TY - JOUR A1 - Liu, Y. A1 - Gruner, A. A1 - Aboud, D. G. K. A1 - Bonse, Jörn A1 - Schille, J. A1 - Loeschner, U. A1 - Kietzig, A.-M. T1 - Polarization effects on laser-inscribed angled micro-structures N2 - The polarization of the laser beam exhibits more substantial differences in laser micromachining as the angle of incidence deviates from zero. In the reported work, our focus was to explore the effects of circularly, p- and s-polarized laser on angled ultrashort pulse laser micromachining of micropillar arrays. The examination encompassed laser process factors, including angles of incidence, microstructure dimensions, and inter-pillar spacing. A comparison between the resulting structures demonstrated that p-polarized laser beam was the most efficient in material removal in angled laser micromachining, followed by circularly polarized laser. While the s-polarized beam exhibited the lowest ablation efficiency among the three. Such distinction is mainly attributed to the distinguishing reflectivity of the three states of polarization on tilted planes. The development of structural heights during ablation processes was examined, and potential defects in laser processing methodologies were interpreted. The dependency of structural heights on inter-pillar spacing was analyzed. This study bridges the gap between existing studies on angled ultrashort pulse laser machining and the influences of polarization on laser machining. The comparison between structures produced using laboratory-scale and industrial-scale laser systems also yielded pertinent recommendations for facilitating a smooth transition of angled laser micromachining from laboratory-scale research to industrial applications. KW - Laser processing KW - Laser-induced periodic surface structures (LIPSS) KW - Microstructures KW - Nanostructures PY - 2024 UR - https://www.sciencedirect.com/science/article/pii/S0169433223028714 U6 - https://doi.org/10.1016/j.apsusc.2023.159191 SN - 0169-4332 VL - 649 SP - 1 EP - 15 PB - Elsevier AN - OPUS4-59329 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -