TY - CONF ED - Arwin, H. ED - Beck, Uwe ED - Schubert, M. T1 - Papers presented at the 4th International Conference on Spectroscopic Ellipsometry (ICSE 4) - Part 2 T2 - Physica status solidi C T2 - 4th International Conference on Spectroscopic Ellipsometry (ICSE 4) CY - Stockholm, Sweden DA - 2007-06-11 PY - 2008 DO - https://doi.org/10.1002/pssc.200860015 SN - 1610-1634 SN - 1862-6351 SN - 1610-1642 VL - 5 IS - 5 SP - 1000 EP - 1441 PB - Wiley-VCH CY - Berlin AN - OPUS4-25432 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -