TY - JOUR A1 - Schröter, Maria-Astrid A1 - Ritter, M. A1 - Holschneider, M. A1 - Sturm, Heinz T1 - Enhanced DySEM imaging of cantilever motion using artificial structures patterned by focused ion beam techniques JF - Journal of Micromechanics and Microengineering N2 - We use a dynamic scanning electron microscope (DySEM) to map the spatial distribution of the vibration of a cantilever beam. The DySEM measurements are based on variations of the local secondary electron signal within the imaging electron beam diameter during an oscillation period of the cantilever. For this reason, the surface of a cantilever without topography or material variation does not allow any conclusions about the spatial distribution of vibration due to a lack of dynamic contrast. In order to overcome this limitation, artificial structures were added at defined positions on the cantilever surface using focused ion beam lithography patterning. The DySEM signal of such high-contrast structures is strongly improved, hence information about the surface vibration becomes accessible. Simulations of images of the vibrating cantilever have also been performed. The results of the simulation are in good agreement with the experimental images. KW - FIB patterning KW - Structured cantilever KW - AFM KW - Modal analysis KW - DySEM PY - 2016 UR - https://nbn-resolving.org/urn:nbn:de:kobv:b43-354510 DO - https://doi.org/doi:10.1088/0960-1317/26/3/035010 VL - 26 IS - 3 SP - 035010-1 EP - 035010-7 AN - OPUS4-35451 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Schröter, Maria-Astrid A1 - Sturm, Heinz A1 - Holschneider, M. T1 - Phase and amplitude patterns in DySEM mappings of vibrating microstructures JF - Nanotechnology N2 - We use a dynamic scanning electron microscope (DySEM) to analyze the movement of oscillating micromechanical structures. A dynamic secondary electron (SE) signal is recorded and correlated to the oscillatory excitation of scanning force microscope (SFM) cantilever by means of lock-in amplifiers. We show, how the relative phase of the oscillations modulate the resulting real part and phase pictures of the DySEM mapping. This can be used to obtain information about the underlying oscillatory dynamics. We apply the theory to the case of a cantilever in oscillation, driven at different flexural and torsional resonance modes. This is an extension of a recent work (Schr¨oter et al 2012 Nanotechnology 23 435501), where we reported on a general methodology to distinguish nonlinear features caused by the Imaging process from those caused by cantilever motion. KW - DySEM KW - mechanical nonlinearity KW - vibration KW - DySEM KW - mechanische Nichtlinearitäten KW - Vibration PY - 2013 DO - https://doi.org/doi:10.1088/0957-4484/24/21/215701 VL - 24 IS - 21 SP - 215701-1 EP - 215701-10 PB - IOP PUBLISHING LTD CY - Bristol, UK AN - OPUS4-35396 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -