TY - JOUR A1 - Schröter, Maria-Astrid A1 - Ritter, M. A1 - Holschneider, M. A1 - Sturm, Heinz T1 - Enhanced DySEM imaging of cantilever motion using artificial structures patterned by focused ion beam techniques N2 - We use a dynamic scanning electron microscope (DySEM) to map the spatial distribution of the vibration of a cantilever beam. The DySEM measurements are based on variations of the local secondary electron signal within the imaging electron beam diameter during an oscillation period of the cantilever. For this reason, the surface of a cantilever without topography or material variation does not allow any conclusions about the spatial distribution of vibration due to a lack of dynamic contrast. In order to overcome this limitation, artificial structures were added at defined positions on the cantilever surface using focused ion beam lithography patterning. The DySEM signal of such high-contrast structures is strongly improved, hence information about the surface vibration becomes accessible. Simulations of images of the vibrating cantilever have also been performed. The results of the simulation are in good agreement with the experimental images. KW - FIB patterning KW - Structured cantilever KW - AFM KW - Modal analysis KW - DySEM PY - 2016 U6 - http://nbn-resolving.de/urn/resolver.pl?urn:nbn:de:kobv:b43-354510 VL - 26 IS - 3 SP - 035010-1 EP - 035010-7 AN - OPUS4-35451 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Schröter, Maria-Astrid A1 - Sturm, Heinz A1 - Holschneider, M. T1 - Phase and amplitude patterns in DySEM mappings of vibrating microstructures N2 - We use a dynamic scanning electron microscope (DySEM) to analyze the movement of oscillating micromechanical structures. A dynamic secondary electron (SE) signal is recorded and correlated to the oscillatory excitation of scanning force microscope (SFM) cantilever by means of lock-in amplifiers. We show, how the relative phase of the oscillations modulate the resulting real part and phase pictures of the DySEM mapping. This can be used to obtain information about the underlying oscillatory dynamics. We apply the theory to the case of a cantilever in oscillation, driven at different flexural and torsional resonance modes. This is an extension of a recent work (Schr¨oter et al 2012 Nanotechnology 23 435501), where we reported on a general methodology to distinguish nonlinear features caused by the Imaging process from those caused by cantilever motion. KW - DySEM KW - mechanical nonlinearity KW - vibration KW - DySEM KW - mechanische Nichtlinearitäten KW - Vibration PY - 2013 U6 - https://doi.org/doi:10.1088/0957-4484/24/21/215701 VL - 24 IS - 21 SP - 215701-1 EP - 215701-10 PB - IOP PUBLISHING LTD CY - Bristol, UK AN - OPUS4-35396 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Schröter, Maria-Astrid A1 - Holschneider, M. A1 - Sturm, Heinz T1 - Analytical and numerical analysis of imaging mechanism of dynamic scanning electron microscopy N2 - The direct observation of small oscillating structures with the help of a scanning electron beam is a new approach to study the vibrational dynamics of cantilevers and microelectromechanical systems. In the scanning electron microscope, the conventional signal of secondary electrons (SE, dc part) is separated from the signal response of the SE detector, which is correlated to the respective excitation frequency for vibration by means of a lock-in amplifier. The dynamic response is separated either into images of amplitude and phase shift or into real and imaginary parts. Spatial resolution is limited to the diameter of the electron beam. The sensitivity limit to vibrational motion is estimated to be sub-nanometer for high integration times. Due to complex imaging mechanisms, a theoretical model was developed for the interpretation of the obtained measurements, relating cantilever shapes to interaction processes consisting of incident electron beam, electron–lever interaction, emitted electrons and detector response. Conclusions drawn from this new model are compared with numerical results based on the Euler–Bernoulli equation. KW - Electron microscopy KW - Scanning force microscopy KW - Cantilever motion KW - Modes KW - Harmonics KW - Mathematical model KW - Imaging theory PY - 2012 U6 - https://doi.org/10.1088/0957-4484/23/43/435501 SN - 0957-4484 SN - 1361-6528 VL - 23 IS - 43 SP - 435501-1 - 435501-10 PB - IOP Publishing Ltd. CY - Bristol AN - OPUS4-27642 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -