TY - JOUR A1 - Schulze, Rolf-Dieter A1 - Friedrich, Jörg Florian T1 - Pulsed r.f. plasma for polymer film deposition with SEERS diagnostic JF - Surface and coatings technology T2 - 8th International Conference on Plasma Surface Engineering (PSE2002) CY - Garmisch-Partenkirchen, Germany DA - 2002-09-09 KW - C pulsed KW - C radio frequency KW - C plasma KW - D nitrogen KW - D oxygen KW - DX plasma deposition PY - 2002 SN - 0257-8972 SP - 405 PB - Elsevier Science CY - Lausanne AN - OPUS4-1615 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -