TY - GEN A1 - Senoner, Mathias T1 - Project A8: New procedures for the determination of lateral resolution of instruments for surface analysis in the nanometre range T2 - VAMAS TWA 2 Meeting T2 - VAMAS TWA 2 Meeting CY - Vienna, Austria DA - 2005-09-25 PY - 2005 UR - https://opus4.kobv.de/opus4-bam/frontdoor/index/index/docId/11218 AN - OPUS4-11218 AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany