TY - GEN A1 - Busch, I. A1 - Unger, Wolfgang T1 - Analytical and topographical Reference Material for the Nanoscale N2 - Reliable standards are required to support research and development as well as end-user in application. Appropriate standards have to fulfill three requirements: small uncertainty, easy to use and low overall costs of application. For calibration of microscopes at nanoscale and/or element analysis special requirements for standards are given, which are challenging in manufacture. T2 - Workshop on Reference Nanomaterials CY - Berlin, Germany DA - 14.05.2018 KW - XPS KW - Imaging KW - Reference material KW - NoStep Standards PY - 2018 UR - https://opus4.kobv.de/opus4-bam/frontdoor/index/index/docId/45156 AN - OPUS4-45156 AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany