63571 2025 eng poster 0 -- -- -- The integration of photonic sensors into compact systems requires space-efficient solutions, such as the backside release of waveguides on silicon-on-insulator (SOI) platforms. This study presents the design, fabrication, and characterization of fully backside-released micro-ring resonators (MRRs) using the IHP SG25H5EPIC technology. The performance of rib and strip waveguides released by either dry or wet etching of the buried oxide (BOX) layer is evaluated. While wet etching provides low-loss release of rib waveguides, dry etching is required for the release of strip waveguides but results in increased waveguide losses and reduced quality factors. The effects of these release methods on critical coupling conditions, extinction ratio (ER), full width at half maximum (FWHM), and sensor performance are analyzed. The findings confirm that both etching strategies yield structures suitable for photonic sensing, with backside release enabling co-integration with microfluidic and optoelectronic components. These results contribute to the advancement of high-performance, integrated silicon photonic sensors. 10.1117/12.3056481 https://www.spiedigitallibrary.org/conference-proceedings-of-spie/13527/135270U/Optimization-of-local-backside-released-micro-ring-resonators-for-sensing/10.1117/12.3056481.short SPIE Optics + Optoelectronics 2025 Prague, Czech Republic 23.05.2025 publish Tabea Fünning eng uncontrolled Rib and strip waveguides eng uncontrolled Wet and dry etching eng uncontrolled Microfluidics eng uncontrolled Biosensor eng uncontrolled Germanium photodiode eng uncontrolled Q-Factor Analytische Chemie 1 Analytische Chemie; Referenzmaterialien 1.5 Proteinanalytik Chemie und Prozesstechnik Chemische Charakterisierung und Spurenanalytik Datei im Netzwerk der BAM verfügbar ("Closed Access") Präsentation