TY  - CONF
A1  - Seuthe, T.
T1  - Requirements on glasses for fs-laser based micro-structuring
T2  - International Conference & Exhibition on Ceramic Interconnect & Ceramic Microsystems Technologies CCIMT
T2  - International Conference & Exhibition on Ceramic Interconnect & Ceramic Microsystems Technologies CCIMT
CY  - Dresden, Germany
DA  - 2015-04-20
PY  - 2015
AN  - OPUS4-32926
LA  - deu
AD  - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany
ER  -