<?xml version="1.0" encoding="utf-8"?>
<export-example>
  <doc>
    <id>4118</id>
    <completedYear/>
    <publishedYear>2003</publishedYear>
    <thesisYearAccepted/>
    <language>eng</language>
    <pageFirst>57 pages</pageFirst>
    <pageLast/>
    <pageNumber/>
    <edition/>
    <issue/>
    <volume/>
    <type>report</type>
    <publisherName/>
    <publisherPlace/>
    <creatingCorporation>National Physical Laboratory, Teddington, Middlesex, UK</creatingCorporation>
    <contributingCorporation/>
    <belongsToBibliography>0</belongsToBibliography>
    <completedDate>--</completedDate>
    <publishedDate>--</publishedDate>
    <thesisDateAccepted>--</thesisDateAccepted>
    <title language="eng">Ultra-thin SiO2 on Si, Part V: Results of a CCQM Pilot Study of Thickness Measurements</title>
    <parentTitle language="eng">NPL Report COAM S 14</parentTitle>
    <identifier type="old">4302</identifier>
    <identifier type="issn">1473-2734</identifier>
    <enrichment key="bibliotheksstandort">Sonderstandort: Publica-Schrank</enrichment>
    <author>M.P. Seah</author>
    <author>S.J. Spencer</author>
    <author>F. Bensebaa</author>
    <author>I. Vickridge</author>
    <author>H. Danzebrink</author>
    <author>M. Krumrey</author>
    <author>Thomas Gross</author>
    <author>Werner Österle</author>
    <author>E. Wendler</author>
    <author>B. Rheinländer</author>
    <author>Y. Azuma</author>
    <author>I. Kojima</author>
    <author>N. Suzuki</author>
    <author>M. Suzuki</author>
    <author>S. Tanuma</author>
    <author>D.W. Moon</author>
    <author>H.J. Lee</author>
    <author>H.M. Cho</author>
    <author>H.Y. Chen</author>
    <author>A. T. S. Wee</author>
    <author>T. Osipowicz</author>
    <author>J.S. Pan</author>
    <author>W.A. Jordaan</author>
    <author>R. Hauert</author>
    <author>U. Klotz</author>
    <author>C. van der Marel</author>
    <author>M. Verheijen</author>
    <author>Y. Tamminga</author>
    <author>C. Jeynes</author>
    <author>P. Bailey</author>
    <author>S. Biswas</author>
    <author>U. Falke</author>
    <author>N.V. Nguyen</author>
    <author>D. Chandler-Horowitz</author>
    <author>J.R. Ehrstein</author>
    <author>D. Muller</author>
    <author>J.A. Dura</author>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>SiO2</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>Thin films</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>Thickness</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>XPS</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>Ellipsometry</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>TEM</value>
    </subject>
    <collection role="literaturgattung" number="">Verlagsliteratur</collection>
    <collection role="fulltextaccess" number="">Physisches Exemplar in der Bibliothek der BAM vorhanden ("Hardcopy Access")</collection>
  </doc>
</export-example>
