TY - CONF A1 - Haro-Poniatowski, E. A1 - Bonse, Jörn A1 - Mecalco, G. A1 - Acosta-Zepeda, C. A1 - Hernandez-Pozos, J. L. A1 - Batina, Nikola A1 - Morales-Reyes, I. T1 - Diffraction-assisted micropatterning of silicon by ns-laser irradiation T2 - Conference on Lasers and Electro-Optics CLEO 2014 T2 - Conference on Lasers and Electro-Optics CLEO 2014 CY - San José, CA, USA DA - 2014-06-08 PY - 2014 AN - OPUS4-30580 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -