<?xml version="1.0" encoding="utf-8"?>
<export-example>
  <doc>
    <id>1615</id>
    <completedYear/>
    <publishedYear>2002</publishedYear>
    <thesisYearAccepted/>
    <language>eng</language>
    <pageFirst>405</pageFirst>
    <pageLast/>
    <pageNumber/>
    <edition/>
    <issue/>
    <volume/>
    <type>article</type>
    <publisherName>Elsevier Science</publisherName>
    <publisherPlace>Lausanne</publisherPlace>
    <creatingCorporation/>
    <contributingCorporation/>
    <belongsToBibliography>1</belongsToBibliography>
    <completedDate>--</completedDate>
    <publishedDate>--</publishedDate>
    <thesisDateAccepted>--</thesisDateAccepted>
    <title language="eng">Pulsed r.f. plasma for polymer film deposition with SEERS diagnostic</title>
    <parentTitle language="eng">Surface and coatings technology</parentTitle>
    <identifier type="old">1442</identifier>
    <identifier type="issn">0257-8972</identifier>
    <enrichment key="bibliotheksstandort">Sonderstandort: Publica-Schrank</enrichment>
    <enrichment key="bibliotheksstandort">ZS 45</enrichment>
    <enrichment key="eventName">8th International Conference on Plasma Surface Engineering (PSE2002)</enrichment>
    <enrichment key="eventPlace">Garmisch-Partenkirchen, Germany</enrichment>
    <enrichment key="eventStart">2002-09-09</enrichment>
    <enrichment key="eventEnd">2002-09-13</enrichment>
    <enrichment key="date_peer_review">10.03.2003</enrichment>
    <author>Rolf-Dieter Schulze</author>
    <author>Jörg Florian Friedrich</author>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>C pulsed</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>C radio frequency</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>C plasma</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>D nitrogen</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>D oxygen</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>DX plasma deposition</value>
    </subject>
    <collection role="literaturgattung" number="">Verlagsliteratur</collection>
    <collection role="fulltextaccess" number="">Physisches Exemplar in der Bibliothek der BAM vorhanden ("Hardcopy Access")</collection>
  </doc>
</export-example>
