TY - JOUR A1 - Graf, Nora A1 - Yegen, E. A1 - Lippitz, Andreas A1 - Treu, Dieter A1 - Wirth, Thomas A1 - Unger, Wolfgang T1 - Optimization of cleaning and aminosilanization protocols for Si wafers to be used as platforms for biochip microarrays by surface analysis (XPS, ToF-SIMS and NEXAFS spectroscopy) JF - Surface and interface analysis N2 - It is known that aminosilanized Si wafers may be used as microarray platforms. Results of an XPS study of a cleaning applied to Si wafers prior to aminosilanization are presented and discussed. Furthermore, the results of an aminosilanization protocol optimized in terms of nitrogen chemistry are described. After optimization of the protocol a free amine content of 94% was reached. The surface chemistry was investigated in this study by using XPS, time of flight (ToF)-SIMS and near-edge X-ray absorption fine structure (NEXAFS) spectroscopy. Reference to aminosilanization protocols reported in the literature has been made. KW - Aminosilanization KW - Si wafers KW - Microarray KW - XPS KW - ToF-SIMS KW - NEXAFS PY - 2008 DO - https://doi.org/10.1002/sia.2621 SN - 0142-2421 SN - 1096-9918 VL - 40 IS - 3-4 SP - 180 EP - 183 PB - Wiley CY - Chichester AN - OPUS4-17192 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -