<?xml version="1.0" encoding="utf-8"?>
<export-example>
  <doc>
    <id>825</id>
    <completedYear/>
    <publishedYear>1999</publishedYear>
    <thesisYearAccepted/>
    <language>eng</language>
    <pageFirst>369</pageFirst>
    <pageLast>371</pageLast>
    <pageNumber/>
    <edition/>
    <issue>3</issue>
    <volume>68</volume>
    <type>article</type>
    <publisherName>Springer</publisherName>
    <publisherPlace>Berlin</publisherPlace>
    <creatingCorporation/>
    <contributingCorporation/>
    <belongsToBibliography>1</belongsToBibliography>
    <completedDate>--</completedDate>
    <publishedDate>--</publishedDate>
    <thesisDateAccepted>--</thesisDateAccepted>
    <title language="eng">Precision laser ablation of dielectrics in the 10-fs regime</title>
    <abstract language="eng">Zusammenfassung 

Laser pulses in the 10-fs domain provide a quality of micromachining of fused silica and borosilicate glass that is unobtainable with longer pulses in the range of several 100 femtoseconds up to picoseconds. The shortening of the pulses reduces the statistical behavior of the material removal and the ablation process thus attains a more deterministic and reproducible character. The improved reproducibility of ablation is accompanied by significantly smoother morphology. This offers the potential for lateral and vertical machining precision of the order of 100 nm and 10 nm, respectively.</abstract>
    <parentTitle language="eng">Applied physics A</parentTitle>
    <identifier type="old">297</identifier>
    <identifier type="doi">10.1007/s003390050906</identifier>
    <identifier type="issn">0947-8396</identifier>
    <enrichment key="date_peer_review">28.07.2000</enrichment>
    <author>Jörg Krüger</author>
    <author>Wolfgang Kautek</author>
    <author>M. Lenzner</author>
    <author>F. Krausz</author>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>Laser ablation</value>
    </subject>
    <collection role="literaturgattung" number="">Verlagsliteratur</collection>
    <collection role="fulltextaccess" number="">Weder Datei noch physisches Exemplar vorhanden ("No Access")</collection>
  </doc>
</export-example>
