TY - CONF A1 - Gornushkin, Igor B. T1 - Multifaceted laser induced plasma: spectroscopy and beyond N2 - In this presentation, I will give a brief overview of my personal experience with laser induced plasma (LIP). I will start from my and colleagues’ early works, where we used LIP as an atomic reservoir for laser induced fluorescence (LIP). We applied LIP-LIF for a sensitive detection of trace elements in various materials and demonstrated that under certain conditions the technique can even be used for isotope analysis. Next, I will discuss the application of LIP spectroscopy, i.e., LIBS, to material identification that nowadays constitutes one of the best applications of this technique. In those early days, we used correlation analysis for spectra processing; it is now replaced by more powerful chemometric methods. Further, I will stop on our efforts in modeling LIP that we first intended for the improved quality of spectroscopic analysis and later extended to non-spectroscopic fields such as chemical vapor deposition and surface structuring. We developed a version of calibration-free LIBS, in which we iterated model-generated spectra until a close match was achieved between experimental and synthetic spectra to determine concentrations. Next, I will briefly overview our recent developments in plasma modeling that include plasma chemistry. This was important in view of widening application of LIBS as a molecular technique. I will also address several plasma diagnostics, e.g., Radon transform tomography that we developed to get more insight about LIP that was helpful for both analytic spectroscopy and modeling. Finally, I will mention several exotic applications of LIP such as LIP-based lasers and chemical reactors to illustrate a real multifaceted character of laser induced plasma and usefulness of its study for many science fields. T2 - SciX 2022, The Federation of Analytical Chemistry and Spectroscopy Societies (FACSS) CY - Cincinnati, OH, USA DA - 02.10.2022 KW - Emission spectroscopy KW - Laser ablation KW - Laser induced plasma deposition KW - Surface coating KW - Hydrodynamic model KW - Plasma chemistry PY - 2022 AN - OPUS4-55968 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Gornushkin, Igor B. T1 - A Long Way of Plasma Modeling: Personal Experience N2 - Modeling is an important tool for understanding a physical phenomenon. It helps to interpret results of experiments and optimize experimental parameters for obtaining a desirable result. Modeling laser induced plasma is beneficial for many scientific and industrial fields, e.g., analytical chemistry, pulsed laser deposition, plasma enhanced chemical vapor deposition, laser welding, additive manufacturing etc. In this presentation, a personal experience in development of a physical model of laser induced plasma will be given in a chronological sequence starting from early 2000th and until now. Over the time, the model evolved from its simple analytical form that described plasma emission spectra to its current numerical form that describes plasma dynamics, chemistry, and interaction with a substrate surface. Several examples will be given for the application of the model to practical problems such as spectroscopic chemical analysis, plasma enhanced chemical vapor deposition, and surface modification by laser ablation. T2 - XII World Conference on Laser Induced Breakdown Spectroscopy CY - Bari, Italy DA - 05.09.2022 KW - Laser induced plasma KW - CFD computational fluid dynamic KW - Plasma modeling KW - Plasma chemistry PY - 2022 AN - OPUS4-55669 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Gornushkin, Igor B. A1 - Veiko, V. P. A1 - Karlagina, Y. Y. A1 - Samokhvalov, A. A. A1 - Polyakov, D. S. T1 - Equilibrium model of titanium laser induced plasma in air with reverse deposition of titanium oxides JF - Spectrochimica acta / B N2 - A chemical-hydrodynamic model of laser induced plasma is developed to study a process of deposition of titanium oxides from titanium laser induced plasma to the titanium target surface. The model is relevant to texturing and coating of titanium bone implants that is done by scanning the ablation laser across implant surfaces. Such the procedure improves the biocompatibility and durability of the implants. The model considers plasma chemical reactions, formation of condensed species inside the plasma plume, and deposition and accumulation of these species on the ablation surface. A chemical part of the model is based on minimization of Gibbs free energy of the chemical system; it is used to calculate the chemical composition of the plasma. A hydrodynamic part uses the 2D fluid-dynamic equations that model a 3D axisymmetric plasma plume and assumes the mass and energy exchange between the plasma and the surface. The initial parameters for the model are inferred from experiment. The model shows that condensed titanium oxides, mostly TiO2, form in a peripheral plasma zone and gradually adhere to the surface during the plasma plume evolution. The model predicts the major component and thickness of the deposit and can be applied for the optimization of experiments aimed at surface modification. KW - Fluid dynamic model KW - Plasma chemistry KW - Laser ablation KW - Laser induced plasma deposition KW - Surface coating KW - Titanium dioxide PY - 2022 DO - https://doi.org/10.1016/j.sab.2022.106449 SN - 0038-6987 SN - 0584-8547 VL - 193 SP - 1 EP - 7 PB - Elsevier CY - Amsterdam AN - OPUS4-54866 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Veico, V. P. A1 - Karlagina, Yu. Yu. A1 - Samokhvalov, A. A. A1 - Polyakov, D. S. A1 - Manokhin, S. S. A1 - Radaev, M. M. A1 - Odintsova, G. V. A1 - Gornushkin, Igor B. T1 - Surface Structuring and Reverse Deposition of Nanoporous Titanium Oxides by Laser Ablation of Titanium in Air JF - Plasma Chemistry and Plasma Processing N2 - The deposition of titanium oxides during titanium laser ablation in air has been experimentally and numerically investigated. A titanium sample was irradiated by nanosecond pulses from an Yb-fber laser with a beam scanned across the sample surface for its texturing. As a result, the hierarchical structure was observed consisting of a microrelief formed by the laser ablation and a nanoporous coating formed by the reverse deposition from the laser induced plasma plume. The chemical and phase composition of the nanoporous coating, as well as the morphology and structure of the surface, were studied using scanning electron microscopy, atomic force microscopy, and X-ray microanalysis. It was found that the deposit consists mostly of porous TiO2 with 26% porosity and inclusions of TiO, Ti2O3, and Ti2O3N. Optical emission spectroscopy was used to control the plasma composition and estimate the effective temperature of plasma plume. The chemical-hydrodynamic model of laser induced plasma was developed to get a deeper insight into the deposition process. The model predicts that condensed titanium oxides, formed in peripheral plasma zones, gradually accumulate on the surface during the plasma plume evolution. A satisfactory agreement between the experimental and calculated chemical composition of the plasma plume as well as between the experimental and calculated composition and thickness of the deposited film was demonstrated. This allows a cautious conclusion that the formation of condensed oxides in the plasma and their consequent deposition onto the ablation surface are among the key mechanisms of formation of porous surface films. KW - Laser ablation KW - Laser induced plasma deposition KW - Surface coating KW - Titanium dioxide KW - Hydrodynamic model KW - Plasma chemistry KW - Emission spectroscopy PY - 2022 UR - https://nbn-resolving.org/urn:nbn:de:kobv:b43-548555 DO - https://doi.org/10.1007/s11090-022-10256-0 VL - 42 IS - 4 SP - 923 EP - 937 PB - Springer AN - OPUS4-54855 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Gornushkin, Igor B. T1 - Modeling Equilibrium Chemistry in Laser Induced Plasmas and Plasma Chemical Reactors N2 - A brief introduction will be given on modeling chemical reactions in laser induced plasmas using stoichiometric and non-stoichiometric approaches. Several applications will be considered, which can benefit from such modeling. Those include plasma enhanced chemical vapor deposition (PECVD), surface modification and surface coating, and molecular analysis by LIBS. Each application will be illustrated by simulations of relevant chemical systems. For PECVD, chemical systems are BCl3/H2/Ar, BF3/H2/Ar, BCl3/BF3, Mo/BF3/H2; for surface modification/coating it is Ti/air; for molecular LIBS they are CaCO3/Ar, Ca(OH)2/Ar, and CaCl2/Ar. Advantages and shortcomings of equilibrium chemical hydrodynamic models of laser induced plasmas will be discussed. T2 - 1st NIP Conference National Institute of Physics (IKF), the Albanian Academy of Sciences CY - Online meeting DA - 10.02.2022 KW - Laser ablation KW - Laser induced plasma deposition KW - Surface coating KW - Titanium dioxide KW - Emission spectroscopy KW - Hydrodynamic model KW - Plasma chemistry PY - 2022 AN - OPUS4-54328 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Gornushkin, Igor B. T1 - Deposition of Titanium Oxides by Nanosecond Laser Ablation: Simulation and Experiment N2 - Surface modification of titanium by laser ablation is investigated theoretically and experimentally. The modification consists in texturing the surface and redeposition of chemically transformed material from the ablation plasma. The redeposition is driven by the hydrodynamic flow in the plasma. Such surface modification improves the biocompatibility of titanium implants. T2 - 2022 Winter Conference on Plasma Spectrochemistry CY - Tucson, Arizona, USA DA - 17.01.2022 KW - Laser ablation KW - Laser induced plasma deposition KW - Surface coating KW - Titanium dioxide KW - Emission spectroscopy KW - Hydrodynamic model KW - Plasma chemistry PY - 2022 AN - OPUS4-54289 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Gornushkin, Igor B. A1 - Kornev, Roman A1 - Kornev, A. R. A1 - Ermakov, A. A. T1 - Laser dielectric breakdown as a novel method for producing molybdenum borides N2 - Superhard materials with a Vickers hardness in the range of 30-40 GPa are of great interest, both from a fundamental and a practical viewpoints, since they have outstanding mechanical, thermal and chemical properties. Molybdenum borides belong to this group of materials. A review of publications on synthesis of molybdenum boride indicates a) great interest in this superhard material and b) the need for new effective methods of its synthesis, especially in a nanocrystalline form. Very promising are the plasma-chemical methods based on laser induced breakdown. The breakdown can be created either in reactive gases containing volatile compounds of boron and molybdenum or on solid samples. For gas breakdown, molybdenum hexafluoride MoF6 and boron trifluoride BF3 were used in the mixture with hydrogen and argon; for solid breakdown, the pure molybdenum sample was ablated into the mixture of H2 and BF3. The plasma-chemical synthesis of MoxBy structures was carried out in the reactor shown in Figure. Laser breakdown was created by a pulsed Nd: YAG laser operating at 1064 nm with a 15 ns pulse duration, 5 Hz repetition rate, and 800 mJ pulse energy. The laser was focused by a 5 cm focal length lens to produce 26 J/cm3 energy density in the focal point. The ratios H2:BF3: MoF6 = 5:2:1 and H2:BF3 = 3:1 were used in a pressure range 30 - 760 Torr. After ablation in the mixture H2 + BF3 + MoF6, the deposit contained an amorphous phase with a small impurity of crystalline molybdenum and no boride phase. After ablation of metallic Mo into H2 + BF3, the main phase was MoB2 in the form of nano dispersed powder with an average grain size of 100 nm. The degree of conversion of boron trifluoride and the yield of molybdenum boride were studied as a function of pressure. It was established that 30 Torr is optimal for the formation of MoB2. This work was supported by the Russian Science Foundation grant No. 20-13-00035. T2 - Euro-Mediterranean Symposium on Laser-Induced Breakdown Spectroscopy CY - Online meeting DA - 29.11.2021 KW - Plasma enhanced chemical deposition KW - Laser induced plasma KW - Plasma chemistry KW - Molybdenum boride PY - 2021 AN - OPUS4-53901 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Gornushkin, Igor B. A1 - Kornev, R. A. A1 - Veiko, V. P. T1 - Molecule formation in reactive LIBS plasmas: model and experiment N2 - Formation and detection of molecules in laser induced plasmas (LIP) is a hot topic. In analytical plasmas like LIBS, the detection of molecules is important for identification of geological and other materials, analysis of isotopes and difficult elements (Cl, F, etc.) via molecular emission. In chemical plasmas, like PECVD (plasma enhanced chemical vapor deposition) or PLD (pulsed laser deposition), molecules formed in the plasma determine a composition and a thickness of deposits. Similarly, molecules play an important role in microstructuring and oxidizing metal surfaces by laser ablation. It is unfortunate that different communities, which utilize plasma methods and seek for solutions of similar problems, do not strongly overlap, and do not fully use knowledge accumulated by each other. In this presentation, mechanisms of formation of molecules will be analyzed on the example of LIPs used for chemical vapor deposition and metal microstructuring. Theoretical analysis includes equilibrium chemistry calculations combined with plasma hydrodynamics. First, LIP excited in a gas mixture of BCl3 or BF3 with H2 or CH4 will be analyzed; this chemical system is used for obtaining deposits of refractory solid boron and boron carbide. Second, a breakdown in the SiF4 + SiCl4 gas mixtures will be described; this method allows synthesis of fluorochlorosilanes SiFxCl4-x (x = 1, 2, 3), the good etching agents (Figure). Third, solid ablation of Mo in BF3+H2 and Ti in air will be considered aimed at obtaining deposits of high hardness MoxBy and films of TixOy on textured Ti surfaces, correspondingly. In experiment, reaction gases before and after laser illumination, and solid deposits are analyzed by optical emission spectroscopy (OES), IR and mass spectrometry (MS), SEM, X-ray, and AFM. It will be shown that the hydrodynamic-chemical model adequately predicts the composition of LIPs, zones of molecular formation, dependence on reactant stoichiometry, plasma temperature and pressure. T2 - Euro-Mediterranean Symposium on Laser-Induced Breakdown Spectroscopy CY - Gijon, Spain DA - 29.11.2021 KW - Laser induced plasma KW - Plasma chemistry KW - Molecules formation KW - Plasma enhanced chemical deposition PY - 2021 AN - OPUS4-53850 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Gornushkin, Igor B. T1 - model of laser induced plasma relevant to structuring and coating of titanium implants N2 - The presentation will give a brief overview of the processes occurring in laser-induced plasma and methods of modeling these processes. In particular, a chemical-hydrodynamic model will be considered, which is related to the modification of the surface of metallic titanium by laser pulses. The details and simplifications of this model, its shortcomings and the possibilities of their elimination will be discussed. This model is related to the structuring of the surface of dental implants with a laser and the deposition of an oxide film on it. T2 - THE 2-nd THEMATIC INTERNATIONAL SCIENTIFIC AUTUMN SCHOOL ON LASER MICRO- & NANOTHECHNOLOGIES: 2021 – BIOMEDICAL TECHNOLOGIES CY - St. Petersburg, Russia DA - 09.11.2021 KW - Laser ablation KW - Laser induced plasma deposition KW - Surface coating KW - Emission spectroscopy KW - Hydrodynamic model KW - Plasma chemistry PY - 2021 AN - OPUS4-53718 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Gornushkin, Igor B. T1 - Modeling Equilibrium Chemistry in Laser Induced Plasmas and Plasma Chemical Reactors N2 - A brief introduction will be given on modeling chemical reactions in laser induced plasmas using stoichiometric and non-stoichiometric approaches. Several applications will be considered, which can benefit from such modeling. Those include plasma enhanced chemical vapor deposition (PECVD), surface modification and surface coating, and molecular analysis by LIBS. Each application will be illustrated by simulations of relevant chemical systems. For PECVD, chemical systems are BCl3/H2/Ar, BF3/H2/Ar, BCl3/BF3, Mo/BF3/H2; for surface modification/coating it is Ti/air; for molecular LIBS they are CaCO3/Ar, Ca(OH)2/Ar, and CaCl2/Ar. Advantages and shortcomings of equilibrium chemical hydrodynamic models of laser induced plasmas will be discussed. T2 - Moscow University, Department of Chemistry CY - Moscow, Russia DA - 26.10.2021 KW - Laser ablation KW - Laser induced plasma deposition KW - Emission spectroscopy KW - Surface coating KW - Hydrodynamic model KW - Plasma chemistry PY - 2021 AN - OPUS4-53629 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Gornushkin, Igor B. A1 - Sennikov, P. A1 - Kornev, R. T1 - Laser induced gas breakdown in reactive mixtures N2 - Plasma-chemical approach is used for synthesis of various gaseous, liquid, and solid substances since 1960th. Nowadays, the method of plasma enhanced chemical vapor deposition (PECVD) is used for production of thin films, protective coatings, carbon-based nanostructures, high purity isotopic materials, biomaterials, and other products. Plasma for PECVD is typically created in various electrical discharges, e.g. DC and AC glow discharges or discharges operated at audio (10-20 kHz), radio (13.56 MHz), and microwave (2.45 GHz) frequencies. Plasma induced by a laser, a laser induced plasma (LIP), is rarely used to deposit materials from the gas phase as in PECVD. This work is aimed at reviving interest to this latter technology and showing its efficiency and potential. We run several pilot experiments. First, LIP is excited in BCl3 or BF3 plus H2 or CH4 to evaluate the efficiency of deposition of solid boron and boron carbide, the materials, which are largely used for refractory coatings. Second, we investigate a possibility of synthesis of fluorochlorosilanes SiFxCl4-x (x = 1, 2, 3) by LIP induced in SiF4 + SiCl4 gas mixtures. Using fluorochlorosilanes with different combinations of F and Cl in the SiFxCly molecule may add flexibility in processes of silicon deposition and etching. Third, LIP is excited in reactive mixture MoF6+H2+BF3 or on a Mo target ablated into H2/BF3 atmosphere. The goal is obtaining superhard molybdenum borides MoB, Mo2B, or MoB2. The gases used and solid deposits are analyzed by optical emission spectroscopy (OES), IR and mass spectrometry (MS). We also model the plasma and perform static equilibrium chemistry calculations to see if the desired reaction products are thermodynamically favorable. Dynamic calculations of the expanding plasma plume are performed using a hydrodynamic code combined with the open source chemical software. T2 - SciX 2021, The Federation of Analytical Chemistry and Spectroscopy Societies (FACSS) CY - Providence, RI, USA DA - September 26, 2021 KW - Laser ablation KW - Laser induced plasma deposition KW - Emission spectroscopy KW - Surface coating KW - Plasma chemistry KW - Hydrodynamic model PY - 2021 AN - OPUS4-53560 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Gornushkin, Igor B. A1 - Veiko, V. P. A1 - Karlagina, J. J. A1 - Polyakov, D. S. A1 - Samokhvalov, A. A. T1 - Reverse deposition of TI-oxides under nanosecond laser ablation of TI N2 - Processes of laser induced oxidation of metals are typically studied in the framework of heterogeneous chemical reactions occurring on the irradiated surface, which lead to the formation of dense oxide films deposited on it. Such technology has many applications like color-laser marking technology and laser recording on thin metal films for creation of diffractive optical elements . Under the conditions of strong laser ablation, another oxidation mechanism becomes possible: evaporated atoms react with oxygen in a surrounding atmosphere and the products of such reaction are redeposited back onto the substrate. The chemical and phase composition of such deposited layer, its density, morphology and structure depend on the conditions of laser ablation. By varying these conditions, the main properties of such coating can be controlled that is important for some potential application (for example in biomedicine). In our report we present the study of the processes of redeposition of oxides structure under the conditions of multipulse nanosecond laser ablation of titanium (Grade 2) in air atmosphere at normal conditions. Our experiments show that titanium-implants with such deposited oxide layer have increased biocompatibility. Modelling of chemical reaction in laser-induced plasma coupled with experimental methods of plasma optical emission spectroscopy allows us to determine the types of main chemical reactions in laser plasma as well as it influences on the plume dynamics and vapor condensation kinetics. As a result, we propose the general physical picture of reverse deposition of oxides structure under the condition of strong nanosecond laser ablation. The formation of the titanium oxide precipitate is explained not only by collisions in the plasma, but also by the chemical interaction of titanium and oxygen, which leads to the formation of а low pressure area near the substrate and additionally stimulates the reverse deposition of oxides. We expect, similar processes are valid not only for titanium but also for other metals and, possibly, semiconductors. T2 - 28th International Conference on Advanced Laser Technologies CY - Online meeting DA - 06.09.2021 KW - Laser ablation KW - Laser induced plasma deposition KW - Surface coating KW - Emission spectroscopy KW - Titanium dioxide KW - Hydrodynamic model KW - Plasma chemistry PY - 2021 AN - OPUS4-53245 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Gornushkin, Igor B. A1 - Sennikov, P. G. A1 - Kornev, R. A. A1 - Polyakov, V. S. T1 - Equilibrium calculations for plasmas of volatile halides of III, IV and VI group elements mixed with H2 and H2 + CX4 (X = H, Cl, F) relevant to PECVD of isotopic materials JF - Journal of radioanalytical and nuclear chemistry N2 - The composition of hydrogen and hydrogen-methane plasmas containing ~10% of BX₃, SiX₄, GeX₄ (X = F, Cl), SF₆, MoF₆ and WF₆ is calculated for the temperature range ~300-4000 K using the equilibrium chemical model. The calculations provide valuable information about thermodynamic parameters (pressure, temperature) needed for condensation of pure elements (in H₂ plasma) and their carbides (in H₂ + CH₄ plasma) and about intermediate reaction products. Using volatile fluorides for plasma chemical deposition alleviates obtaining monoisotopic elements and their isotopic compounds because fluorine is monoisotopic. PECVD is promising method for one-step conversion of fluorides to elemental isotopes and their carbides. For fluorides, further insight is needed into properties of plasmas supported by different types of discharges. KW - Plasma chemistry KW - Modeling chemical reactions KW - Plasma enhanced chemical vapor deposition KW - Reduction of volatile chlorides and fluorides by hydrogen PY - 2020 DO - https://doi.org/10.1007/s10967-020-07295-2 VL - 326 IS - 1 SP - 407 EP - 421 PB - Springer CY - Dordrecht AN - OPUS4-51144 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -