<?xml version="1.0" encoding="utf-8"?>
<export-example>
  <doc>
    <id>775</id>
    <completedYear/>
    <publishedYear>1999</publishedYear>
    <thesisYearAccepted/>
    <language>eng</language>
    <pageFirst>S759</pageFirst>
    <pageLast>S761</pageLast>
    <pageNumber/>
    <edition/>
    <issue>7</issue>
    <volume>69</volume>
    <type>article</type>
    <publisherName>Springer</publisherName>
    <publisherPlace>Berlin</publisherPlace>
    <creatingCorporation/>
    <contributingCorporation/>
    <belongsToBibliography>1</belongsToBibliography>
    <completedDate>--</completedDate>
    <publishedDate>--</publishedDate>
    <thesisDateAccepted>--</thesisDateAccepted>
    <title language="eng">Morphological and mechanical investigations of bariumalumoborosilicate glass surfaces processed with 700-fs laser pulses</title>
    <abstract language="eng">We present surface micro-modifications of bariumalumoborosilicate glasses with a high transformation temperature near 700 °C. Laser processing of the glass substrate was realized by using ultra-short laser pulses at 800 nm. The morphological conversion of the laser-treated surfaces was characterized by scanning force microscopy and nano-indentation. A hardness increase by at least a factor of six on the laser ablation crater edge relative to illuminated non- ablated areas shows that the material in the crater walls underwent drastic morphological and mechanical changes. In this heat- and shock-affected zone, the material became more elastic as a result of increased stress.</abstract>
    <parentTitle language="eng">Applied physics A</parentTitle>
    <identifier type="old">236</identifier>
    <identifier type="doi">10.1007/s003390051523</identifier>
    <identifier type="issn">0947-8396</identifier>
    <enrichment key="eventName">5th International Conference on Laser Ablation ; COLA '99</enrichment>
    <enrichment key="eventPlace">Göttingen, Germany</enrichment>
    <enrichment key="eventStart">1999-07-19</enrichment>
    <enrichment key="eventEnd">1999-07-23</enrichment>
    <enrichment key="date_peer_review">18.07.2000</enrichment>
    <author>Wolfgang Kautek</author>
    <author>Pascale Rudolph</author>
    <author>Jörg Krüger</author>
    <author>A. Rosenfeld</author>
    <author>M. Lorenz</author>
    <author>D. Ashkenasi</author>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>Bariumalumoborosilicate glass surfaces</value>
    </subject>
    <collection role="literaturgattung" number="">Verlagsliteratur</collection>
    <collection role="fulltextaccess" number="">Weder Datei noch physisches Exemplar vorhanden ("No Access")</collection>
  </doc>
  <doc>
    <id>985</id>
    <completedYear/>
    <publishedYear>2000</publishedYear>
    <thesisYearAccepted/>
    <language>deu</language>
    <pageFirst>7</pageFirst>
    <pageLast>36</pageLast>
    <pageNumber/>
    <edition/>
    <issue>12</issue>
    <volume/>
    <type>bookpartcollection</type>
    <publisherName>VDI-Verl.</publisherName>
    <publisherPlace>Düsseldorf</publisherPlace>
    <creatingCorporation>Technologiezentrum Physikalische Technologien</creatingCorporation>
    <contributingCorporation/>
    <belongsToBibliography>0</belongsToBibliography>
    <completedDate>--</completedDate>
    <publishedDate>--</publishedDate>
    <thesisDateAccepted>--</thesisDateAccepted>
    <title language="deu">Mikrostrukturierung von Glas zur Erzeugung kristalliner Si-Schichten</title>
    <parentTitle language="deu">Laser in der Materialbearbeitung</parentTitle>
    <identifier type="old">490</identifier>
    <author>Pascale Rudolph</author>
    <author>Jörg Krüger</author>
    <author>Wolfgang Kautek</author>
    <collection role="fulltextaccess" number="">Weder Datei noch physisches Exemplar vorhanden ("No Access")</collection>
    <collection role="literaturgattung" number="">Graue Literatur</collection>
  </doc>
  <doc>
    <id>802</id>
    <completedYear/>
    <publishedYear>2000</publishedYear>
    <thesisYearAccepted/>
    <language>eng</language>
    <pageFirst>659</pageFirst>
    <pageLast>663</pageLast>
    <pageNumber/>
    <edition/>
    <issue/>
    <volume>154-155</volume>
    <type>article</type>
    <publisherName>North-Holland</publisherName>
    <publisherPlace>Amsterdam</publisherPlace>
    <creatingCorporation/>
    <contributingCorporation/>
    <belongsToBibliography>1</belongsToBibliography>
    <completedDate>--</completedDate>
    <publishedDate>--</publishedDate>
    <thesisDateAccepted>--</thesisDateAccepted>
    <title language="eng">Femtosecond pulse laser processing of TiN on silicon</title>
    <abstract language="eng">Ultrashort pulse laser microstructuring (pulse duration 130 fs, wavelength 800 nm, repetition rate 2 Hz) of titanium nitride (TiN) films on silicon substrates was performed in air using the direct focusing technique. The lateral and vertical precision of laser ablation was evaluated. The TiN ablation threshold changed with the number of pulses applied to the surface due to an incubation effect. An ablation depth per pulse below the penetration depth of light was observed. Columnar structures were formed in the silicon substrate after drilling through the TiN layer.</abstract>
    <parentTitle language="eng">Applied surface science</parentTitle>
    <identifier type="old">269</identifier>
    <identifier type="doi">10.1016/S0169-4332(99)00481-X</identifier>
    <identifier type="issn">0169-4332</identifier>
    <identifier type="issn">1873-5584</identifier>
    <enrichment key="date_peer_review">27.07.2000</enrichment>
    <author>Jörn Bonse</author>
    <author>Pascale Rudolph</author>
    <author>Jörg Krüger</author>
    <author>Steffen Baudach</author>
    <author>Wolfgang Kautek</author>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>Femtosecond laser ablation</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>Titanium nitride</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>Silicon</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>Optical properties</value>
    </subject>
    <collection role="literaturgattung" number="">Verlagsliteratur</collection>
    <collection role="fulltextaccess" number="">Datei im Netzwerk der BAM verfügbar ("Closed Access")</collection>
  </doc>
  <doc>
    <id>801</id>
    <completedYear/>
    <publishedYear>1999</publishedYear>
    <thesisYearAccepted/>
    <language>eng</language>
    <pageFirst>S763</pageFirst>
    <pageLast>S766</pageLast>
    <pageNumber/>
    <edition/>
    <issue>7</issue>
    <volume>69</volume>
    <type>article</type>
    <publisherName>Springer</publisherName>
    <publisherPlace>Berlin</publisherPlace>
    <creatingCorporation/>
    <contributingCorporation/>
    <belongsToBibliography>1</belongsToBibliography>
    <completedDate>--</completedDate>
    <publishedDate>--</publishedDate>
    <thesisDateAccepted>--</thesisDateAccepted>
    <title language="eng">Femtosecond- and nanosecond-pulse laser ablation of bariumalumoborosilicate glass</title>
    <abstract language="eng">Laser ablation with femtosecond pulses (130 fs, wavelength 800 nm, repetition rate 2 Hz) was compared with nanosecond-pulse ablation (10 ns, wavelength 266 nm, repetition rate 2.5 Hz) of bariumalumoborosilicate glass in air using the direct focusing technique. Different ablation thresholds and heat-affected zones were observed. The lateral and vertical machining precision was evaluated. Single nanosecond laser pulses in the far UV resulted in a bubble or a circular hole in the centre of the illuminated spot, depending on the applied fluence. The ablation behaviour in the case of near-IR femtosecond pulses contrasted to this. Bubble formation was not detected. It needed repeated pulses at the same spot to modify the surface until material removal could be observed (incubation). Cavity dimensions of less than the beam diameter were achieved in this case.</abstract>
    <parentTitle language="eng">Applied physics A</parentTitle>
    <identifier type="old">268</identifier>
    <identifier type="doi">10.1007/s003390051524</identifier>
    <identifier type="issn">0947-8396</identifier>
    <enrichment key="eventName">5th International Conference on Laser Ablation ; COLA '99</enrichment>
    <enrichment key="eventPlace">Göttingen, Germany</enrichment>
    <enrichment key="eventStart">1998-07-19</enrichment>
    <enrichment key="eventEnd">1999-07-23</enrichment>
    <enrichment key="date_peer_review">27.07.2000</enrichment>
    <author>Pascale Rudolph</author>
    <author>Jörn Bonse</author>
    <author>Jörg Krüger</author>
    <author>Wolfgang Kautek</author>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>Laser ablation</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>Bariumalumoborosilicate glass</value>
    </subject>
    <collection role="literaturgattung" number="">Verlagsliteratur</collection>
    <collection role="fulltextaccess" number="">Weder Datei noch physisches Exemplar vorhanden ("No Access")</collection>
  </doc>
</export-example>
