TY - GEN A1 - Unger, Wolfgang T1 - Surface analysis - Auger electron spectroscopy T2 - Reference module in chemistry, molecular sciences and chemical engineering N2 - Basic principles and technical realization of Auger Electron Spectroscopy (AES) are presented. Different modes of application are briefly addressed. These are spectroscopy at nanoscaled surface layers including quantitative element analysis and chemical state analysis, in-depth element analysis, imaging and element mapping. A survey on standards related to application of AES in surface chemical analysis is given. KW - Auger electron spectroscopy KW - AES KW - Surface analysis KW - Chemical state analysis KW - Depth profiling KW - Element analysis KW - Imaging KW - Surface chemical analysis PY - 2013 UR - http://www.sciencedirect.com/science/article/pii/B9780124095472005163 SN - 978-0-12-409547-2 DO - https://doi.org/10.1016/B978-0-12-409547-2.00516-3 SP - 466 EP - 475 PB - Elsevier Inc. AN - OPUS4-29263 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -