TY - JOUR A1 - Senoner, Mathias A1 - Unger, Wolfgang T1 - Summary of ISO/TC 201 technical report: ISO/TR 19319:2013 - Surface chemical analysis - Fundamental approaches to determination of lateral resolution and sharpness in beam-based methods JF - Surface and interface analysis N2 - This Technical Report revises ISO/TR 19319:2003 - Surface chemical Analysis-Auger electron spectroscopy and X-ray photoelectron spectroscopy-Determination of lateral resolution, analysis area and sample area viewed by the analyser. The revised Technical Report gives a short introduction to basic models of image formation and introduces functions which characterize the performance of imaging instruments with respect to lateral resolution and sharpness. The determination of lateral resolution by imaging of square-wave gratings and the determination of sharpness by imaging of narrow stripes and straight edges are described in detail. Finally, physical factors affecting lateral resolution, analysis area and sample area viewed by the analyser are discussed. KW - CTF KW - ESF KW - Lateral resolution KW - LSF KW - MTF KW - Narrow stripe KW - Noise KW - PSF KW - Resolution criterion KW - Sharpness KW - Square-wave grating KW - Straight edge PY - 2013 DO - https://doi.org/10.1002/sia.5294 SN - 0142-2421 SN - 1096-9918 VL - 45 IS - 9 SP - 1313 EP - 1316 PB - Wiley CY - Chichester AN - OPUS4-29012 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -