TY - CONF A1 - Friedrich, Jörg Florian T1 - Pulsed plasma initiated homo and copolimerisation - deposition rates and plasma diagnostic in dependence on pulse length and frequency T2 - ISPC-16 T2 - ISPC-16 CY - Taormina, Italy DA - 2003-06-22 PY - 2003 AN - OPUS4-4667 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -