TY - CONF A1 - Baudach, Steffen A1 - Beck, Uwe A1 - Cobet, C. A1 - Esser, N. A1 - Richter, W. A1 - Brunn, S. A1 - Gruska, B. T1 - A VUV-XUV Ellipsometrie Setup at Bessy II T2 - ICSE 3 Konferenz CY - Vienna, Austria DA - 2003-07-06 PY - 2003 AN - OPUS4-4313 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -