AN - OPUS4-6013 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Bonse, Jörn A1 - Mann, Guido A1 - Krüger, Jörg A1 - Eberstein, M. A1 - Hainich, S. A1 - Marcinkowski, M. T1 - Femtosecond laser-induced removal of antireflection coatings from textured silicon wafers T2 - SiliconPV 2013, 3rd International Conference on Crystalline Silicon Photovoltaics CY - Hamelin, Germany DA - 2013-03-25 PY - 2013 AN - OPUS4-28049 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Seuthe, T. A1 - Grehn, M. A1 - Mermillod-Blondin, A. A1 - Eichler, H.J. A1 - Bonse, Jörn A1 - Eberstein, M. T1 - Structural modifications of binary lithium silicate glasses upon femtosecond laser pulse irradiation probed by micro-Raman spectroscopy N2 - The effects of single femtosecond laser pulse irradiation (130 fs pulse duration, 800 nm center wavelength) on the structure of binary lithium silicate glasses of varying chemical compositions were investigated by micro-Raman spectroscopy. Permanent modifications were generated at the surface of the glass samples with varying laser fluences in the ablative regime and evaluated for changes in the corresponding Raman band positions and bandwidths. For increasing laser fluences, the position of certain Raman bands changed, indicating an increase in the mass density of the glass inside the irradiated area. Simultaneously, the widths of all investigated bands increased, indicating a higher degree of disorder in the glass structure with respect to bond-angle and bond-length variations. PY - 2013 U6 - https://doi.org/10.1364/OME.3.000755 SN - 2159-3930 VL - 3 IS - 6 SP - 755 EP - 764 PB - OSA CY - Washington, DC AN - OPUS4-28372 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Grehn, M. A1 - Reinhardt, F. A1 - Bonse, Jörn A1 - Eberstein, M. A1 - Seuthe, T. T1 - Response to "comment on 'femtosecond laser-induced modification of potassium-magnesium silicate glasses: an analysis of structural changes by near edge x-ray absorption spectroscopy'" KW - Bond lengths KW - Glass KW - High-speed optical techniques KW - Magnesium compounds KW - Monochromators KW - Potassium compounds KW - Silicon compounds KW - XANES PY - 2013 U6 - https://doi.org/10.1063/1.4804148 SN - 0003-6951 SN - 1077-3118 VL - 102 SP - 196102-1 - 196102-2 PB - American Institute of Physics CY - Melville, NY AN - OPUS4-28520 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -