45951 2018 eng 762 763 S1 (August) 24 article Cambridge University Press New York, NY, U.S.A. 0 -- -- -- For the determination of porosity of Ir oxide thin films, electron probe microanalysis (EPMA) can be used as part of a combined SEM/EDS/STRATAGem analysis. The mass deposition (in μg cm-2) of films was calculated with the analysis software STRATAGem via k-values measured with EDS. The average density of coated films was obtained from the mass deposition and the film thickness as measured by the cross-section SEM. The porosity was calculated by dividing the average film density by the bulk (theoretical) density of the film material. Film porosities were counterchecked by spectroscopic ellipsometry (SE) using the Bruggeman effective medium approximation (BEMA). The results obtained by both analytical approaches/methods used, SEM/EDS/STRATAGem and SE were in good agreement. Microscopy and Microanalysis 10.1017/S1431927618004300 https://www.cambridge.org/core/journals/microscopy-and-microanalysis/article/analysis-of-mesoporous-iridium-oxide-thin-films-by-the-combined-methodical-approach-semedsstratagem/7607018338B542D8B8C4D944392781EF 1431-9276 1435-8115 René Sachse Andreas Hertwig R. Kraehnert Vasile-Dan Hodoroaba eng uncontrolled Porous thin films eng uncontrolled Iridium oxide eng uncontrolled Electron probe microanalysis (EPMA) eng uncontrolled Spectroscopic ellipsometry Analytische Chemie Verlagsliteratur Datei im Netzwerk der BAM verfügbar ("Closed Access")