<?xml version="1.0" encoding="utf-8"?>
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  <doc>
    <id>33837</id>
    <completedYear/>
    <publishedYear>2015</publishedYear>
    <thesisYearAccepted/>
    <language>eng</language>
    <pageFirst>Chapter P7, 821</pageFirst>
    <pageLast>825</pageLast>
    <pageNumber/>
    <edition/>
    <issue/>
    <volume/>
    <type>conferenceobject</type>
    <publisherName/>
    <publisherPlace/>
    <creatingCorporation>AMA Service GmbH</creatingCorporation>
    <contributingCorporation/>
    <belongsToBibliography>0</belongsToBibliography>
    <completedDate>--</completedDate>
    <publishedDate>--</publishedDate>
    <thesisDateAccepted>--</thesisDateAccepted>
    <title language="eng">New reference material for imaging XPS (X-ray photoelectron spectroscopy) instrument characterization</title>
    <abstract language="eng">Reference materials without variations in topography are essential for the characterization of imaging XPS (X-ray Photoelectron Spectroscopy) Instruments. Therefore a new fabrication process for this kind of zero-topography reference material was developed at PTB and resulted in first prototypes. The fabrication process and first measurement results will be presented in this paper.</abstract>
    <parentTitle language="eng">Sensor 2015 - 17th International conference on sensors and measurement technology (Proceedings - AMA conferences 2015)</parentTitle>
    <identifier type="old">36960</identifier>
    <identifier type="isbn">978-3-9813484-8-4</identifier>
    <identifier type="doi">10.5162/sensor2015/P7.1</identifier>
    <enrichment key="eventName">Sensor 2015 - 17th International conference on sensors and measurement technology</enrichment>
    <enrichment key="eventPlace">Nuremberg, Germany</enrichment>
    <enrichment key="eventStart">19.05.2015</enrichment>
    <enrichment key="eventEnd">21.05.2015</enrichment>
    <author>S. Bütefisch</author>
    <author>T. Weimann</author>
    <author>I. Busch</author>
    <author>H.-U. Danzebrink</author>
    <author>Thomas Gross</author>
    <author>Wolfgang Unger</author>
    <author>Thomas Wirth</author>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>Imaging XPS</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>Reference material</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>Topography free</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>Micro technology</value>
    </subject>
    <collection role="literaturgattung" number="">Verlagsliteratur</collection>
    <collection role="fulltextaccess" number="">Datei im Netzwerk der BAM verfügbar ("Closed Access")</collection>
  </doc>
</export-example>
