TY - CONF A1 - Fischer, Daniel A1 - Beck, Uwe A1 - Duwe, M. A1 - Schneider, S. T1 - Mueller-matrix imaging ellipsometry of structural anomalies and inhomogenities N2 - In the last years, the implementation of imaging ellipsometry in the variety of optical characterization techniques has shown tremendous potential to analyze the topology of surfaces in the lateral dimension. In the later studies, this contrast-rich surface images were affiliated with changes of the refraction indices, Absorption bands or layer thicknesses. However, it was realized that additional factors like curvature or scattering can have a great Impact on the ellipsometric readout of the analyzed system. In this study, we focus on the systematic evaluation of structural anomalies and inhomogenities of several Basic systems. This includes spherical particles as a model for microscopic curved surfaces in a range of 0.25 to 25 μm in diameter. In the macroscopic regime several conventional convex lenses were analyzed. Additional affords were made to generate microscopic concave model systems by applying nanoindentation with a spherical indentation unit. With this method calottes with a depth of 0.04 to 2 μm and radius of 2.5 μm were made. The macroscopic counterpart is delivered by conventional concave lens systems. For all systems, a variety of different bulk materials was investigated. This includes metal oxides, metals and polymers as well as combinations of each by applying coatings on the bulk materials with different layer thicknesses. To analyze these structural anomalies and inhomogenities properly, Mueller-Matrix imaging ellipsometry is the method of choice to address cross- and depolarization effects that occur due to the curved surfaces. Supplementary methods were used for an independent characterization of the topological properties of all structural anomalies and inhomogenities. This includes AFM and SEM for the microscopic samples (microparticles and nanoindented holes) and white light interferometry for the macroscopic lenses. This study results in a systematic screening of different coated and uncoated material systems with a topology that does not fit into conventional ellipsometry and thus is analyzed by Muller-Matrix imaging ellipsometry. This will help in quality control and is a contribution to the understanding of the polarizing effects of non-ideal Systems analyzed by ellipsometry. T2 - 8th International conference on spectroscopic ellipsometry (ICSE-8) CY - Barcelona, Spain DA - 26.05.2019 KW - Spectroskopic Imaging KW - Mueller-Matrix imaging ellipsometry KW - Structural anomalies KW - Structural inhomogenities PY - 2019 AN - OPUS4-48347 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -