Dokument-ID Dokumenttyp Autoren/innen Persönliche Herausgeber/innen Haupttitel Abstract Auflage Verlagsort Verlag Herausgeber (Institution) Erscheinungsjahr Titel des übergeordneten Werkes Jahrgang/Band ISBN Veranstaltung Veranstaltungsort Beginndatum der Veranstaltung Enddatum der Veranstaltung Ausgabe/Heft Erste Seite Letzte Seite URN DOI Lizenz Datum der Freischaltung OPUS4-43595 Beitrag zu einem Tagungsband Wunderle, B.; Onken, T.; Heilmann, J.; Silbernagl, Dorothee; Arnold, J.; Bieniek, T.; Pufall, R. Reliability of sputtered thin aluminium films under accelerated stress testing by vibration loading and modeling Aluminium is still one of the most important contact metallisations for power electronic chips like MOSFETs or IGBTs. With a large difference in thermal expansion coefficients (CTEs) between aluminium and silicon and the temperatures generated in hot-spots during high power transients, these layers are prone to failure due to thermo-mechanical fatigue. Usually lifetime assessment is done by subjecting dedicated test specimens to standardised stress tests as e.g. active or passive thermal cycling. This paper proposes a novel method for accelerated stress testing and lifetime modelling of thin aluminium films in the high-cycle fatigue regime by isothermal mechanical loading. The proposed novel test method is suggested to complement or replace resource-demanding thermal cycling tests and allow simple in-situ monitoring of failure. IEEE 2016 Reliability of sputtered thin aluminium films under accelerated stress testing by vibration loading and modeling 6th Electronic System-Integration Technology Conference (ESTC) Grenoble, France 13.09.2016 15.09.2016 1 14 10.1109/ESTC.2016.7764458 2018-01-08