TY - JOUR A1 - Fahrbach, M. A1 - Friedrich, Sebastian A1 - Cappella, Brunero A1 - Peiner, Erwin T1 - Calibrating a high-speed contact-resonance profilometer JF - Journal of Sensors and Sensor Systems N2 - A European EMPIR project, which aims to use large-scale piezoresistive microprobes for contact resonance applications, a well-established measurement mode of atomic force microscopes (AFMs), is being funded. As the probes used in this project are much larger in size than typical AFM probes some of the simplifications and assumptions made for AFM probes are not applicable. This study presents a guide on how to systematically create a model that replicates the dynamic behavior of microprobes, including air damping, nonlinear sensitivities, and frequency dependencies. The model is then verified by analyzing a series of measurements. KW - Piezoresistive cantilever KW - AFM KW - contact resonance PY - 2020 UR - https://nbn-resolving.org/urn:nbn:de:kobv:b43-509899 DO - https://doi.org/10.5194/jsss-9-179-2020 VL - 9 SP - 179 EP - 187 PB - Copernicus Publications AN - OPUS4-50989 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -