<?xml version="1.0" encoding="utf-8"?>
<export-example>
  <doc>
    <id>19976</id>
    <completedYear/>
    <publishedYear>2009</publishedYear>
    <thesisYearAccepted/>
    <language>eng</language>
    <pageFirst>1360</pageFirst>
    <pageLast>1364</pageLast>
    <pageNumber/>
    <edition/>
    <issue>11</issue>
    <volume>109</volume>
    <type>article</type>
    <publisherName>Elsevier</publisherName>
    <publisherPlace>New York, NY</publisherPlace>
    <creatingCorporation/>
    <contributingCorporation/>
    <belongsToBibliography>1</belongsToBibliography>
    <completedDate>--</completedDate>
    <publishedDate>--</publishedDate>
    <thesisDateAccepted>--</thesisDateAccepted>
    <title language="eng">Advanced thin film technology for ultrahigh resolution X-ray microscopy</title>
    <abstract language="eng">Further progress in the spatial resolution of X-ray microscopes is currently impaired by fundamental limitations in the production of X-ray diffractive lenses. Here, we demonstrate how advanced thin film technologies can be applied to boost the fabrication and characterization of ultrahigh resolution X-ray optics. Specifically, Fresnel zone plates were fabricated by combining electron-beam lithography with atomic layer deposition and focused ion beam induced deposition. They were tested in a scanning transmission X-ray microscope at 1.2 keV photon energy using line pair structures of a sample prepared by metalorganic vapor phase epitaxy. For the first time in X-ray microscopy, features below 10 nm in width were resolved.</abstract>
    <parentTitle language="eng">Ultramicroscopy</parentTitle>
    <identifier type="old">22240</identifier>
    <identifier type="doi">10.1016/j.ultramic.2009.07.005</identifier>
    <identifier type="issn">0304-3991</identifier>
    <enrichment key="bibliotheksstandort">Sonderstandort: Publica-Schrank</enrichment>
    <enrichment key="date_peer_review">02.10.2009</enrichment>
    <author>J. Vila-Comamala</author>
    <author>K. Jefimovs</author>
    <author>J. Raabe</author>
    <author>T. Pilvi</author>
    <author>R.H. Fink</author>
    <author>Mathias Senoner</author>
    <author>A. Maaßdorf</author>
    <author>M. Ritala</author>
    <author>C. David</author>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>X-ray microscopy</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>X-ray diffractive optics</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>Electron-beam lithography</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>Atomic layer deposition</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>BAM-L200</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>Laterale Auflösung</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>Referenzmaterial</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>Röntgenmikroskopie</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>Zonenplatte</value>
    </subject>
    <collection role="literaturgattung" number="">Verlagsliteratur</collection>
    <collection role="fulltextaccess" number="">Physisches Exemplar in der Bibliothek der BAM vorhanden ("Hardcopy Access")</collection>
  </doc>
  <doc>
    <id>24079</id>
    <completedYear/>
    <publishedYear>2011</publishedYear>
    <thesisYearAccepted/>
    <language>deu</language>
    <pageFirst/>
    <pageLast/>
    <pageNumber/>
    <edition/>
    <issue/>
    <volume/>
    <type>poster</type>
    <publisherName/>
    <publisherPlace/>
    <creatingCorporation/>
    <contributingCorporation/>
    <belongsToBibliography>0</belongsToBibliography>
    <completedDate>--</completedDate>
    <publishedDate>--</publishedDate>
    <thesisDateAccepted>--</thesisDateAccepted>
    <title language="deu">Characterization of a 20 nm Hard X-ray Focus by Ptychographic Coherent Diffractive Imaging</title>
    <parentTitle language="deu">SPIE Smart Structures/ NDE</parentTitle>
    <identifier type="old">26707</identifier>
    <enrichment key="eventName">SPIE Smart Structures/ NDE</enrichment>
    <enrichment key="eventPlace">San Diego, CA, USA</enrichment>
    <enrichment key="eventStart">2011-03-06</enrichment>
    <enrichment key="eventEnd">2011-03-10</enrichment>
    <author>J. Vila-Comamala</author>
    <collection role="fulltextaccess" number="">Weder Datei noch physisches Exemplar vorhanden ("No Access")</collection>
    <collection role="literaturgattung" number="">Präsentation</collection>
  </doc>
  <doc>
    <id>24080</id>
    <completedYear/>
    <publishedYear>2011</publishedYear>
    <thesisYearAccepted/>
    <language>deu</language>
    <pageFirst/>
    <pageLast/>
    <pageNumber/>
    <edition/>
    <issue/>
    <volume/>
    <type>lecture</type>
    <publisherName/>
    <publisherPlace/>
    <creatingCorporation/>
    <contributingCorporation/>
    <belongsToBibliography>0</belongsToBibliography>
    <completedDate>--</completedDate>
    <publishedDate>--</publishedDate>
    <thesisDateAccepted>--</thesisDateAccepted>
    <title language="deu">Characterization of a 20 nm hard X-ray focus by ptychographic coherent diffractive imaging</title>
    <parentTitle language="deu">JUM@P ´11: Second Joint Users´Meeting@PSI</parentTitle>
    <identifier type="old">26708</identifier>
    <enrichment key="eventName">JUM@P ´11: Second Joint Users´Meeting@PSI</enrichment>
    <enrichment key="eventPlace">Villigen, Switzerland</enrichment>
    <enrichment key="eventStart">2011-09-15</enrichment>
    <enrichment key="eventEnd">2011-09-16</enrichment>
    <enrichment key="InvitedTalks">0</enrichment>
    <author>J. Vila-Comamala</author>
    <collection role="fulltextaccess" number="">Weder Datei noch physisches Exemplar vorhanden ("No Access")</collection>
    <collection role="literaturgattung" number="">Präsentation</collection>
  </doc>
  <doc>
    <id>24615</id>
    <completedYear/>
    <publishedYear>2011</publishedYear>
    <thesisYearAccepted/>
    <language>eng</language>
    <pageFirst>21333</pageFirst>
    <pageLast>21344</pageLast>
    <pageNumber/>
    <edition/>
    <issue>22</issue>
    <volume>19</volume>
    <type>article</type>
    <publisherName>Optical Society of America</publisherName>
    <publisherPlace>Washington, DC</publisherPlace>
    <creatingCorporation/>
    <contributingCorporation/>
    <belongsToBibliography>1</belongsToBibliography>
    <completedDate>--</completedDate>
    <publishedDate>--</publishedDate>
    <thesisDateAccepted>--</thesisDateAccepted>
    <title language="eng">Characterization of high-resolution diffractive X-ray optics by ptychographic coherent diffractive imaging</title>
    <abstract language="eng">We have employed ptychographic coherent diffractive imaging to completely characterize the focal spot wavefield and wavefront aberrations of a high-resolution diffractive X-ray lens. The ptychographic data from a strongly scattering object was acquired using the radiation cone emanating from a coherently illuminated Fresnel zone plate at a photon energy of 6.2 keV. Reconstructed images of the object were retrieved with a spatial resolution of 8 nm by combining the difference-map phase retrieval algorithm with a non-linear optimization refinement. By numerically propagating the reconstructed illumination function, we have obtained the X-ray wavefield profile of the 23 nm round focus of the Fresnel zone plate (outermost zone width, Δr = 20 nm) as well as the X-ray wavefront at the exit pupil of the lens. The measurements of the wavefront aberrations were repeatable to within a root mean square error of 0.006 waves, and we demonstrate that they can be related to manufacturing aspects of the diffractive optical element and to errors on the incident X-ray wavefront introduced by the upstream beamline optics.</abstract>
    <parentTitle language="eng">Optics express</parentTitle>
    <identifier type="old">27289</identifier>
    <identifier type="doi">10.1364/OE.19.021333</identifier>
    <identifier type="issn">1094-4087</identifier>
    <enrichment key="date_peer_review">28.10.2011</enrichment>
    <author>J. Vila-Comamala</author>
    <author>A. Diaz</author>
    <author>M. Guizar-Sicairos</author>
    <author>Alexandre Mantion</author>
    <author>C.M. Kewish</author>
    <author>A. Menzel</author>
    <author>O. Bunk</author>
    <author>C. David</author>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>Fourier zone plate</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>Coherent diffraction imaging</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>Ptychography</value>
    </subject>
    <collection role="literaturgattung" number="">Verlagsliteratur</collection>
    <collection role="fulltextaccess" number="">Datei im Netzwerk der BAM verfügbar ("Closed Access")</collection>
  </doc>
  <doc>
    <id>24613</id>
    <completedYear/>
    <publishedYear>2011</publishedYear>
    <thesisYearAccepted/>
    <language>eng</language>
    <pageFirst>81390E-1</pageFirst>
    <pageLast>81390E-7</pageLast>
    <pageNumber/>
    <edition/>
    <issue/>
    <volume>8139</volume>
    <type>conferenceobject</type>
    <publisherName/>
    <publisherPlace/>
    <creatingCorporation>International society for optics and photonics (SPIE)</creatingCorporation>
    <contributingCorporation/>
    <belongsToBibliography>0</belongsToBibliography>
    <completedDate>--</completedDate>
    <publishedDate>--</publishedDate>
    <thesisDateAccepted>--</thesisDateAccepted>
    <title language="eng">Characterization of a 20-nm hard X-ray focus by ptychographic coherent diffractive imaging</title>
    <abstract language="eng">Recent advances in the fabrication of diffractive X-ray optics have boosted hard X-ray microscopy into spatial resolutions of 30 nm and below. Here, we demonstrate the fabrication of zone-doubled Fresnel zone plates for multi-keV photon energies (4-12 keV) with outermost zone widths down to 20 nm. However, the characterization of such elements is not straightforward using conventional methods such as knife edge scans on well-characterized test objects. To overcome this limitation, we have used ptychographic coherent diffractive imaging to characterize a 20 nm-wide X-ray focus produced by a zone-doubled Fresnel zone plate at a photon energy of 6.2 keV. An ordinary scanning transmission X-ray microscope was modified to acquire the ptychographic data from a strongly scattering test object. The ptychographic algorithms allowed for the reconstruction of the image of the test object as well as for the reconstruction of the focused hard X-ray beam waist, with high spatial resolution and dynamic range. This method yields a full description of the focusing performance of the Fresnel zone plate and we demonstrate the usefulness ptychographic coherent diffractive imaging for metrology and alignment of nanofocusing diffractive X-ray lenses.</abstract>
    <parentTitle language="eng">Advances in X-Ray/EUV optics and components VI (Proceedings of SPIE)</parentTitle>
    <identifier type="old">27287</identifier>
    <identifier type="doi">10.1117/12.893235</identifier>
    <identifier type="issn">0277-786X</identifier>
    <note>Serientitel: Proceedings of SPIE – Series title: Proceedings of SPIE</note>
    <enrichment key="eventName">SPIE Optics and photonics</enrichment>
    <enrichment key="eventPlace">San Diego, USA</enrichment>
    <enrichment key="eventStart">20.08.2011</enrichment>
    <enrichment key="eventEnd">25.08.2011</enrichment>
    <author>J. Vila-Comamala</author>
    <author>A. Diaz</author>
    <author>M. Guizar-Sicairos</author>
    <author>S. Gorelick</author>
    <author>V.A. Guzenko</author>
    <author>P. Karvinen</author>
    <author>C.M. Kewish</author>
    <author>E. Färm</author>
    <author>M. Ritala</author>
    <author>Alexandre Mantion</author>
    <author>O. Bunk</author>
    <author>A. Menzel</author>
    <author>C. David</author>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>X-ray imaging</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>Diffractive X-ray optics</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>Electron beam lithography</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>Ptychographic coherent diffractive imaging</value>
    </subject>
    <collection role="literaturgattung" number="">Verlagsliteratur</collection>
    <collection role="fulltextaccess" number="">Datei im Netzwerk der BAM verfügbar ("Closed Access")</collection>
  </doc>
</export-example>
