TY - GEN A1 - Krüger, Jörg A1 - Kautek, Wolfgang A1 - Lenzner, M. A1 - Sartania, S. A1 - Spielmann, C. A1 - Krausz, F. ED - Dubowski, J. T1 - Structuring of dielectric and metallic materials with ultrashort laser pulses between 20 fs and 3 ps N2 - Laser-micromachining of barium aluminum borosilicate glass, fused silica and stainless steel has been extended down to a pulse duration of 20 fs generated by a Ti:sapphire laser system at a wavelength of 0.8 micrometer. A systematic study shows that, below 100 fs, an enhanced precision and a substantial decrease of the ablation threshold fluence in comparison to pulse laser processing with pulses in the picosecond and nanosecond range could be achieved. The physical mechanism and the technical relevance of this novel microtechnology is discussed. T2 - Conference CY - San José, CA, USA DA - 1997-02-10 KW - Ablation KW - Laser processing KW - Micromachining KW - Structuring KW - Femtosecond pulse laser KW - Glass KW - Silica KW - Steel PY - 1997 SN - 0-8194-2402-1 DO - https://doi.org/10.1117/12.273740 SN - 1605-7422 N1 - Serientitel: SPIE proceedings series – Series title: SPIE proceedings series IS - 2991 SP - 40 EP - 47 PB - SPIE CY - Bellingham, Wash. AN - OPUS4-11893 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - GEN A1 - Krüger, Jörg A1 - Lenzner, Matthias A1 - Martin, Sven A1 - Lenner, M. A1 - Spielmann, C. A1 - Fiedler, A. A1 - Kautek, Wolfgang ED - Phipps, C. R. T1 - Femtosecond laser induced damage in absorbing filters used for laser protection N2 - Damage experiments of absorbing filters (Schott BG18 and BG36) were performed with Ti:sapphire laser pulses with durations from 30 fs to 340 fs (800 nm, 1 kHz) in air. The direct focusing technique was employed under single- and multi-pulse irradiation conditions. Ablation threshold fluences were determined from a semi-logarithmic plot of the ablation crater diameter vs. laser fluence. The damage threshold fluence decreases for shorter pulse durations. In the investigated pulse duration range, the measured multi-pulse ablation threshold fluences are practically similar to those of undoped glass material (~1 Jcm-2). That means that the multi-pulse ablation threshold is independent on the doping level of the filters. For more than 100 pulses per spot and all pulse durations applied, the threshold fluence saturates. This leads to technically relevant damage threshold values in the femtosecond laser pulse duration domain. T2 - 4th SPIE's International Conference on High-Power Laser Ablation CY - Taos, NM, USA DA - 2002-04-22 KW - Ablation KW - Damage KW - Eye protection KW - Femtosecond pulse laser KW - Incubation KW - Laser safety KW - Threshold fluence PY - 2002 SN - 0-8194-4524-X DO - https://doi.org/10.1117/12.482109 SN - 1605-7422 N1 - Serientitel: SPIE proceedings series – Series title: SPIE proceedings series VL - 1 IS - 4760 SP - 398 EP - 405 PB - SPIE CY - Bellingham, Wash. AN - OPUS4-1550 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -