TY - JOUR A1 - Töpfer, J. A1 - Hesse, J. A1 - Bierlich, S. A1 - Barth, S. A1 - Capraro, B. A1 - Rabe, Torsten A1 - Naghib Zadeh, Hamid A1 - Bartsch, H. T1 - Integration of Ni-Cu-Zn and hexagonal ferrites into LTCC modules: Cofiring strategies and magnetic properties N2 - We have studied the integration of Ni-Cu-Zn ferrite spinels as well as substituted hexagonal Co2Y-and M-type ferrites into LTCC (Low Temperature Ceramic Co-firing) modules. The cofiring behavior and the magnetic properties of these materials were investigated and evaluated for multilayer applications. Ni-Cu-Zn ferrites exhibit permeabilities of µ=300–500 for operating frequencies in the MHz range. Cu-substituted Y-type ferrites Ba2Co2-x-yZnxCuyFe12O22 in combination with sintering additives display sufficient shrinkage and densification at 900°C. A permeability of µ=10 is observed; however, substituted Co2Y-type ferrites do not exhibit long-term stability at 900°C. Co/Ti-substituted M-type ferrites BaFe12-2yCoyTiyO19 (y=1.2) with planar magneto-crystalline anisotropy exhibit excellent soft magnetic behavior. Using sintering additives, complete densification is reached at 900°C and a permeability of µ=15 and a resonance frequency of larger than 1?GHz are observed. Integration of ferrite multilayer inductor components into LTCC modules using free and constrained cofiring technologies is demonstrated. KW - Ferrites KW - Cofiring KW - LTCC modules KW - Permeability PY - 2014 UR - https://www.jstage.jst.go.jp/article/jjspm/61/S1/61_S214/_pdf U6 - https://doi.org/10.2497/jjspm.61.S214 SN - 0532-8799 SN - 1880-9014 VL - 61 SP - Suppl. S1, S214 EP - S217 PB - Ky¯okai CY - Ky¯oto AN - OPUS4-31045 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -